{"title":"用于法布里-珀罗腔体光栅反射性能评价的空间光路系统研究。","authors":"Jiamin Chen, Gengchen Zhang, Hejin Wang, Qianyu Ren, Yongqiu Zheng, Chenyang Xue","doi":"10.3390/mi16090998","DOIUrl":null,"url":null,"abstract":"<p><p>In the field of high-temperature in situ sensing, highly reflective Fabry-Perot (F-P) cavity mirrors with thermal stress matching are urgently needed. The quartz-based volume Bragg grating (VBG) can replace the dielectric high-reflection film to prepare a high-temperature and high-precision F-P cavity sensitive unit by virtue of the integrated structure of homogeneous materials. The reflectivity of the VBG is a key parameter determining the performance of the F-P cavity, and its accurate measurement is very important for the pre-evaluation of the device's sensing ability. Based on the reflectivity measurement of quartz-based VBG with a large aspect ratio, a free-space optical path reflective measurement system is proposed. The ZEMAX simulation is used to optimize the optical transmission path and determine the position of each component when the optimal spot size is achieved. After completing the construction of the VBG reflectivity measurement system, the measurement error is calibrated by measuring the optical path loss, and the maximum error is only 1.2%. Finally, the reflectivity of the VBG measured by the calibrated system is 30.84%, which is basically consistent with the multi-physical field simulation results, showing a deviation as low as 0.85%. The experimental results fully verify the availability and high measurement accuracy of the reflectivity measurement system. This research work provides a new method for testing the characteristics of micron-scale grating size VBGs. Additionally, this work combines optical characterization methods to verify the good effect of VBG preparation technology, providing core technical support for the realization of subsequent homogeneous integrated Fabry-Perot cavity sensors. Furthermore, it holds important application value in the field of optical sensing and micro-nano integration.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0000,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472014/pdf/","citationCount":"0","resultStr":"{\"title\":\"Research on Spatial Optical Path System for Evaluating the Reflection Performance of Quartz-Based Volume Bragg Grating Applied to Fabry-Perot Cavity.\",\"authors\":\"Jiamin Chen, Gengchen Zhang, Hejin Wang, Qianyu Ren, Yongqiu Zheng, Chenyang Xue\",\"doi\":\"10.3390/mi16090998\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>In the field of high-temperature in situ sensing, highly reflective Fabry-Perot (F-P) cavity mirrors with thermal stress matching are urgently needed. The quartz-based volume Bragg grating (VBG) can replace the dielectric high-reflection film to prepare a high-temperature and high-precision F-P cavity sensitive unit by virtue of the integrated structure of homogeneous materials. The reflectivity of the VBG is a key parameter determining the performance of the F-P cavity, and its accurate measurement is very important for the pre-evaluation of the device's sensing ability. Based on the reflectivity measurement of quartz-based VBG with a large aspect ratio, a free-space optical path reflective measurement system is proposed. The ZEMAX simulation is used to optimize the optical transmission path and determine the position of each component when the optimal spot size is achieved. After completing the construction of the VBG reflectivity measurement system, the measurement error is calibrated by measuring the optical path loss, and the maximum error is only 1.2%. Finally, the reflectivity of the VBG measured by the calibrated system is 30.84%, which is basically consistent with the multi-physical field simulation results, showing a deviation as low as 0.85%. The experimental results fully verify the availability and high measurement accuracy of the reflectivity measurement system. This research work provides a new method for testing the characteristics of micron-scale grating size VBGs. Additionally, this work combines optical characterization methods to verify the good effect of VBG preparation technology, providing core technical support for the realization of subsequent homogeneous integrated Fabry-Perot cavity sensors. Furthermore, it holds important application value in the field of optical sensing and micro-nano integration.</p>\",\"PeriodicalId\":18508,\"journal\":{\"name\":\"Micromachines\",\"volume\":\"16 9\",\"pages\":\"\"},\"PeriodicalIF\":3.0000,\"publicationDate\":\"2025-08-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472014/pdf/\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micromachines\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.3390/mi16090998\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"CHEMISTRY, ANALYTICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micromachines","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.3390/mi16090998","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, ANALYTICAL","Score":null,"Total":0}
Research on Spatial Optical Path System for Evaluating the Reflection Performance of Quartz-Based Volume Bragg Grating Applied to Fabry-Perot Cavity.
In the field of high-temperature in situ sensing, highly reflective Fabry-Perot (F-P) cavity mirrors with thermal stress matching are urgently needed. The quartz-based volume Bragg grating (VBG) can replace the dielectric high-reflection film to prepare a high-temperature and high-precision F-P cavity sensitive unit by virtue of the integrated structure of homogeneous materials. The reflectivity of the VBG is a key parameter determining the performance of the F-P cavity, and its accurate measurement is very important for the pre-evaluation of the device's sensing ability. Based on the reflectivity measurement of quartz-based VBG with a large aspect ratio, a free-space optical path reflective measurement system is proposed. The ZEMAX simulation is used to optimize the optical transmission path and determine the position of each component when the optimal spot size is achieved. After completing the construction of the VBG reflectivity measurement system, the measurement error is calibrated by measuring the optical path loss, and the maximum error is only 1.2%. Finally, the reflectivity of the VBG measured by the calibrated system is 30.84%, which is basically consistent with the multi-physical field simulation results, showing a deviation as low as 0.85%. The experimental results fully verify the availability and high measurement accuracy of the reflectivity measurement system. This research work provides a new method for testing the characteristics of micron-scale grating size VBGs. Additionally, this work combines optical characterization methods to verify the good effect of VBG preparation technology, providing core technical support for the realization of subsequent homogeneous integrated Fabry-Perot cavity sensors. Furthermore, it holds important application value in the field of optical sensing and micro-nano integration.
期刊介绍:
Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.