超薄的f-theta超透镜,具有高聚焦分辨率和大视野。

IF 3.3 2区 物理与天体物理 Q2 OPTICS
Optics express Pub Date : 2025-09-08 DOI:10.1364/OE.570030
Tong Jiang, Hao Ding, Mandi Rong, Yunzhe Zhang, Yujun Xing, Gang Wang, Xingang Ren, Xiaobo Zhang, Li Ding, Zhixiang Huang
{"title":"超薄的f-theta超透镜,具有高聚焦分辨率和大视野。","authors":"Tong Jiang, Hao Ding, Mandi Rong, Yunzhe Zhang, Yujun Xing, Gang Wang, Xingang Ren, Xiaobo Zhang, Li Ding, Zhixiang Huang","doi":"10.1364/OE.570030","DOIUrl":null,"url":null,"abstract":"<p><p>Conventional f-theta(<i>f-θ</i>) lens systems often rely on cascading multiple lenses or adopting complex surface profiles to achieve high-precision scanning and laser processing over a large field of view (FOV), leading to significant increases in system volume and manufacturing complexity. This study presents an ultra-thin <i>f-θ</i> lens for a 10.6µm laser processing system, realizing high-performance scanning through a collaborative optimization method of cascaded metasurfaces. Simulation results based on dual-layer cascaded metasurfaces show that within the ±32° light deflection range, the spot diameter remains below 20µm, the maximum <i>f-θ</i> distortion is controlled at 0.19%, and the Strehl ratio (SR) across the entire FOV exceeds 0.99, verifying the system's imaging performance approaching the diffraction limit. Phase sampling analysis of the cascaded metalenses indicates that when the sampling step varies within 3-9µm, there is no significant difference in spot performance, which greatly reduces the fabrication difficulty and cost. Further research demonstrates that when the phase mutation rate is controlled within 8%, the system maintains stable scanning characteristics, while exceeding 9% leads to severe wavefront distortion and drastic deterioration of optical performance, providing a quantitative basis for processing error control. The wavelength analysis of the designed <i>f-θ</i> lens reveals that it maintains good performance within an 80 nm bandwidth. This study provides an integrated solution for compact laser processing systems, and its technical achievements can promote the large-scale application of metasurface optical elements in optical imaging, optical metrology, and laser processing.</p>","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"33 18","pages":"38099-38112"},"PeriodicalIF":3.3000,"publicationDate":"2025-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ultra-thin f-theta metalens with high focus resolution and large field of view.\",\"authors\":\"Tong Jiang, Hao Ding, Mandi Rong, Yunzhe Zhang, Yujun Xing, Gang Wang, Xingang Ren, Xiaobo Zhang, Li Ding, Zhixiang Huang\",\"doi\":\"10.1364/OE.570030\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Conventional f-theta(<i>f-θ</i>) lens systems often rely on cascading multiple lenses or adopting complex surface profiles to achieve high-precision scanning and laser processing over a large field of view (FOV), leading to significant increases in system volume and manufacturing complexity. This study presents an ultra-thin <i>f-θ</i> lens for a 10.6µm laser processing system, realizing high-performance scanning through a collaborative optimization method of cascaded metasurfaces. Simulation results based on dual-layer cascaded metasurfaces show that within the ±32° light deflection range, the spot diameter remains below 20µm, the maximum <i>f-θ</i> distortion is controlled at 0.19%, and the Strehl ratio (SR) across the entire FOV exceeds 0.99, verifying the system's imaging performance approaching the diffraction limit. Phase sampling analysis of the cascaded metalenses indicates that when the sampling step varies within 3-9µm, there is no significant difference in spot performance, which greatly reduces the fabrication difficulty and cost. Further research demonstrates that when the phase mutation rate is controlled within 8%, the system maintains stable scanning characteristics, while exceeding 9% leads to severe wavefront distortion and drastic deterioration of optical performance, providing a quantitative basis for processing error control. The wavelength analysis of the designed <i>f-θ</i> lens reveals that it maintains good performance within an 80 nm bandwidth. This study provides an integrated solution for compact laser processing systems, and its technical achievements can promote the large-scale application of metasurface optical elements in optical imaging, optical metrology, and laser processing.</p>\",\"PeriodicalId\":19691,\"journal\":{\"name\":\"Optics express\",\"volume\":\"33 18\",\"pages\":\"38099-38112\"},\"PeriodicalIF\":3.3000,\"publicationDate\":\"2025-09-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics express\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1364/OE.570030\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics express","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1364/OE.570030","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0

摘要

传统的f-θ (f-θ)透镜系统通常依赖于级联多个透镜或采用复杂的表面轮廓来实现大视场(FOV)的高精度扫描和激光处理,导致系统体积和制造复杂性的显着增加。本研究提出了一种用于10.6µm激光加工系统的超薄f-θ透镜,通过级联超表面协同优化方法实现了高性能扫描。基于双层级联超表面的仿真结果表明,在±32°光偏转范围内,光斑直径保持在20µm以下,最大f-θ畸变控制在0.19%,整个视场的Strehl比(SR)超过0.99,验证了系统的成像性能接近衍射极限。级联超透镜的相位采样分析表明,当采样步长变化在3 ~ 9µm范围内时,光斑性能没有显著差异,大大降低了制作难度和成本。进一步研究表明,当相位突变率控制在8%以内时,系统保持稳定的扫描特性,而超过9%则会导致波前畸变严重,光学性能急剧下降,为加工误差控制提供了定量依据。对设计的f-θ透镜的波长分析表明,它在80 nm带宽内保持良好的性能。本研究为紧凑型激光加工系统提供了集成解决方案,其技术成果可促进超表面光学元件在光学成像、光学计量、激光加工等领域的大规模应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultra-thin f-theta metalens with high focus resolution and large field of view.

Conventional f-theta(f-θ) lens systems often rely on cascading multiple lenses or adopting complex surface profiles to achieve high-precision scanning and laser processing over a large field of view (FOV), leading to significant increases in system volume and manufacturing complexity. This study presents an ultra-thin f-θ lens for a 10.6µm laser processing system, realizing high-performance scanning through a collaborative optimization method of cascaded metasurfaces. Simulation results based on dual-layer cascaded metasurfaces show that within the ±32° light deflection range, the spot diameter remains below 20µm, the maximum f-θ distortion is controlled at 0.19%, and the Strehl ratio (SR) across the entire FOV exceeds 0.99, verifying the system's imaging performance approaching the diffraction limit. Phase sampling analysis of the cascaded metalenses indicates that when the sampling step varies within 3-9µm, there is no significant difference in spot performance, which greatly reduces the fabrication difficulty and cost. Further research demonstrates that when the phase mutation rate is controlled within 8%, the system maintains stable scanning characteristics, while exceeding 9% leads to severe wavefront distortion and drastic deterioration of optical performance, providing a quantitative basis for processing error control. The wavelength analysis of the designed f-θ lens reveals that it maintains good performance within an 80 nm bandwidth. This study provides an integrated solution for compact laser processing systems, and its technical achievements can promote the large-scale application of metasurface optical elements in optical imaging, optical metrology, and laser processing.

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来源期刊
Optics express
Optics express 物理-光学
CiteScore
6.60
自引率
15.80%
发文量
5182
审稿时长
2.1 months
期刊介绍: Optics Express is the all-electronic, open access journal for optics providing rapid publication for peer-reviewed articles that emphasize scientific and technology innovations in all aspects of optics and photonics.
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