{"title":"功率半导体模块芯片背面金属化与焊料合金界面相互作用研究","authors":"Shilin Zhao, Erxian Yao, Chunbiao Wang, Yan Tong","doi":"10.1007/s10854-025-15818-4","DOIUrl":null,"url":null,"abstract":"<div><p>Power semiconductor modules are the core device of the electrical power conversion system, whose chip-solder interface is one of the weak points that can cause module failure, requiring an in-depth investigation. In this work, the effect of chip backside metallization (BSM), solder alloy, and solder condition on the interface reaction during reflow soldering was investigated. The interface bonding performance was further evaluated via accelerated aging tests like HTS (High temperature storage) and HTRB (High humidity, high temperature reverse biased). Results show that when the chip BSM of the Al–Ti–Ni–Ag reacted with Sn-based solders, it formed (Cu, Ni)<sub>6</sub>Sn<sub>5</sub> intermetallic compound (IMC) with the SAC305 solder, whereas with SnSb5, it probably yielded (Cu, Ni)<sub>6</sub>(Sn, Sb)<sub>5</sub>. An overly thin initial Ni layer of chip BSM became depleted during the reaction, resulting in a discontinuous interface IMC layer and the dewetting between the Ti layer and IMCs. This discontinuity is more pronounced when SnSb5 solder is employed. A thicker Ni layer can ensure a continuous interface IMC layer and a higher interface bonding strength, though it leads to more interface Kirkendall voids. Increasing solder temperature and time can promote IMCs to dissolve into the solder melt, resulting in the IMC layer drifting into the solder interior. The HTS test can facilitate IMC growth and decrease interface strength, without accompanying IMC phase transformation. Delamination occurred at the interface employed the thin initial Ni layer during the HTRB test, evidencing that the inappropriate chip BSM-solder matching reduces interface reliability.</p></div>","PeriodicalId":646,"journal":{"name":"Journal of Materials Science: Materials in Electronics","volume":"36 27","pages":""},"PeriodicalIF":2.8000,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study on the interface interaction between the chip backside metallization and solder alloys of power semiconductor modules\",\"authors\":\"Shilin Zhao, Erxian Yao, Chunbiao Wang, Yan Tong\",\"doi\":\"10.1007/s10854-025-15818-4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Power semiconductor modules are the core device of the electrical power conversion system, whose chip-solder interface is one of the weak points that can cause module failure, requiring an in-depth investigation. In this work, the effect of chip backside metallization (BSM), solder alloy, and solder condition on the interface reaction during reflow soldering was investigated. The interface bonding performance was further evaluated via accelerated aging tests like HTS (High temperature storage) and HTRB (High humidity, high temperature reverse biased). Results show that when the chip BSM of the Al–Ti–Ni–Ag reacted with Sn-based solders, it formed (Cu, Ni)<sub>6</sub>Sn<sub>5</sub> intermetallic compound (IMC) with the SAC305 solder, whereas with SnSb5, it probably yielded (Cu, Ni)<sub>6</sub>(Sn, Sb)<sub>5</sub>. An overly thin initial Ni layer of chip BSM became depleted during the reaction, resulting in a discontinuous interface IMC layer and the dewetting between the Ti layer and IMCs. This discontinuity is more pronounced when SnSb5 solder is employed. A thicker Ni layer can ensure a continuous interface IMC layer and a higher interface bonding strength, though it leads to more interface Kirkendall voids. Increasing solder temperature and time can promote IMCs to dissolve into the solder melt, resulting in the IMC layer drifting into the solder interior. The HTS test can facilitate IMC growth and decrease interface strength, without accompanying IMC phase transformation. Delamination occurred at the interface employed the thin initial Ni layer during the HTRB test, evidencing that the inappropriate chip BSM-solder matching reduces interface reliability.</p></div>\",\"PeriodicalId\":646,\"journal\":{\"name\":\"Journal of Materials Science: Materials in Electronics\",\"volume\":\"36 27\",\"pages\":\"\"},\"PeriodicalIF\":2.8000,\"publicationDate\":\"2025-09-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Materials Science: Materials in Electronics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s10854-025-15818-4\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Materials Science: Materials in Electronics","FirstCategoryId":"5","ListUrlMain":"https://link.springer.com/article/10.1007/s10854-025-15818-4","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Study on the interface interaction between the chip backside metallization and solder alloys of power semiconductor modules
Power semiconductor modules are the core device of the electrical power conversion system, whose chip-solder interface is one of the weak points that can cause module failure, requiring an in-depth investigation. In this work, the effect of chip backside metallization (BSM), solder alloy, and solder condition on the interface reaction during reflow soldering was investigated. The interface bonding performance was further evaluated via accelerated aging tests like HTS (High temperature storage) and HTRB (High humidity, high temperature reverse biased). Results show that when the chip BSM of the Al–Ti–Ni–Ag reacted with Sn-based solders, it formed (Cu, Ni)6Sn5 intermetallic compound (IMC) with the SAC305 solder, whereas with SnSb5, it probably yielded (Cu, Ni)6(Sn, Sb)5. An overly thin initial Ni layer of chip BSM became depleted during the reaction, resulting in a discontinuous interface IMC layer and the dewetting between the Ti layer and IMCs. This discontinuity is more pronounced when SnSb5 solder is employed. A thicker Ni layer can ensure a continuous interface IMC layer and a higher interface bonding strength, though it leads to more interface Kirkendall voids. Increasing solder temperature and time can promote IMCs to dissolve into the solder melt, resulting in the IMC layer drifting into the solder interior. The HTS test can facilitate IMC growth and decrease interface strength, without accompanying IMC phase transformation. Delamination occurred at the interface employed the thin initial Ni layer during the HTRB test, evidencing that the inappropriate chip BSM-solder matching reduces interface reliability.
期刊介绍:
The Journal of Materials Science: Materials in Electronics is an established refereed companion to the Journal of Materials Science. It publishes papers on materials and their applications in modern electronics, covering the ground between fundamental science, such as semiconductor physics, and work concerned specifically with applications. It explores the growth and preparation of new materials, as well as their processing, fabrication, bonding and encapsulation, together with the reliability, failure analysis, quality assurance and characterization related to the whole range of applications in electronics. The Journal presents papers in newly developing fields such as low dimensional structures and devices, optoelectronics including III-V compounds, glasses and linear/non-linear crystal materials and lasers, high Tc superconductors, conducting polymers, thick film materials and new contact technologies, as well as the established electronics device and circuit materials.