磁控溅射初始锌纳米层对热氧化法制备氧化锌薄膜性能的影响

IF 0.6 4区材料科学 Q4 MATERIALS SCIENCE, CERAMICS

Glass Physics and Chemistry Pub Date : 2025-07-16 DOI:10.1134/S1087659624601126

V. V. Tomaev, V. A. Polishchuk, N. B. Leonov

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引用次数: 0

摘要

研究了用磁控溅射法制备厚度为10、20、40、50、60、80 nm的多晶锌层，在空气中热氧化法制备的不同厚度氧化锌膜的形貌、结构特征和光学性能。分析了初始层厚度和锌晶体尺寸对所得氧化锌薄膜的晶体结构和性能的影响，以及随着薄膜厚度的增加，其光学带隙和晶格参数对块状氧化锌晶体值的逼近规律。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Influence of the Initial Zinc Nanolayers Obtained by Magnetron Sputtering on the Properties of Thin Zinc Oxide Films Synthesized on Their Basis by Thermal Oxidation

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Influence of the Initial Zinc Nanolayers Obtained by Magnetron Sputtering on the Properties of Thin Zinc Oxide Films Synthesized on Their Basis by Thermal Oxidation

The morphology, structural features, and optical properties of zinc oxide films of various thicknesses, synthesized by thermal oxidation in an air atmosphere of polycrystalline zinc layers with a thickness of 10, 20, 40, 50, 60, and 80 nm, obtained by magnetron sputtering on glass substrates, are studied. The influence of the thickness of the initial layers and the size of zinc crystals on the characteristics of the crystal structure and properties of the resulting zinc oxide films, as well as the patterns of the approximation of its optical band gap and crystal lattice parameters to the values for bulk zinc oxide (ZnO) crystals with increasing film thickness, are analyzed.

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来源期刊

Glass Physics and Chemistry 工程技术-材料科学：硅酸盐

CiteScore

1.20

自引率

14.30%

发文量

审稿时长

6-12 weeks

期刊介绍： Glass Physics and Chemistry presents results of research on the inorganic and physical chemistry of glass, ceramics, nanoparticles, nanocomposites, and high-temperature oxides and coatings. The journal welcomes manuscripts from all countries in the English or Russian language.