偏振投影干涉法测量薄膜的折射率和厚度

IF 10 1区 物理与天体物理 Q1 OPTICS
Pengfei Zhu, Wei Wu, Di Zhang, Lun Qu, Lu Bai, Lin Li, Juntao Li, Mengxin Ren, Jingjun Xu
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引用次数: 0

摘要

精确表征薄膜的复折射率和厚度对于推进光学和光子技术至关重要。在这项工作中,提出了一种偏振投影干涉法(PPIM),该方法可以利用透射测量同时高精度地提取()。通过测量和分析透射光的振幅和相位,与传统的椭偏仪相比,PPIM具有更高的精度和鲁棒性,特别是对于超薄和双折射薄膜。此外,提取的厚度与扫描电镜(SEM)测量结果吻合良好,证实了PPIM的可靠性。凭借其精度和多功能性,PPIM为光学,材料科学和集成光子学中的薄膜计量提供了强大而灵活的工具。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurement of Refractive Index and Thickness of Thin Films Via Polarization‐Projection Interferometry
Accurate characterization of the complex refractive index () and thickness () of thin films is essential for advancing optical and photonic technologies. In this work, a polarization‐projection interferometric method (PPIM) is presented that enables the simultaneous extraction of () with high precision using transmission measurements. By measuring and analyzing both the amplitude and phase of the transmitted light, PPIM achieves superior accuracy and robustness compared to conventional ellipsometry, especially for ultrathin and birefringent films. Moreover, the extracted thicknesses show excellent agreement with scanning electron microscopy (SEM) measurements, confirming the reliability of PPIM. With its precision and versatility, PPIM offers a powerful and flexible tool for thin‐film metrology in optics, materials science, and integrated photonics.
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来源期刊
CiteScore
14.20
自引率
5.50%
发文量
314
审稿时长
2 months
期刊介绍: Laser & Photonics Reviews is a reputable journal that publishes high-quality Reviews, original Research Articles, and Perspectives in the field of photonics and optics. It covers both theoretical and experimental aspects, including recent groundbreaking research, specific advancements, and innovative applications. As evidence of its impact and recognition, Laser & Photonics Reviews boasts a remarkable 2022 Impact Factor of 11.0, according to the Journal Citation Reports from Clarivate Analytics (2023). Moreover, it holds impressive rankings in the InCites Journal Citation Reports: in 2021, it was ranked 6th out of 101 in the field of Optics, 15th out of 161 in Applied Physics, and 12th out of 69 in Condensed Matter Physics. The journal uses the ISSN numbers 1863-8880 for print and 1863-8899 for online publications.
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