一步激光诱导氧化和掺杂al掺杂TiO2定制p型转化（Small 39/2025）

IF 12.1 2区材料科学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Small Pub Date : 2025-10-02 DOI:10.1002/smll.70300

Gyuwon Yang, Junil Kim, Byeongmoon Lee, Jae Eun Jang, Hyuk-Jun Kwon

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引用次数: 0

摘要

金属氧化物半导体激光辅助氧化和掺杂策略可以一步形成Al掺杂TiO2，通过选择性Al扩散在阈值激光功率上实现p型电导率。该方法克服了TiO2固有的n型性质，为类型转换提供了一种cmos兼容的途径。该方法提供了精确的空间控制，增强的空穴传输，以及下一代氧化物电子和3D集成的可扩展性。更多内容见文章编号2502139，权赫俊和同事。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

One-Step Laser-Induced Oxidation and Doping for Tailored p-Type Conversion of Al-Doped TiO2 (Small 39/2025)

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One-Step Laser-Induced Oxidation and Doping for Tailored p-Type Conversion of Al-Doped TiO2 (Small 39/2025)

Metal Oxide Semiconductors

A laser-assisted oxidation and doping strategy enables one-step formation of Al-doped TiO₂, achieving p-type conductivity through selective Al diffusion above the threshold laser power. This method overcomes the intrinsic n-type nature of TiO₂, offering a CMOS-compatible route for type conversion. The approach provides precise spatial control, enhanced hole transport, and scalability for next-generation oxide electronics and 3D integration. More in article number 2502139, Hyuk-Jun Kwon and co-workers.

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来源期刊

Small 工程技术-材料科学：综合

CiteScore

17.70

自引率

3.80%

发文量

1830

审稿时长

2.1 months

期刊介绍： Small serves as an exceptional platform for both experimental and theoretical studies in fundamental and applied interdisciplinary research at the nano- and microscale. The journal offers a compelling mix of peer-reviewed Research Articles, Reviews, Perspectives, and Comments. With a remarkable 2022 Journal Impact Factor of 13.3 (Journal Citation Reports from Clarivate Analytics, 2023), Small remains among the top multidisciplinary journals, covering a wide range of topics at the interface of materials science, chemistry, physics, engineering, medicine, and biology. Small's readership includes biochemists, biologists, biomedical scientists, chemists, engineers, information technologists, materials scientists, physicists, and theoreticians alike.