二维金属结构具有非线性Soret和Dufour效应的cattaneo型热弹性扩散瞬态冲击响应的非线性时域有限元分析

IF 2.5 3区 工程技术 Q2 MECHANICS
Huili Guo, Zhipeng Xu, Fulin Shang
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引用次数: 0

摘要

随着超快加热技术在半导体制造领域的广泛应用,热弹性扩散耦合的研究对微电子元件的制造和微加工具有重要意义。在这种非等温、非均匀摩尔浓度环境下,实验和理论研究表明,非线性Soret和Dufour效应显著影响热输运和质量输运,而这些因素的影响在本课题中仍未被考虑。为了解决这一缺陷,本文建立了一种新的具有非线性Soret和Dufour效应的cattaneo型热弹性扩散耦合模型。利用虚功原理和非线性有限元法直接求解非线性有限元控制方程。进一步研究了具有非线性Soret和Dufour效应的各向同性均匀矩形热弹性金属板在温度和化学势的区域性时变冲击载荷作用下的瞬态冲击响应。无因次结果表明,非线性Dufour效应在温度场中起主导作用,直接调节热流密度,显著改变温度分布。非线性Soret效应增强了结构集中、应力和变形响应,促进了扩散波的传播。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Nonlinear time-domain finite element analysis to transient impact responses of Cattaneo-type thermoelastic diffusion with nonlinear Soret and Dufour effects for 2D metallic structure

The investigations of thermoelastic diffusion coupling are of great importance for manufacturing and micromachining of microelectronic components, especially with the widespread application of ultrafast heating technology in the field of semiconductor manufacturing. In such non-isothermal and non-uniform molar concentration environments, the experimental and theoretical studies show that the nonlinear Soret and Dufour effects significantly affect the heat and mass transport, whereas the influence of these factors are still not considered on this topic. To address such deficiency, present work establishes a new Cattaneo-type thermoelastic diffusion coupling model with the nonlinear Soret and Dufour effects. The principle of virtual work and the nonlinear finite element method are used to directly solve nonlinear finite element control equations. The transient impact responses of an isotropic homogeneity rectangular thermoelastic metallic plate with the nonlinear Soret and Dufour effects are further studied under zonal time-dependent shock loadings of temperature and chemical potential. Dimensionless results reveal that the nonlinear Dufour effect plays a dominant role in the temperature field, directly regulating the heat flux and significantly changing the temperature distribution. The nonlinear Soret effect enhances the structural concentration, stress and deformation responses, improving diffusion wave propagation.

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来源期刊
CiteScore
4.40
自引率
10.70%
发文量
234
审稿时长
4-8 weeks
期刊介绍: Archive of Applied Mechanics serves as a platform to communicate original research of scholarly value in all branches of theoretical and applied mechanics, i.e., in solid and fluid mechanics, dynamics and vibrations. It focuses on continuum mechanics in general, structural mechanics, biomechanics, micro- and nano-mechanics as well as hydrodynamics. In particular, the following topics are emphasised: thermodynamics of materials, material modeling, multi-physics, mechanical properties of materials, homogenisation, phase transitions, fracture and damage mechanics, vibration, wave propagation experimental mechanics as well as machine learning techniques in the context of applied mechanics.
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