用于法布里-珀罗腔体光栅反射性能评价的空间光路系统研究。

IF 3 3区 工程技术 Q2 CHEMISTRY, ANALYTICAL
Micromachines Pub Date : 2025-08-29 DOI:10.3390/mi16090998
Jiamin Chen, Gengchen Zhang, Hejin Wang, Qianyu Ren, Yongqiu Zheng, Chenyang Xue
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引用次数: 0

摘要

在高温原位传感领域,迫切需要具有热应力匹配的高反射法布里-珀罗(F-P)腔镜。石英基体积Bragg光栅(VBG)利用材料均质化的整体结构,可以代替介质高反射膜制备高温高精度的F-P腔敏感单元。VBG的反射率是决定F-P谐振腔性能的关键参数,其精确测量对于器件传感能力的预评估非常重要。基于大宽高比石英基VBG的反射率测量,提出了一种自由空间光路反射测量系统。利用ZEMAX仿真优化光传输路径,确定光斑尺寸达到最优时各部件的位置。VBG反射率测量系统构建完成后,通过测量光路损耗对测量误差进行校准,最大误差仅为1.2%。最后,标定系统测得的VBG反射率为30.84%,与多物理场模拟结果基本一致,偏差低至0.85%。实验结果充分验证了反射率测量系统的有效性和较高的测量精度。本研究工作为微米尺度光栅的特性测试提供了一种新的方法。此外,本工作结合光学表征方法验证了VBG制备技术的良好效果,为后续均匀集成法布里-珀罗腔传感器的实现提供了核心技术支持。在光学传感和微纳集成领域具有重要的应用价值。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Research on Spatial Optical Path System for Evaluating the Reflection Performance of Quartz-Based Volume Bragg Grating Applied to Fabry-Perot Cavity.

Research on Spatial Optical Path System for Evaluating the Reflection Performance of Quartz-Based Volume Bragg Grating Applied to Fabry-Perot Cavity.

Research on Spatial Optical Path System for Evaluating the Reflection Performance of Quartz-Based Volume Bragg Grating Applied to Fabry-Perot Cavity.

Research on Spatial Optical Path System for Evaluating the Reflection Performance of Quartz-Based Volume Bragg Grating Applied to Fabry-Perot Cavity.

In the field of high-temperature in situ sensing, highly reflective Fabry-Perot (F-P) cavity mirrors with thermal stress matching are urgently needed. The quartz-based volume Bragg grating (VBG) can replace the dielectric high-reflection film to prepare a high-temperature and high-precision F-P cavity sensitive unit by virtue of the integrated structure of homogeneous materials. The reflectivity of the VBG is a key parameter determining the performance of the F-P cavity, and its accurate measurement is very important for the pre-evaluation of the device's sensing ability. Based on the reflectivity measurement of quartz-based VBG with a large aspect ratio, a free-space optical path reflective measurement system is proposed. The ZEMAX simulation is used to optimize the optical transmission path and determine the position of each component when the optimal spot size is achieved. After completing the construction of the VBG reflectivity measurement system, the measurement error is calibrated by measuring the optical path loss, and the maximum error is only 1.2%. Finally, the reflectivity of the VBG measured by the calibrated system is 30.84%, which is basically consistent with the multi-physical field simulation results, showing a deviation as low as 0.85%. The experimental results fully verify the availability and high measurement accuracy of the reflectivity measurement system. This research work provides a new method for testing the characteristics of micron-scale grating size VBGs. Additionally, this work combines optical characterization methods to verify the good effect of VBG preparation technology, providing core technical support for the realization of subsequent homogeneous integrated Fabry-Perot cavity sensors. Furthermore, it holds important application value in the field of optical sensing and micro-nano integration.

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来源期刊
Micromachines
Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION
CiteScore
5.20
自引率
14.70%
发文量
1862
审稿时长
16.31 days
期刊介绍: Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
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