金属氧化物湿度传感器的设计与优化:机理与材料工程综述

IF 3.6 4区 化学 Q2 CHEMISTRY, INORGANIC & NUCLEAR
Tinghao Xie, Anis Farhana Abdul Rahman, Aznizam Abu Bakar, Agus Arsad
{"title":"金属氧化物湿度传感器的设计与优化:机理与材料工程综述","authors":"Tinghao Xie,&nbsp;Anis Farhana Abdul Rahman,&nbsp;Aznizam Abu Bakar,&nbsp;Agus Arsad","doi":"10.1007/s10876-025-02869-0","DOIUrl":null,"url":null,"abstract":"<div><p>Humidity sensors based on metal oxides have garnered significant attention due to their excellent physicochemical properties, including high surface area, thermal stability, and tuneable electrical conductivity. However, conventional humidity sensors—particularly those based on polymers and electrolytes—often suffer from drawbacks such as poor long-term stability, high hysteresis, and limited sensitivity under extreme environmental conditions. This review comprehensively examines the sensing mechanisms, synthesis methods, and performance optimization strategies of various metal oxides (e.g., Al<sub>2</sub>O<sub>3</sub>, TiO<sub>2</sub>, ZnO, and SiO<sub>2</sub>) for humidity sensing applications. The fundamental adsorption processes of water molecules, including chemisorption and physisorption, are discussed, along with the impact of ionic and electronic conduction mechanisms on sensor performance. Advances in material design—such as nano structuring, doping, and composite formation—are highlighted as effective strategies to enhance sensitivity, reduce response time, and improve stability. Furthermore, the emerging role of ferroelectric materials in humidity sensing is introduced, emphasizing their spontaneous polarization and potential for next-generation sensor technologies. This review aims to provide a solid foundation for developing efficient, reliable, and cost-effective humidity sensors suitable for applications in environmental monitoring, healthcare, and industrial automation.</p></div>","PeriodicalId":618,"journal":{"name":"Journal of Cluster Science","volume":"36 4","pages":""},"PeriodicalIF":3.6000,"publicationDate":"2025-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1007/s10876-025-02869-0.pdf","citationCount":"0","resultStr":"{\"title\":\"Design and Optimization of Metal Oxide-Based Humidity Sensors: A Review on Mechanisms and Material Engineering\",\"authors\":\"Tinghao Xie,&nbsp;Anis Farhana Abdul Rahman,&nbsp;Aznizam Abu Bakar,&nbsp;Agus Arsad\",\"doi\":\"10.1007/s10876-025-02869-0\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Humidity sensors based on metal oxides have garnered significant attention due to their excellent physicochemical properties, including high surface area, thermal stability, and tuneable electrical conductivity. However, conventional humidity sensors—particularly those based on polymers and electrolytes—often suffer from drawbacks such as poor long-term stability, high hysteresis, and limited sensitivity under extreme environmental conditions. This review comprehensively examines the sensing mechanisms, synthesis methods, and performance optimization strategies of various metal oxides (e.g., Al<sub>2</sub>O<sub>3</sub>, TiO<sub>2</sub>, ZnO, and SiO<sub>2</sub>) for humidity sensing applications. The fundamental adsorption processes of water molecules, including chemisorption and physisorption, are discussed, along with the impact of ionic and electronic conduction mechanisms on sensor performance. Advances in material design—such as nano structuring, doping, and composite formation—are highlighted as effective strategies to enhance sensitivity, reduce response time, and improve stability. Furthermore, the emerging role of ferroelectric materials in humidity sensing is introduced, emphasizing their spontaneous polarization and potential for next-generation sensor technologies. This review aims to provide a solid foundation for developing efficient, reliable, and cost-effective humidity sensors suitable for applications in environmental monitoring, healthcare, and industrial automation.</p></div>\",\"PeriodicalId\":618,\"journal\":{\"name\":\"Journal of Cluster Science\",\"volume\":\"36 4\",\"pages\":\"\"},\"PeriodicalIF\":3.6000,\"publicationDate\":\"2025-07-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://link.springer.com/content/pdf/10.1007/s10876-025-02869-0.pdf\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Cluster Science\",\"FirstCategoryId\":\"92\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s10876-025-02869-0\",\"RegionNum\":4,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"CHEMISTRY, INORGANIC & NUCLEAR\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Cluster Science","FirstCategoryId":"92","ListUrlMain":"https://link.springer.com/article/10.1007/s10876-025-02869-0","RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, INORGANIC & NUCLEAR","Score":null,"Total":0}
引用次数: 0

摘要

基于金属氧化物的湿度传感器由于其优异的物理化学性质,包括高表面积,热稳定性和可调谐的导电性,已经引起了极大的关注。然而,传统的湿度传感器,特别是那些基于聚合物和电解质的传感器,经常遭受诸如长期稳定性差、高迟滞和在极端环境条件下灵敏度有限等缺点。本文综述了各种金属氧化物(如Al2O3、TiO2、ZnO和SiO2)用于湿度传感的机理、合成方法和性能优化策略。讨论了水分子的基本吸附过程,包括化学吸附和物理吸附,以及离子和电子传导机制对传感器性能的影响。材料设计方面的进步——如纳米结构、掺杂和复合材料的形成——被强调为提高灵敏度、缩短响应时间和提高稳定性的有效策略。此外,介绍了铁电材料在湿度传感中的新兴作用,强调了它们的自发极化和下一代传感器技术的潜力。本文综述旨在为开发高效、可靠、经济的湿度传感器提供坚实的基础,适用于环境监测、医疗保健和工业自动化等领域。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design and Optimization of Metal Oxide-Based Humidity Sensors: A Review on Mechanisms and Material Engineering

Humidity sensors based on metal oxides have garnered significant attention due to their excellent physicochemical properties, including high surface area, thermal stability, and tuneable electrical conductivity. However, conventional humidity sensors—particularly those based on polymers and electrolytes—often suffer from drawbacks such as poor long-term stability, high hysteresis, and limited sensitivity under extreme environmental conditions. This review comprehensively examines the sensing mechanisms, synthesis methods, and performance optimization strategies of various metal oxides (e.g., Al2O3, TiO2, ZnO, and SiO2) for humidity sensing applications. The fundamental adsorption processes of water molecules, including chemisorption and physisorption, are discussed, along with the impact of ionic and electronic conduction mechanisms on sensor performance. Advances in material design—such as nano structuring, doping, and composite formation—are highlighted as effective strategies to enhance sensitivity, reduce response time, and improve stability. Furthermore, the emerging role of ferroelectric materials in humidity sensing is introduced, emphasizing their spontaneous polarization and potential for next-generation sensor technologies. This review aims to provide a solid foundation for developing efficient, reliable, and cost-effective humidity sensors suitable for applications in environmental monitoring, healthcare, and industrial automation.

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来源期刊
Journal of Cluster Science
Journal of Cluster Science 化学-无机化学与核化学
CiteScore
6.70
自引率
0.00%
发文量
166
审稿时长
3 months
期刊介绍: The journal publishes the following types of papers: (a) original and important research; (b) authoritative comprehensive reviews or short overviews of topics of current interest; (c) brief but urgent communications on new significant research; and (d) commentaries intended to foster the exchange of innovative or provocative ideas, and to encourage dialogue, amongst researchers working in different cluster disciplines.
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