Stephen J. Pearton, Fan Ren, A. Y. Polyakov, Aman Haque, Madani Labed, You Seung Rim
{"title":"Ga2O3在功率器件和紫外光电探测器中的应用现状","authors":"Stephen J. Pearton, Fan Ren, A. Y. Polyakov, Aman Haque, Madani Labed, You Seung Rim","doi":"10.1063/5.0285075","DOIUrl":null,"url":null,"abstract":"Gallium oxide (Ga2O3) has been the subject of extensive research over the past decade due to its potential in next-generation power electronics and solar-blind ultraviolet (UV) photodetectors. While Ga2O3 exhibits promising material characteristics for applications in harsh environments, its commercial viability remains under debate, particularly when compared to materials such as aluminum nitride (AlN) and diamond, which possess superior intrinsic properties. This perspective addresses the critical challenges that currently impede the widespread commercialization of Ga2O3-based devices. These challenges include a relatively immature technology base, the difficulty in achieving stable p-type conductivity, inherently low thermal conductivity, the presence of crystallographic defects (nano- and micro-voids), and elevated fabrication costs, all of which negatively impact device reliability and scalability. Mitigation strategies, such as heterojunction implementation, the development of thermal management solutions such as wafer bonding, and defect passivation approaches, are also under investigation. The near-term feasibility of commercially viable Ga2O3-based power electronic devices is a central focus of this discussion. The current status is that Ga2O3 development is far advanced relative to either diamond or especially AlN power electronics but is hampered by lack of a broad base of substrate vendors and a compelling vision for device implementations that provide sufficient improvement over SiC power devices. There are strong geographic differences in device focus, with China prioritizing implementation in grid applications while the United States/Europe appear to consider Ga2O3 devices more for defense and aerospace applications.","PeriodicalId":8200,"journal":{"name":"Applied physics reviews","volume":"17 1","pages":""},"PeriodicalIF":11.6000,"publicationDate":"2025-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Status of Ga2O3 for power device and UV photodetector applications\",\"authors\":\"Stephen J. Pearton, Fan Ren, A. Y. Polyakov, Aman Haque, Madani Labed, You Seung Rim\",\"doi\":\"10.1063/5.0285075\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Gallium oxide (Ga2O3) has been the subject of extensive research over the past decade due to its potential in next-generation power electronics and solar-blind ultraviolet (UV) photodetectors. While Ga2O3 exhibits promising material characteristics for applications in harsh environments, its commercial viability remains under debate, particularly when compared to materials such as aluminum nitride (AlN) and diamond, which possess superior intrinsic properties. This perspective addresses the critical challenges that currently impede the widespread commercialization of Ga2O3-based devices. These challenges include a relatively immature technology base, the difficulty in achieving stable p-type conductivity, inherently low thermal conductivity, the presence of crystallographic defects (nano- and micro-voids), and elevated fabrication costs, all of which negatively impact device reliability and scalability. Mitigation strategies, such as heterojunction implementation, the development of thermal management solutions such as wafer bonding, and defect passivation approaches, are also under investigation. The near-term feasibility of commercially viable Ga2O3-based power electronic devices is a central focus of this discussion. The current status is that Ga2O3 development is far advanced relative to either diamond or especially AlN power electronics but is hampered by lack of a broad base of substrate vendors and a compelling vision for device implementations that provide sufficient improvement over SiC power devices. There are strong geographic differences in device focus, with China prioritizing implementation in grid applications while the United States/Europe appear to consider Ga2O3 devices more for defense and aerospace applications.\",\"PeriodicalId\":8200,\"journal\":{\"name\":\"Applied physics reviews\",\"volume\":\"17 1\",\"pages\":\"\"},\"PeriodicalIF\":11.6000,\"publicationDate\":\"2025-09-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied physics reviews\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1063/5.0285075\",\"RegionNum\":1,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied physics reviews","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1063/5.0285075","RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
Status of Ga2O3 for power device and UV photodetector applications
Gallium oxide (Ga2O3) has been the subject of extensive research over the past decade due to its potential in next-generation power electronics and solar-blind ultraviolet (UV) photodetectors. While Ga2O3 exhibits promising material characteristics for applications in harsh environments, its commercial viability remains under debate, particularly when compared to materials such as aluminum nitride (AlN) and diamond, which possess superior intrinsic properties. This perspective addresses the critical challenges that currently impede the widespread commercialization of Ga2O3-based devices. These challenges include a relatively immature technology base, the difficulty in achieving stable p-type conductivity, inherently low thermal conductivity, the presence of crystallographic defects (nano- and micro-voids), and elevated fabrication costs, all of which negatively impact device reliability and scalability. Mitigation strategies, such as heterojunction implementation, the development of thermal management solutions such as wafer bonding, and defect passivation approaches, are also under investigation. The near-term feasibility of commercially viable Ga2O3-based power electronic devices is a central focus of this discussion. The current status is that Ga2O3 development is far advanced relative to either diamond or especially AlN power electronics but is hampered by lack of a broad base of substrate vendors and a compelling vision for device implementations that provide sufficient improvement over SiC power devices. There are strong geographic differences in device focus, with China prioritizing implementation in grid applications while the United States/Europe appear to consider Ga2O3 devices more for defense and aerospace applications.
期刊介绍:
Applied Physics Reviews (APR) is a journal featuring articles on critical topics in experimental or theoretical research in applied physics and applications of physics to other scientific and engineering branches. The publication includes two main types of articles:
Original Research: These articles report on high-quality, novel research studies that are of significant interest to the applied physics community.
Reviews: Review articles in APR can either be authoritative and comprehensive assessments of established areas of applied physics or short, timely reviews of recent advances in established fields or emerging areas of applied physics.