基于硅板的法布里-珀罗微干涉仪干涉带位移测量温度

IF 0.4 4区工程技术 Q4 ENGINEERING, MULTIDISCIPLINARY

Instruments and Experimental Techniques Pub Date : 2025-07-04 DOI:10.1134/S0020441225700423

V. T. Potapov, N. M. Zhamaletdinov, V. V. Moiseev

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引用次数: 0

摘要

本文介绍了一种基于硅法布里-珀罗微干涉仪的光纤温度传感器，该传感器的温度是通过硅的折射率随温度的变化而引起干涉条纹的位移来测量的。法布里-珀罗干涉仪是一块尺寸为500 × 500µm2，厚度为20µm的硅板，位于单模光纤的末端。这种法布里-珀罗干涉仪的转换系数约为1 nW/°C，当使用现代平衡光电探测器时，可提供5 × 10-3°C的灵敏度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Temperature Measurement by the Shift of Interference Bands in a Fabry–Perot Microinterferometer Based on a Silicon Plate

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Temperature Measurement by the Shift of Interference Bands in a Fabry–Perot Microinterferometer Based on a Silicon Plate

A fiber-optic temperature sensor with a sensitive element based on a silicon Fabry–Perot microinterferometer, the temperature of which is measured by the shift of interference fringes due to the dependence of the refractive index of silicon on temperature, is described. The Fabry–Perot interferometer is a silicon plate with dimensions 500 × 500 µm² and thickness 20 µm located at the end of a single-mode fiber. The conversion coefficient of such a Fabry-Perot interferometer is approximately 1 nW/°C, which, when using modern balanced photodetectors, provides the sensitivity of the order of 5 × 10^–3°C.

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来源期刊

Instruments and Experimental Techniques 工程技术-工程：综合

CiteScore

1.20

自引率

33.30%

发文量

113

审稿时长

4-8 weeks

期刊介绍： Instruments and Experimental Techniques is an international peer reviewed journal that publishes reviews describing advanced methods for physical measurements and techniques and original articles that present techniques for physical measurements, principles of operation, design, methods of application, and analysis of the operation of physical instruments used in all fields of experimental physics and when conducting measurements using physical methods and instruments in astronomy, natural sciences, chemistry, biology, medicine, and ecology.