电抛光增强316L不锈钢在半导体应用中的耐腐蚀机理：夹杂物调节、钝化膜优化和侵蚀性微滴抑制

IF 7.4 1区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Corrosion Science Pub Date : 2025-09-22 DOI:10.1016/j.corsci.2025.113347

Chaoran Ma , Zhice Yang , Xi Zhuo Jiang , Peng Zhou , Yang Zhao , Yong Hua , Cheng Su , Tao Zhang , Fuhui Wang

{"title":"电抛光增强316L不锈钢在半导体应用中的耐腐蚀机理：夹杂物调节、钝化膜优化和侵蚀性微滴抑制","authors":"Chaoran Ma , Zhice Yang , Xi Zhuo Jiang , Peng Zhou , Yang Zhao , Yong Hua , Cheng Su , Tao Zhang , Fuhui Wang","doi":"10.1016/j.corsci.2025.113347","DOIUrl":null,"url":null,"abstract":"<div><div>316L stainless steel is exclusively utilized in manufacturing delivery pipelines of electronic special gas (ESG). Long-term exposure to corrosive ESG poses severe corrosion threats to stainless steel components. Particle contamination arising from corrosion products has emerged as a critical challenge impeding the advancement of semiconductor microchips. Electropolishing, a pivotal anti-corrosion techniques in semiconductor applications, enhances the corrosion resistance of 316L stainless steel through three primary mechanisms: 1) surface purification through significant removal of inclusions, 2) passive film optimization by improving structural integrity and flatness at matrix/inclusion interfaces and metal/film interfaces, accompanied by a 277 % increase in the CrOx/FeOx ratio, 3) Effective suppression of aggressive microdroplets formation through surface energy modification.</div></div>","PeriodicalId":290,"journal":{"name":"Corrosion Science","volume":"257 ","pages":"Article 113347"},"PeriodicalIF":7.4000,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Electropolishing-enhanced corrosion resistance mechanisms of 316L stainless steel in semiconductor applications: Inclusion regulation, passive film optimization and aggressive microdroplet suppression\",\"authors\":\"Chaoran Ma , Zhice Yang , Xi Zhuo Jiang , Peng Zhou , Yang Zhao , Yong Hua , Cheng Su , Tao Zhang , Fuhui Wang\",\"doi\":\"10.1016/j.corsci.2025.113347\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>316L stainless steel is exclusively utilized in manufacturing delivery pipelines of electronic special gas (ESG). Long-term exposure to corrosive ESG poses severe corrosion threats to stainless steel components. Particle contamination arising from corrosion products has emerged as a critical challenge impeding the advancement of semiconductor microchips. Electropolishing, a pivotal anti-corrosion techniques in semiconductor applications, enhances the corrosion resistance of 316L stainless steel through three primary mechanisms: 1) surface purification through significant removal of inclusions, 2) passive film optimization by improving structural integrity and flatness at matrix/inclusion interfaces and metal/film interfaces, accompanied by a 277 % increase in the CrOx/FeOx ratio, 3) Effective suppression of aggressive microdroplets formation through surface energy modification.</div></div>\",\"PeriodicalId\":290,\"journal\":{\"name\":\"Corrosion Science\",\"volume\":\"257 \",\"pages\":\"Article 113347\"},\"PeriodicalIF\":7.4000,\"publicationDate\":\"2025-09-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Corrosion Science\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0010938X25006754\",\"RegionNum\":1,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Corrosion Science","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0010938X25006754","RegionNum":1,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

316L不锈钢专门用于制造电子特种气体（ESG）输送管道。长期暴露在腐蚀性的ESG中会对不锈钢部件造成严重的腐蚀威胁。由腐蚀产物引起的颗粒污染已经成为阻碍半导体微芯片进步的关键挑战。电抛光是半导体应用中关键的防腐技术，通过三个主要机制提高316L不锈钢的耐腐蚀性：1)通过去除夹杂物进行表面净化；2)通过改善基体/夹杂物界面和金属/膜界面的结构完整性和平整度来优化被动膜，同时使CrOx/FeOx比提高277 %；3)通过表面能修饰有效抑制侵蚀性微滴的形成。

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Electropolishing-enhanced corrosion resistance mechanisms of 316L stainless steel in semiconductor applications: Inclusion regulation, passive film optimization and aggressive microdroplet suppression

316L stainless steel is exclusively utilized in manufacturing delivery pipelines of electronic special gas (ESG). Long-term exposure to corrosive ESG poses severe corrosion threats to stainless steel components. Particle contamination arising from corrosion products has emerged as a critical challenge impeding the advancement of semiconductor microchips. Electropolishing, a pivotal anti-corrosion techniques in semiconductor applications, enhances the corrosion resistance of 316L stainless steel through three primary mechanisms: 1) surface purification through significant removal of inclusions, 2) passive film optimization by improving structural integrity and flatness at matrix/inclusion interfaces and metal/film interfaces, accompanied by a 277 % increase in the CrOx/FeOx ratio, 3) Effective suppression of aggressive microdroplets formation through surface energy modification.

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来源期刊

Corrosion Science 工程技术-材料科学：综合

CiteScore

13.60

自引率

18.10%

发文量

763

审稿时长

46 days

期刊介绍： Corrosion occurrence and its practical control encompass a vast array of scientific knowledge. Corrosion Science endeavors to serve as the conduit for the exchange of ideas, developments, and research across all facets of this field, encompassing both metallic and non-metallic corrosion. The scope of this international journal is broad and inclusive. Published papers span from highly theoretical inquiries to essentially practical applications, covering diverse areas such as high-temperature oxidation, passivity, anodic oxidation, biochemical corrosion, stress corrosion cracking, and corrosion control mechanisms and methodologies. This journal publishes original papers and critical reviews across the spectrum of pure and applied corrosion, material degradation, and surface science and engineering. It serves as a crucial link connecting metallurgists, materials scientists, and researchers investigating corrosion and degradation phenomena. Join us in advancing knowledge and understanding in the vital field of corrosion science.