Zheda Ning , Yipei He , Qi Tang , Yunxiu Chao , Yue Shen , Haozhang Zhong , Ming Wen , Jianfeng Gu
{"title":"激光粉末床熔镀纯银溅射靶:工艺、显微结构和溅射性能","authors":"Zheda Ning , Yipei He , Qi Tang , Yunxiu Chao , Yue Shen , Haozhang Zhong , Ming Wen , Jianfeng Gu","doi":"10.1016/j.matdes.2025.114779","DOIUrl":null,"url":null,"abstract":"<div><div>Silver (Ag) sputtering targets are crucial in electronic information materials, particularly with the rapid advancement of Artificial Intelligence (AI), which has further increased their demand. However, the extremely high reflectivity and poor laser absorption of pure Ag in the infrared range make it challenging to process using conventional laser-based Additive Manufacturing (AM) systems, limiting its wide application. In this study, a novel hatch spacing-to-scanning speed ratio (<em>h</em>/<em>v</em>)-centered low-energy–density strategy was proposed to overcome this challenge and enable high-quality additive manufacturing of pure Ag. By optimizing the (<em>h</em>/<em>v</em>) value to 1.0E-04, we successfully fabricated dense, low-defect Ag sputtering targets without increasing energy input. The results demonstrated that this method significantly shortened the manufacturing cycle and produced high-performance Ag targets with refined grains (3–7 μm), high density (≥99.8 %), a smooth surface (Ra = 11.5 μm), and stable sputtering performance (sputtering rate = 31.8 nm/min). Furthermore, the hardness increased by 45.1 % compared to Ag targets prepared by traditional methods. This work offers a practical pathway for applying laser-based AM in the production of highly reflective metal sputtering targets, advancing their industrialization in thin-film electronics, while also contributing to the understanding of AM process–structure relationships in metallic materials.</div></div>","PeriodicalId":383,"journal":{"name":"Materials & Design","volume":"259 ","pages":"Article 114779"},"PeriodicalIF":7.9000,"publicationDate":"2025-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Laser powder bed fusion of pure silver sputtering target: process, microstructure, and sputtering performance\",\"authors\":\"Zheda Ning , Yipei He , Qi Tang , Yunxiu Chao , Yue Shen , Haozhang Zhong , Ming Wen , Jianfeng Gu\",\"doi\":\"10.1016/j.matdes.2025.114779\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Silver (Ag) sputtering targets are crucial in electronic information materials, particularly with the rapid advancement of Artificial Intelligence (AI), which has further increased their demand. However, the extremely high reflectivity and poor laser absorption of pure Ag in the infrared range make it challenging to process using conventional laser-based Additive Manufacturing (AM) systems, limiting its wide application. In this study, a novel hatch spacing-to-scanning speed ratio (<em>h</em>/<em>v</em>)-centered low-energy–density strategy was proposed to overcome this challenge and enable high-quality additive manufacturing of pure Ag. By optimizing the (<em>h</em>/<em>v</em>) value to 1.0E-04, we successfully fabricated dense, low-defect Ag sputtering targets without increasing energy input. The results demonstrated that this method significantly shortened the manufacturing cycle and produced high-performance Ag targets with refined grains (3–7 μm), high density (≥99.8 %), a smooth surface (Ra = 11.5 μm), and stable sputtering performance (sputtering rate = 31.8 nm/min). Furthermore, the hardness increased by 45.1 % compared to Ag targets prepared by traditional methods. This work offers a practical pathway for applying laser-based AM in the production of highly reflective metal sputtering targets, advancing their industrialization in thin-film electronics, while also contributing to the understanding of AM process–structure relationships in metallic materials.</div></div>\",\"PeriodicalId\":383,\"journal\":{\"name\":\"Materials & Design\",\"volume\":\"259 \",\"pages\":\"Article 114779\"},\"PeriodicalIF\":7.9000,\"publicationDate\":\"2025-09-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials & Design\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0264127525011992\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials & Design","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0264127525011992","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Laser powder bed fusion of pure silver sputtering target: process, microstructure, and sputtering performance
Silver (Ag) sputtering targets are crucial in electronic information materials, particularly with the rapid advancement of Artificial Intelligence (AI), which has further increased their demand. However, the extremely high reflectivity and poor laser absorption of pure Ag in the infrared range make it challenging to process using conventional laser-based Additive Manufacturing (AM) systems, limiting its wide application. In this study, a novel hatch spacing-to-scanning speed ratio (h/v)-centered low-energy–density strategy was proposed to overcome this challenge and enable high-quality additive manufacturing of pure Ag. By optimizing the (h/v) value to 1.0E-04, we successfully fabricated dense, low-defect Ag sputtering targets without increasing energy input. The results demonstrated that this method significantly shortened the manufacturing cycle and produced high-performance Ag targets with refined grains (3–7 μm), high density (≥99.8 %), a smooth surface (Ra = 11.5 μm), and stable sputtering performance (sputtering rate = 31.8 nm/min). Furthermore, the hardness increased by 45.1 % compared to Ag targets prepared by traditional methods. This work offers a practical pathway for applying laser-based AM in the production of highly reflective metal sputtering targets, advancing their industrialization in thin-film electronics, while also contributing to the understanding of AM process–structure relationships in metallic materials.
期刊介绍:
Materials and Design is a multi-disciplinary journal that publishes original research reports, review articles, and express communications. The journal focuses on studying the structure and properties of inorganic and organic materials, advancements in synthesis, processing, characterization, and testing, the design of materials and engineering systems, and their applications in technology. It aims to bring together various aspects of materials science, engineering, physics, and chemistry.
The journal explores themes ranging from materials to design and aims to reveal the connections between natural and artificial materials, as well as experiment and modeling. Manuscripts submitted to Materials and Design should contain elements of discovery and surprise, as they often contribute new insights into the architecture and function of matter.