{"title":"溶胶-凝胶自旋镀膜法制备掺铟纳米氧化镉薄膜及其在CdO (n)/Si (p)异质结光电二极管中的应用","authors":"M. Jlassi, I. Ben Miled, I. Sta, M. Zouaoui","doi":"10.1007/s12633-025-03391-8","DOIUrl":null,"url":null,"abstract":"<div><p>In this study, nanostructured thin films based on cadmium oxide doped with Indium (CdO:In) were fabricated by sol–gel spin-coating technique on p-type monocrystalline silicon (c-Si) for the integration in n-p heterojunction photodiode applications. A comprehensive analysis of structural, morphological, compositional, optical and electrical properties of the surface of undoped CdO and CdO:In films on silicon substrates was conducted. The doping of CdO films with Indium by incorporating In<sup>3+</sup> ions maintained a nanocrystalline network in a cubic structure with reduced average grain size and smooth heterointerface with the c-Si substrate. The anti-reflection role of undoped CdO and doped CdO:In was validated through lower optical reflectance compared to the bare Si substrate, especially in short wavelength range. The electrical current–voltage I-V characteristics, measured in the dark and under illumination, were used to determine the main diode parameters of different CdO (n)/ c-Si (p) heterojunction structures. Compared to undoped CdO thin films, In-doping of CdO lead to higher ideality factor and reverse saturation current, but lower potential barrier and series resistance. Higher photogenerated current at the Si region with more light sensitivity was obtained in the CdO:In/Si diode owing to better transparency and wider bandgap than the undoped CdO film.Whereas, lower conduction band offset at the CdO:In/Si heterojunction enabled an improvement in charge carrier transport in the CdO:In/Si diode compared to the CdO/Si diode. Our results demonstrate the effective integration of nanostructured In-doped CdO thin films in CdO/Si n-p heterojunction photodiode applications.\n</p></div>","PeriodicalId":776,"journal":{"name":"Silicon","volume":"17 13","pages":"3033 - 3044"},"PeriodicalIF":3.3000,"publicationDate":"2025-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication and Characterization of Nanostructured Cadmium Oxide Thin Films Doped with Indium by Sol–Gel Spin-Coating for CdO (n)/Si (p) Heterojunction Photodiode Applications\",\"authors\":\"M. Jlassi, I. Ben Miled, I. Sta, M. Zouaoui\",\"doi\":\"10.1007/s12633-025-03391-8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>In this study, nanostructured thin films based on cadmium oxide doped with Indium (CdO:In) were fabricated by sol–gel spin-coating technique on p-type monocrystalline silicon (c-Si) for the integration in n-p heterojunction photodiode applications. A comprehensive analysis of structural, morphological, compositional, optical and electrical properties of the surface of undoped CdO and CdO:In films on silicon substrates was conducted. The doping of CdO films with Indium by incorporating In<sup>3+</sup> ions maintained a nanocrystalline network in a cubic structure with reduced average grain size and smooth heterointerface with the c-Si substrate. The anti-reflection role of undoped CdO and doped CdO:In was validated through lower optical reflectance compared to the bare Si substrate, especially in short wavelength range. The electrical current–voltage I-V characteristics, measured in the dark and under illumination, were used to determine the main diode parameters of different CdO (n)/ c-Si (p) heterojunction structures. Compared to undoped CdO thin films, In-doping of CdO lead to higher ideality factor and reverse saturation current, but lower potential barrier and series resistance. Higher photogenerated current at the Si region with more light sensitivity was obtained in the CdO:In/Si diode owing to better transparency and wider bandgap than the undoped CdO film.Whereas, lower conduction band offset at the CdO:In/Si heterojunction enabled an improvement in charge carrier transport in the CdO:In/Si diode compared to the CdO/Si diode. Our results demonstrate the effective integration of nanostructured In-doped CdO thin films in CdO/Si n-p heterojunction photodiode applications.