周期性减薄射流电化学铣削法制备高纵横比非晶合金微槽。

IF 3 3区 工程技术 Q2 CHEMISTRY, ANALYTICAL
Micromachines Pub Date : 2025-08-26 DOI:10.3390/mi16090979
Yahui Li, Pingmei Ming, Dongdong Li, Rongbo Zhao, Shen Niu
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引用次数: 0

摘要

射流电化学铣削(JECM)由于其操作灵活性、缺乏材料限制和优异的表面质量,在薄壁、低刚性和热敏性金属材料(如非晶合金)中制造精细凹槽和狭缝具有显着的优势。然而,传统的用于沟槽加工的JECM技术遇到了一些限制,包括过度过切、产生高深宽比微结构的能力受到限制,以及加工精度降低。为了解决这些问题,本研究提出了一种称为周期性减薄射流电化学铣削(PT-JECM)方法的创新方法。这种方法包括最初使用原始喷嘴直径通过单个通道生成浅微槽,然后根据预成型的凹槽使用逐渐变小的喷嘴直径连续铣削通道。与传统的JECM方法对比分析表明,该策略将刻蚀因子从1.896提高到4.318,提高了128%。此外,该方法还将槽宽从275 μm减小到1 μm,将长径比从0.51提高到0.83,提高了63%,实现了大长径比孔和槽结构的精密加工。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabricating High Aspect Ratio Amorphous Alloys Microgrooves by Using Periodically Thinning Jet Electrochemical Milling Method.

Jet electrochemical milling (JECM) offers significant advantages for fabricating fine grooves and slits in thin-walled, low-rigidity, and heat-sensitive metallic materials, such as amorphous alloys, owing to its operational flexibility, lack of material constraints, and superior surface quality. Nevertheless, conventional JECM techniques for groove machining encounter limitations including excessive overcut, restricted ability to produce microstructures with high depth-to-width ratios, and reduced machining accuracy. To address these issues, this study proposes an innovative approach termed the periodically thinning jet electrochemical milling (PT-JECM) method. This method involves initially generating a shallow microgroove through a single pass using the original nozzle diameter, followed by successive milling passes with progressively smaller nozzle diameters based on the preformed groove. Comparative analysis with traditional JECM methods reveals that this strategy significantly improves the etching factor from 1.896 to 4.318, corresponding to a 128% enhancement. Furthermore, it markedly decreases the slot width increase from 275 μm to 1 μm and improves the aspect ratio from 0.51 to 0.83, representing a 63% increase, enabling the precision machining of large aspect ratio holes and slot structures.

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来源期刊
Micromachines
Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION
CiteScore
5.20
自引率
14.70%
发文量
1862
审稿时长
16.31 days
期刊介绍: Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
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