用真空弧等离子体辅助法在衬底上形成的钛和氧化钛薄膜的结构和性能

IF 0.4 4区 物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY
N. A. Prokopenko, E. A. Petrikova, M. S. Petyukevich, O. S. Tolkachov, N. N. Koval, Yu. F. Ivanov
{"title":"用真空弧等离子体辅助法在衬底上形成的钛和氧化钛薄膜的结构和性能","authors":"N. A. Prokopenko,&nbsp;E. A. Petrikova,&nbsp;M. S. Petyukevich,&nbsp;O. S. Tolkachov,&nbsp;N. N. Koval,&nbsp;Yu. F. Ivanov","doi":"10.1007/s11182-025-03444-w","DOIUrl":null,"url":null,"abstract":"<div><p>The paper presents an analysis of the results of a study on the structure and properties of thin films of titanium oxides (2–3 μm thick) deposited on the surfaces of Ti–6Al–4V titanium alloy and HG40 hard alloy samples using vacuum-arc plasma-assisted technique. It has been found that the deposition of both titanium and titanium oxide films results in the formation of particle droplet fractions the characteristics (the average, minimum, and maximum sizes and the number of particles per unit surface area) of which depend on the value of the “PINK” discharge current. The formed films are shown to be a single-phase material containing titanium dioxide (TiO<sub>2</sub>) in two modifications: rutile and anatase. The relative content of these two modifications in the film was found to depend on the discharge current value (<i>I</i><sub>p</sub>). It has been established that titanium and titanium oxide films have a columnar structure. The columns are formed by crystallites the dimensions of which are (3.1–5.4) nm in the titanium film and (18.3–20.5) nm in the titanium oxide film. It has been revealed that the maximum microhardness value of the film (TiO<sub>2</sub>)/(Ti–6Al–4V) substrate system is 9.5 GPa at <i>I</i><sub>p</sub> = 0 A. This value is more than twice the microhardness of the Ti–6Al–4V alloy. Additionally, the specific wear rate <i>k</i>, which is the inverse of the wear resistance, reaches a minimum value of 1.9·10<sup>−7</sup> mm<sup>3</sup>/(N·m) at <i>I</i><sub>p</sub> = 0 A, and this value is more than 250 times lower than the wear parameter of Ti–6Al–4V. For the same spraying mode, the friction coefficient of the film is 0.43, which is 1.6 times less than the friction coefficient of the VT6 alloy and 1.3 times less than the friction coefficient of the titanium film.</p></div>","PeriodicalId":770,"journal":{"name":"Russian Physics Journal","volume":"68 3","pages":"383 - 391"},"PeriodicalIF":0.4000,"publicationDate":"2025-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Structure and properties of titanium and titanium oxide films formed on a substrate by vacuum-arc plasma-assisted method\",\"authors\":\"N. A. Prokopenko,&nbsp;E. A. Petrikova,&nbsp;M. S. Petyukevich,&nbsp;O. S. Tolkachov,&nbsp;N. N. Koval,&nbsp;Yu. F. Ivanov\",\"doi\":\"10.1007/s11182-025-03444-w\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The paper presents an analysis of the results of a study on the structure and properties of thin films of titanium oxides (2–3 μm thick) deposited on the surfaces of Ti–6Al–4V titanium alloy and HG40 hard alloy samples using vacuum-arc plasma-assisted technique. It has been found that the deposition of both titanium and titanium oxide films results in the formation of particle droplet fractions the characteristics (the average, minimum, and maximum sizes and the number of particles per unit surface area) of which depend on the value of the “PINK” discharge current. The formed films are shown to be a single-phase material containing titanium dioxide (TiO<sub>2</sub>) in two modifications: rutile and anatase. The relative content of these two modifications in the film was found to depend on the discharge current value (<i>I</i><sub>p</sub>). It has been established that titanium and titanium oxide films have a columnar structure. The columns are formed by crystallites the dimensions of which are (3.1–5.4) nm in the titanium film and (18.3–20.5) nm in the titanium oxide film. It has been revealed that the maximum microhardness value of the film (TiO<sub>2</sub>)/(Ti–6Al–4V) substrate system is 9.5 GPa at <i>I</i><sub>p</sub> = 0 A. This value is more than twice the microhardness of the Ti–6Al–4V alloy. Additionally, the specific wear rate <i>k</i>, which is the inverse of the wear resistance, reaches a minimum value of 1.9·10<sup>−7</sup> mm<sup>3</sup>/(N·m) at <i>I</i><sub>p</sub> = 0 A, and this value is more than 250 times lower than the wear parameter of Ti–6Al–4V. For the same spraying mode, the friction coefficient of the film is 0.43, which is 1.6 times less than the friction coefficient of the VT6 alloy and 1.3 times less than the friction coefficient of the titanium film.</p></div>\",\"PeriodicalId\":770,\"journal\":{\"name\":\"Russian Physics Journal\",\"volume\":\"68 3\",\"pages\":\"383 - 391\"},\"PeriodicalIF\":0.4000,\"publicationDate\":\"2025-05-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Russian Physics Journal\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s11182-025-03444-w\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Russian Physics Journal","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1007/s11182-025-03444-w","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

