蚀刻时间对多孔硅性能的影响及基于多孔硅的光电探测器的特性

IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL
Silicon Pub Date : 2025-04-25 DOI:10.1007/s12633-025-03323-6
Ruwaida T. Shbeeb, Falah A.-H. Mutlak
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引用次数: 0

摘要

对多孔硅进行了研究,以确定其形态特征对其光谱学和电学性能的影响。硅晶片为a(100)取向的n型硅晶片,在HF溶液中采用光电化学蚀刻方法制备了不同蚀刻周期的多孔硅,蚀刻时间为5-25 min。利用场发射扫描电镜(FE-SEM)和x射线衍射仪(XRD)分别研究了多孔硅的形态和结构特性。利用拉曼光谱和室温光致发光研究了其光谱特性。(Jph-V)在黑暗和光照条件下表现出优异的稳定性和响应性。最大响应度约为0.65 A。PS/n-Si器件的W−1波长为800 nm,刻蚀时间为25 min。多孔硅中的量子约束效应是通过注意到向PL光谱的高能量侧的峰移来支持的。拉曼光谱在520.7 cm−1范围内,声子频率在503 ~ 509 cm−1之间发生偏移,呈现出对称带结构。结果表明,PS/n-Si异质结光电探测器适用于先进的可见光检测,为便携式设备提供了成本效益和方便的光电二极管,而无需额外的昂贵设备。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of Etching Duration on the Properties of Porous Silicon and the Characteristics of Photodetectors Based on It

Research has been done on porous silicon to determine its morphological features that significantly impact its spectroscopic and electrical properties. Silicon wafers were n-type of a (100) orientation and have been used to create porous silicon with different etching periods for 5—25 min using the photo-electrochemical etching method in HF solutions. Field emission scanning electron microscopy (FE-SEM) and X-ray diffraction (XRD) have been used to study the morphological and structural properties of porous silicon, respectively. Spectroscopic characteristics were investigated by Raman spectroscopy, as well as room-temperature photoluminescence. The (Jph-V) characteristics in darkness and illuminated conditions demonstrated excellent stability and responsivity. The maximum responsivity value reached approximately 0.65 A.W−1 at 800 nm wavelength for the PS/n-Si device fabricated at an etching time of 25 min. The quantum confinement effect in porous silicon is supported by noticing a peak shift toward the higher energy side of the PL spectrum. The Raman spectra showed a symmetrical band structure with the phonon frequency shifting under 520.7 cm−1 between 503–509 cm −1. The results indicate that PS/n-Si heterojunction photodetectors are appropriate for advanced visible light detection, providing cost-effective and convenient photodiodes for portable devices without additional expensive equipment.

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来源期刊
Silicon
Silicon CHEMISTRY, PHYSICAL-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.90
自引率
20.60%
发文量
685
审稿时长
>12 weeks
期刊介绍: The journal Silicon is intended to serve all those involved in studying the role of silicon as an enabling element in materials science. There are no restrictions on disciplinary boundaries provided the focus is on silicon-based materials or adds significantly to the understanding of such materials. Accordingly, such contributions are welcome in the areas of inorganic and organic chemistry, physics, biology, engineering, nanoscience, environmental science, electronics and optoelectronics, and modeling and theory. Relevant silicon-based materials include, but are not limited to, semiconductors, polymers, composites, ceramics, glasses, coatings, resins, composites, small molecules, and thin films.
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