基于微波探针测量的阻抗谱

IF 0.7 4区地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

Radiophysics and Quantum Electronics Pub Date : 2025-07-03 DOI:10.1007/s11141-025-10396-1

A. N. Reznik

{"title":"基于微波探针测量的阻抗谱","authors":"A. N. Reznik","doi":"10.1007/s11141-025-10396-1","DOIUrl":null,"url":null,"abstract":"<p>We have studied the influence of non-ideal standard loads of the probe station on the accuracy of microwave impedance spectrum measurements in the process of testing electronic devices and materials. Using the Cascade Microtech station as an example, it is shown that the calibration procedure based on standard loads leads to significant measurement errors. Prospects for improving load characteristics in order to eliminate errors are given. An original technique of impedance measurement, which is free of these problems, is considered.</p>","PeriodicalId":748,"journal":{"name":"Radiophysics and Quantum Electronics","volume":"67 7","pages":"546 - 557"},"PeriodicalIF":0.7000,"publicationDate":"2025-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Impedance Spectroscopy Based on Microwave Probe Measurements\",\"authors\":\"A. N. Reznik\",\"doi\":\"10.1007/s11141-025-10396-1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>We have studied the influence of non-ideal standard loads of the probe station on the accuracy of microwave impedance spectrum measurements in the process of testing electronic devices and materials. Using the Cascade Microtech station as an example, it is shown that the calibration procedure based on standard loads leads to significant measurement errors. Prospects for improving load characteristics in order to eliminate errors are given. An original technique of impedance measurement, which is free of these problems, is considered.</p>\",\"PeriodicalId\":748,\"journal\":{\"name\":\"Radiophysics and Quantum Electronics\",\"volume\":\"67 7\",\"pages\":\"546 - 557\"},\"PeriodicalIF\":0.7000,\"publicationDate\":\"2025-07-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Radiophysics and Quantum Electronics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s11141-025-10396-1\",\"RegionNum\":4,\"RegionCategory\":\"地球科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Radiophysics and Quantum Electronics","FirstCategoryId":"5","ListUrlMain":"https://link.springer.com/article/10.1007/s11141-025-10396-1","RegionNum":4,"RegionCategory":"地球科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

摘要

研究了在电子器件和材料测试过程中，探测站的非理想标准载荷对微波阻抗谱测量精度的影响。以Cascade Microtech台站为例，表明基于标准载荷的校准过程会导致较大的测量误差。展望了改善负载特性以消除误差的前景。本文考虑了一种不存在这些问题的阻抗测量新技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Impedance Spectroscopy Based on Microwave Probe Measurements

We have studied the influence of non-ideal standard loads of the probe station on the accuracy of microwave impedance spectrum measurements in the process of testing electronic devices and materials. Using the Cascade Microtech station as an example, it is shown that the calibration procedure based on standard loads leads to significant measurement errors. Prospects for improving load characteristics in order to eliminate errors are given. An original technique of impedance measurement, which is free of these problems, is considered.

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来源期刊

Radiophysics and Quantum Electronics ENGINEERING, ELECTRICAL & ELECTRONIC-PHYSICS, APPLIED

CiteScore

1.10

自引率

12.50%

发文量

审稿时长

6-12 weeks

期刊介绍： Radiophysics and Quantum Electronics contains the most recent and best Russian research on topics such as: Radio astronomy; Plasma astrophysics; Ionospheric, atmospheric and oceanic physics; Radiowave propagation; Quantum radiophysics; Pphysics of oscillations and waves; Physics of plasmas; Statistical radiophysics; Electrodynamics; Vacuum and plasma electronics; Acoustics; Solid-state electronics. Radiophysics and Quantum Electronics is a translation of the Russian journal Izvestiya VUZ. Radiofizika, published by the Radiophysical Research Institute and N.I. Lobachevsky State University at Nizhnii Novgorod, Russia. The Russian volume-year is published in English beginning in April. All articles are peer-reviewed.