本文利用真空弧等离子体辅助技术对Ti-6Al-4V钛合金和HG40硬质合金样品表面沉积的氧化钛薄膜(厚度为2 ~ 3 μm)的结构和性能进行了研究。研究发现,钛和氧化钛膜的沉积都会导致颗粒液滴的形成,其特征(平均、最小和最大尺寸以及每单位表面积的颗粒数量)取决于“PINK”放电电流的值。所形成的薄膜是一种含有两种改性的二氧化钛(TiO2)的单相材料:金红石和锐钛矿。发现这两种改性剂在薄膜中的相对含量取决于放电电流值(Ip)。已经确定钛和氧化钛薄膜具有柱状结构。柱状结构由钛膜中的晶粒尺寸为(3.1 ~ 5.4)nm,氧化钛膜中的晶粒尺寸为(18.3 ~ 20.5)nm。结果表明,薄膜(TiO2)/(Ti-6Al-4V)衬底体系在Ip = 0 A时的最大显微硬度值为9.5 GPa。该值是Ti-6Al-4V合金显微硬度的两倍以上。与耐磨性相反的比磨损率k在Ip = 0 a时达到最小值1.9·10−7 mm3/(N·m),比Ti-6Al-4V的磨损参数低250倍以上。相同喷涂方式下,膜的摩擦系数为0.43,比VT6合金摩擦系数小1.6倍,比钛膜摩擦系数小1.3倍。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Structure and properties of titanium and titanium oxide films formed on a substrate by vacuum-arc plasma-assisted method

Structure and properties of titanium and titanium oxide films formed on a substrate by vacuum-arc plasma-assisted method

The paper presents an analysis of the results of a study on the structure and properties of thin films of titanium oxides (2–3 μm thick) deposited on the surfaces of Ti–6Al–4V titanium alloy and HG40 hard alloy samples using vacuum-arc plasma-assisted technique. It has been found that the deposition of both titanium and titanium oxide films results in the formation of particle droplet fractions the characteristics (the average, minimum, and maximum sizes and the number of particles per unit surface area) of which depend on the value of the “PINK” discharge current. The formed films are shown to be a single-phase material containing titanium dioxide (TiO2) in two modifications: rutile and anatase. The relative content of these two modifications in the film was found to depend on the discharge current value (Ip). It has been established that titanium and titanium oxide films have a columnar structure. The columns are formed by crystallites the dimensions of which are (3.1–5.4) nm in the titanium film and (18.3–20.5) nm in the titanium oxide film. It has been revealed that the maximum microhardness value of the film (TiO2)/(Ti–6Al–4V) substrate system is 9.5 GPa at Ip = 0 A. This value is more than twice the microhardness of the Ti–6Al–4V alloy. Additionally, the specific wear rate k, which is the inverse of the wear resistance, reaches a minimum value of 1.9·10−7 mm3/(N·m) at Ip = 0 A, and this value is more than 250 times lower than the wear parameter of Ti–6Al–4V. For the same spraying mode, the friction coefficient of the film is 0.43, which is 1.6 times less than the friction coefficient of the VT6 alloy and 1.3 times less than the friction coefficient of the titanium film.

求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Russian Physics Journal
Russian Physics Journal PHYSICS, MULTIDISCIPLINARY-
CiteScore
1.00
自引率
50.00%
发文量
208
审稿时长
3-6 weeks
期刊介绍: Russian Physics Journal covers the broad spectrum of specialized research in applied physics, with emphasis on work with practical applications in solid-state physics, optics, and magnetism. Particularly interesting results are reported in connection with: electroluminescence and crystal phospors; semiconductors; phase transformations in solids; superconductivity; properties of thin films; and magnetomechanical phenomena.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信