基于第三代半导体碳化硅的压力传感器综述

IF 11.6 1区工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY

Engineering Pub Date : 2025-09-01 DOI:10.1016/j.eng.2024.12.036

Xudong Fang , Chen Wu , Bian Tian , Libo Zhao , Xueyong Wei , Zhuangde Jiang

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引用次数: 0

摘要

微机电系统（MEMS）高温压力传感器具有小型化、轻量化设计、简化信号处理、高精度等优点，广泛应用于航空航天、石油化工、汽车电子等领域。近年来，随着半导体材料生长技术和智能设备运行的进步，基于第三代半导体碳化硅（SiC）的高温压力传感器受到了极大的关注。本文研究了SiC单晶的材料特性，并讨论了几种影响SiC压力传感器性能的技术，包括压阻效应、欧姆接触、蚀刻工艺和封装方法。并对该领域未来的研究方向进行了探讨。该综述强调了提高工作温度和推进传感器集成作为未来SiC高温压力传感器研究和应用的关键趋势的重要性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Pressure Sensors Based on the Third-Generation Semiconductor Silicon Carbide: A Comprehensive Review

Microelectromechanical system (MEMS) high-temperature pressure sensors are widely used in aerospace, petrochemical industries, automotive electronics, and other fields owing to their advantages of miniaturization, lightweight design, simplified signal processing, and high accuracy. In recent years, advances in semiconductor material growth technology and intelligent equipment operation have significantly increased interest in high-temperature pressure sensors based on the third-generation semiconductor silicon carbide (SiC). This review examines the material properties of SiC single crystals and discusses several technologies influencing the performance of SiC pressure sensors, including the piezoresistive effect, ohmic contact, etching processes, and packaging methodologies. Additionally, it explores future research directions in the field. The review highlights the importance of increasing operating temperatures and advancing sensor integration as critical trends for future SiC high-temperature pressure sensor research and applications.

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来源期刊

Engineering Environmental Science-Environmental Engineering

自引率

1.60%

发文量

335

审稿时长

35 days

期刊介绍： Engineering, an international open-access journal initiated by the Chinese Academy of Engineering (CAE) in 2015, serves as a distinguished platform for disseminating cutting-edge advancements in engineering R&D, sharing major research outputs, and highlighting key achievements worldwide. The journal's objectives encompass reporting progress in engineering science, fostering discussions on hot topics, addressing areas of interest, challenges, and prospects in engineering development, while considering human and environmental well-being and ethics in engineering. It aims to inspire breakthroughs and innovations with profound economic and social significance, propelling them to advanced international standards and transforming them into a new productive force. Ultimately, this endeavor seeks to bring about positive changes globally, benefit humanity, and shape a new future.