{"title":"厚度对热退火（GaIn）2O3薄膜结构和光学性能的影响。","authors":"Shiyang Zhang, Fabi Zhang, Tangyou Sun, Zanhui Chen, Xingpeng Liu, Haiou Li, Shifeng Xie, Wanli Yang, Yue Li","doi":"10.3390/nano15181385","DOIUrl":null,"url":null,"abstract":"<p><p>This work explores the relationship between the thickness and the structural, morphological, and optical features of thermally annealed (GaIn)<sub>2</sub>O<sub>3</sub> thin films grown by pulsed laser deposition at room temperature. The thickness of the (GaIn)<sub>2</sub>O<sub>3</sub> films varied from 20 to 391 nm with an increase in deposition time. The film with a thickness of about 105 nm showed largest grain size as well as the strongest XRD peak intensity, as measured by atomic force microscopy and X-ray diffraction. The studies on the optical properties show that the bandgap value decreased from 5.14 to 4.55 eV with the change in the film thickness from 20 to 391 nm. The film thickness had a significant impact on the structure, morphology, and optical properties of (GaIn)<sub>2</sub>O<sub>3</sub>, and the PLD growth mode notably influenced the film quality. The results suggest that optimizing the film thickness is essential for improving the film quality and achieving the target bandgap.</p>","PeriodicalId":18966,"journal":{"name":"Nanomaterials","volume":"15 18","pages":""},"PeriodicalIF":4.3000,"publicationDate":"2025-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472798/pdf/","citationCount":"0","resultStr":"{\"title\":\"Thickness Influences on Structural and Optical Properties of Thermally Annealed (GaIn)<sub>2</sub>O<sub>3</sub> Films.\",\"authors\":\"Shiyang Zhang, Fabi Zhang, Tangyou Sun, Zanhui Chen, Xingpeng Liu, Haiou Li, Shifeng Xie, Wanli Yang, Yue Li\",\"doi\":\"10.3390/nano15181385\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>This work explores the relationship between the thickness and the structural, morphological, and optical features of thermally annealed (GaIn)<sub>2</sub>O<sub>3</sub> thin films grown by pulsed laser deposition at room temperature. The thickness of the (GaIn)<sub>2</sub>O<sub>3</sub> films varied from 20 to 391 nm with an increase in deposition time. The film with a thickness of about 105 nm showed largest grain size as well as the strongest XRD peak intensity, as measured by atomic force microscopy and X-ray diffraction. The studies on the optical properties show that the bandgap value decreased from 5.14 to 4.55 eV with the change in the film thickness from 20 to 391 nm. The film thickness had a significant impact on the structure, morphology, and optical properties of (GaIn)<sub>2</sub>O<sub>3</sub>, and the PLD growth mode notably influenced the film quality. The results suggest that optimizing the film thickness is essential for improving the film quality and achieving the target bandgap.</p>\",\"PeriodicalId\":18966,\"journal\":{\"name\":\"Nanomaterials\",\"volume\":\"15 18\",\"pages\":\"\"},\"PeriodicalIF\":4.3000,\"publicationDate\":\"2025-09-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472798/pdf/\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nanomaterials\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.3390/nano15181385\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanomaterials","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.3390/nano15181385","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
Thickness Influences on Structural and Optical Properties of Thermally Annealed (GaIn)2O3 Films.
This work explores the relationship between the thickness and the structural, morphological, and optical features of thermally annealed (GaIn)2O3 thin films grown by pulsed laser deposition at room temperature. The thickness of the (GaIn)2O3 films varied from 20 to 391 nm with an increase in deposition time. The film with a thickness of about 105 nm showed largest grain size as well as the strongest XRD peak intensity, as measured by atomic force microscopy and X-ray diffraction. The studies on the optical properties show that the bandgap value decreased from 5.14 to 4.55 eV with the change in the film thickness from 20 to 391 nm. The film thickness had a significant impact on the structure, morphology, and optical properties of (GaIn)2O3, and the PLD growth mode notably influenced the film quality. The results suggest that optimizing the film thickness is essential for improving the film quality and achieving the target bandgap.
期刊介绍：
Nanomaterials (ISSN 2076-4991) is an international and interdisciplinary scholarly open access journal. It publishes reviews, regular research papers, communications, and short notes that are relevant to any field of study that involves nanomaterials, with respect to their science and application. Thus, theoretical and experimental articles will be accepted, along with articles that deal with the synthesis and use of nanomaterials. Articles that synthesize information from multiple fields, and which place discoveries within a broader context, will be preferred. There is no restriction on the length of the papers. Our aim is to encourage scientists to publish their experimental and theoretical research in as much detail as possible. Full experimental or methodical details, or both, must be provided for research articles. Computed data or files regarding the full details of the experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material. Nanomaterials is dedicated to a high scientific standard. All manuscripts undergo a rigorous reviewing process and decisions are based on the recommendations of independent reviewers.
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