Pengfei Zhu, Wei Wu, Di Zhang, Lun Qu, Lu Bai, Lin Li, Juntao Li, Mengxin Ren, Jingjun Xu
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Measurement of Refractive Index and Thickness of Thin Films Via Polarization‐Projection Interferometry
Accurate characterization of the complex refractive index () and thickness () of thin films is essential for advancing optical and photonic technologies. In this work, a polarization‐projection interferometric method (PPIM) is presented that enables the simultaneous extraction of () with high precision using transmission measurements. By measuring and analyzing both the amplitude and phase of the transmitted light, PPIM achieves superior accuracy and robustness compared to conventional ellipsometry, especially for ultrathin and birefringent films. Moreover, the extracted thicknesses show excellent agreement with scanning electron microscopy (SEM) measurements, confirming the reliability of PPIM. With its precision and versatility, PPIM offers a powerful and flexible tool for thin‐film metrology in optics, materials science, and integrated photonics.
期刊介绍:
Laser & Photonics Reviews is a reputable journal that publishes high-quality Reviews, original Research Articles, and Perspectives in the field of photonics and optics. It covers both theoretical and experimental aspects, including recent groundbreaking research, specific advancements, and innovative applications.
As evidence of its impact and recognition, Laser & Photonics Reviews boasts a remarkable 2022 Impact Factor of 11.0, according to the Journal Citation Reports from Clarivate Analytics (2023). Moreover, it holds impressive rankings in the InCites Journal Citation Reports: in 2021, it was ranked 6th out of 101 in the field of Optics, 15th out of 161 in Applied Physics, and 12th out of 69 in Condensed Matter Physics.
The journal uses the ISSN numbers 1863-8880 for print and 1863-8899 for online publications.