\\n</p></div>\",\"PeriodicalId\":776,\"journal\":{\"name\":\"Silicon\",\"volume\":\"17 13\",\"pages\":\"3033 - 3044\"},\"PeriodicalIF\":3.3000,\"publicationDate\":\"2025-07-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Silicon\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s12633-025-03391-8\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"CHEMISTRY, PHYSICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Silicon","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1007/s12633-025-03391-8","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
引用次数: 0
摘要
本研究采用溶胶-凝胶自旋镀膜技术,在p型单晶硅(c-Si)上制备了掺杂铟(CdO:In)的氧化镉纳米结构薄膜,用于n-p异质结光电二极管的集成。对硅衬底上未掺杂的CdO和CdO:In薄膜表面的结构、形貌、组成、光学和电学性质进行了全面分析。采用In3+离子掺杂的方法制备的CdO薄膜具有立方结构的纳米晶网络,其平均晶粒尺寸减小,与c-Si衬底的异质界面光滑。与裸露的Si衬底相比,未掺杂的CdO和掺杂的CdO:In的抗反射作用通过更低的光学反射率得到验证,特别是在短波长范围内。利用在黑暗和光照下测量的电流-电压I-V特性来确定不同CdO (n)/ c-Si (p)异质结结构的主要二极管参数。与未掺杂的CdO薄膜相比,掺杂的CdO薄膜具有更高的理想因数和反向饱和电流,但具有较低的势垒和串联电阻。与未掺杂的CdO薄膜相比,由于具有更好的透明性和更宽的带隙,CdO: in /Si二极管在Si区域获得了更高的光生电流和更高的光敏性。然而,与CdO/Si二极管相比,在CdO:In/Si异质结处较低的导带偏移使CdO:In/Si二极管中的载流子输运得到了改善。我们的研究结果证明了纳米结构的in掺杂CdO薄膜在CdO/Si n-p异质结光电二极管中的有效集成。
Fabrication and Characterization of Nanostructured Cadmium Oxide Thin Films Doped with Indium by Sol–Gel Spin-Coating for CdO (n)/Si (p) Heterojunction Photodiode Applications
In this study, nanostructured thin films based on cadmium oxide doped with Indium (CdO:In) were fabricated by sol–gel spin-coating technique on p-type monocrystalline silicon (c-Si) for the integration in n-p heterojunction photodiode applications. A comprehensive analysis of structural, morphological, compositional, optical and electrical properties of the surface of undoped CdO and CdO:In films on silicon substrates was conducted. The doping of CdO films with Indium by incorporating In3+ ions maintained a nanocrystalline network in a cubic structure with reduced average grain size and smooth heterointerface with the c-Si substrate. The anti-reflection role of undoped CdO and doped CdO:In was validated through lower optical reflectance compared to the bare Si substrate, especially in short wavelength range. The electrical current–voltage I-V characteristics, measured in the dark and under illumination, were used to determine the main diode parameters of different CdO (n)/ c-Si (p) heterojunction structures. Compared to undoped CdO thin films, In-doping of CdO lead to higher ideality factor and reverse saturation current, but lower potential barrier and series resistance. Higher photogenerated current at the Si region with more light sensitivity was obtained in the CdO:In/Si diode owing to better transparency and wider bandgap than the undoped CdO film.Whereas, lower conduction band offset at the CdO:In/Si heterojunction enabled an improvement in charge carrier transport in the CdO:In/Si diode compared to the CdO/Si diode. Our results demonstrate the effective integration of nanostructured In-doped CdO thin films in CdO/Si n-p heterojunction photodiode applications.
期刊介绍:
The journal Silicon is intended to serve all those involved in studying the role of silicon as an enabling element in materials science. There are no restrictions on disciplinary boundaries provided the focus is on silicon-based materials or adds significantly to the understanding of such materials. Accordingly, such contributions are welcome in the areas of inorganic and organic chemistry, physics, biology, engineering, nanoscience, environmental science, electronics and optoelectronics, and modeling and theory. Relevant silicon-based materials include, but are not limited to, semiconductors, polymers, composites, ceramics, glasses, coatings, resins, composites, small molecules, and thin films.