电子束蒸发YSZ靶时工作气体组成对束流等离子体中离子质荷比组成的影响

IF 1.1 4区物理与天体物理 Q4 PHYSICS, FLUIDS & PLASMAS

Plasma Physics Reports Pub Date : 2025-07-16 DOI:10.1134/S1063780X25602494

A. V. Tyunkov, A. A. Andronov, D. B. Zolotukhin, T. O. Klimkin, A. K. Nesterenko, S. A. Salnikov, Yu. G. Yushkov

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引用次数: 0

摘要

本文研究了在惰性气体和反应气体环境下，用电子束在前真空压力范围内蒸发钇-部分稳定氧化锆（YSZ）制成的固体陶瓷靶所产生的等离子体中离子的质荷组成。采用现代化的RGA-300残余大气质量分析仪对束流等离子体离子的质荷组成进行了监测。给出了工作气体组成对蒸发靶材离子质谱的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

The Influence of the Working Gas Composition on the Mass-to-Charge Composition of Ions in the Beam Plasma during the Evaporation of an YSZ Target by an Electron Beam

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The Influence of the Working Gas Composition on the Mass-to-Charge Composition of Ions in the Beam Plasma during the Evaporation of an YSZ Target by an Electron Beam

The paper presents the results of a study on the mass-to-charge composition of ions in the beam plasma generated during the evaporation of a solid-state ceramic target made of yttria-partially stabilized zirconia (YSZ) in an environment of inert and reactive gases by an electron beam in the forevacuum pressure range. Monitoring of the mass-to-charge composition of beam plasma ions was carried out using a modernized RGA-300 residual atmosphere mass analyzer. The influence of the working gas composition on the mass spectra of ions of the evaporated target material is shown.

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来源期刊

Plasma Physics Reports 物理-物理：流体与等离子体

CiteScore

1.90

自引率

36.40%

发文量

104

审稿时长

4-8 weeks

期刊介绍： Plasma Physics Reports is a peer reviewed journal devoted to plasma physics. The journal covers the following topics: high-temperature plasma physics related to the problem of controlled nuclear fusion based on magnetic and inertial confinement; physics of cosmic plasma, including magnetosphere plasma, sun and stellar plasma, etc.; gas discharge plasma and plasma generated by laser and particle beams. The journal also publishes papers on such related topics as plasma electronics, generation of radiation in plasma, and plasma diagnostics. As well as other original communications, the journal publishes topical reviews and conference proceedings.