真空弧等离子体辅助法形成的氧化薄膜涂层质量的划痕试验测定

IF 0.4 4区 物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY
N. N. Koval, N. A. Prokopenko, E. A. Petrikova, M. S. Vorobyov, Yu. F. Ivanov
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引用次数: 0

摘要

钛基合金制成的医疗器械表面形成的氧化物涂层有助于医生保护患者免受有毒钛合金元素的伤害,并增加器械对刮擦和磨损的抵抗力。通常,涂料/基材体系的形成伴随着对所涂涂料粘合性能的分析。本文分析了在辉光和空心阴极独立电弧放电的基础上,利用不同放电电流值的等离子体源,采用真空电弧等离子体辅助方法在5级钛合金样品表面形成氧化钛和氧化锆薄膜的结构和粘附性能。研究表明,氧化膜中含有液滴分数颗粒,其特征与膜的沉积方式有关。已经确定,在ZrO2薄膜/ 5级衬底体系中观察到薄膜从衬底(钛合金5级)上破坏(剥离)的临界负载力在“PINK”放电电流Ip = 0 A时最大,在Ip = 90 A时最小。研究发现,在TiO2薄膜/ 5级衬底体系中,临界负载力在“PINK”放电电流Ip = 130 A时达到最大值,在Ip = 0 A时达到最小值。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Determination by scratch testing of the quality of thin-film oxide coatings formed by vacuum-arc plasma-assisted method

Oxide coatings formed on the surface of medical instruments made of titanium-based alloys help physicians to protect patients from toxic titanium alloying elements and increase the resistance of the instruments to scratching and wearing. As a rule, the formation of a coating/substrate system is accompanied by an analysis of the adhesive properties of the applied coating. This paper presents an analysis of the results obtained by studying the structure and adhesive properties of titanium oxide and zirconium oxide films formed on the surface of titanium alloy samples of Grade 5 by vacuum arc plasma-assisted method with varying discharge current values of the plasma source operating on the basis of an independent arc discharge with glow and hollow cathodes. The studies showed that the oxide films contain droplet fraction particles the characteristics of which are determined by the film deposition mode. It has been established that the critical load force at which destruction of (peeling off) the film from the substrate (titanium alloy Grade 5) is observed in the ZrO2 film/Grade 5 substrate system is maximum at the “PINK” discharge current Ip = 0 A and minimum at Ip = 90 A. It was found that in the TiO2 film/Grade 5 substrate system, the maximum value of the critical load force is realized at the “PINK” discharge current Ip = 130 A and minimum at Ip = 0 A.

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来源期刊
Russian Physics Journal
Russian Physics Journal PHYSICS, MULTIDISCIPLINARY-
CiteScore
1.00
自引率
50.00%
发文量
208
审稿时长
3-6 weeks
期刊介绍: Russian Physics Journal covers the broad spectrum of specialized research in applied physics, with emphasis on work with practical applications in solid-state physics, optics, and magnetism. Particularly interesting results are reported in connection with: electroluminescence and crystal phospors; semiconductors; phase transformations in solids; superconductivity; properties of thin films; and magnetomechanical phenomena.
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