优化溅射非晶Ga2O3薄膜中的氧通量,实现高性能的太阳盲紫外光电探测器

IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
Zihan Zhang , Anzhen Zhang , Qiyi Wan , Rui Qin , Xinyue Zhang , Weiwei Cao , Jiuhong Wang
{"title":"优化溅射非晶Ga2O3薄膜中的氧通量,实现高性能的太阳盲紫外光电探测器","authors":"Zihan Zhang ,&nbsp;Anzhen Zhang ,&nbsp;Qiyi Wan ,&nbsp;Rui Qin ,&nbsp;Xinyue Zhang ,&nbsp;Weiwei Cao ,&nbsp;Jiuhong Wang","doi":"10.1016/j.vacuum.2025.114748","DOIUrl":null,"url":null,"abstract":"<div><div>This study systematically investigates the effect of oxygen flux on the optical properties of amorphous gallium oxide (a-Ga<sub>2</sub>O<sub>3</sub>) thin films deposited on SiO<sub>2</sub>/Si substrates via RF magnetron sputtering. Through comprehensive material characterization and device performance analysis, we elucidate the correlation between defect evolution (including oxygen vacancies and other intrinsic defects) and the resulting optoelectronic responses. Our findings reveal that oxygen vacancy concentration mainly influences the optical band gap. Although increasing oxygen flux significantly reduces the oxygen vacancy concentration, the overall defect density exhibits a nonlinear trend because additional defect states are concurrently introduced. Consequently, the device performance exhibits a nonlinear dependence on oxygen flux. The detector prepared under moderate oxygen flux conditions exhibits an ultra-high light-dark current ratio of up to 4 × 10<sup>5</sup> and a low dark current at the pA level. Furthermore, these devices demonstrate rapid response kinetics, with a rise time of 28.9 ms and a fall time of 0.9 ms. These changes are attributed to the interplay between defects and material properties. This study provides critical insights into the process development of high-performance a-Ga<sub>2</sub>O<sub>3</sub> solar-blind UV photodetectors.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"242 ","pages":"Article 114748"},"PeriodicalIF":3.9000,"publicationDate":"2025-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optimized oxygen flux in sputtering amorphous Ga2O3 thin films enables high-performance solar-blind UV photodetectors\",\"authors\":\"Zihan Zhang ,&nbsp;Anzhen Zhang ,&nbsp;Qiyi Wan ,&nbsp;Rui Qin ,&nbsp;Xinyue Zhang ,&nbsp;Weiwei Cao ,&nbsp;Jiuhong Wang\",\"doi\":\"10.1016/j.vacuum.2025.114748\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This study systematically investigates the effect of oxygen flux on the optical properties of amorphous gallium oxide (a-Ga<sub>2</sub>O<sub>3</sub>) thin films deposited on SiO<sub>2</sub>/Si substrates via RF magnetron sputtering. Through comprehensive material characterization and device performance analysis, we elucidate the correlation between defect evolution (including oxygen vacancies and other intrinsic defects) and the resulting optoelectronic responses. Our findings reveal that oxygen vacancy concentration mainly influences the optical band gap. Although increasing oxygen flux significantly reduces the oxygen vacancy concentration, the overall defect density exhibits a nonlinear trend because additional defect states are concurrently introduced. Consequently, the device performance exhibits a nonlinear dependence on oxygen flux. The detector prepared under moderate oxygen flux conditions exhibits an ultra-high light-dark current ratio of up to 4 × 10<sup>5</sup> and a low dark current at the pA level. Furthermore, these devices demonstrate rapid response kinetics, with a rise time of 28.9 ms and a fall time of 0.9 ms. These changes are attributed to the interplay between defects and material properties. This study provides critical insights into the process development of high-performance a-Ga<sub>2</sub>O<sub>3</sub> solar-blind UV photodetectors.</div></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":\"242 \",\"pages\":\"Article 114748\"},\"PeriodicalIF\":3.9000,\"publicationDate\":\"2025-09-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X25007389\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25007389","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

本研究系统地研究了氧通量对在SiO2/Si衬底上沉积非晶氧化镓(a-Ga2O3)薄膜光学性能的影响。通过全面的材料表征和器件性能分析,我们阐明了缺陷演变(包括氧空位和其他固有缺陷)与由此产生的光电响应之间的相关性。研究结果表明,氧空位浓度主要影响光学带隙。虽然氧通量的增加显著降低了氧空位浓度,但由于同时引入了额外的缺陷态,总缺陷密度呈现非线性趋势。因此,器件性能表现出对氧通量的非线性依赖。在中等氧通量条件下制备的探测器具有高达4 × 105的超高光暗电流比和pA级的低暗电流。此外,这些器件表现出快速的响应动力学,上升时间为28.9 ms,下降时间为0.9 ms。这些变化归因于缺陷和材料性能之间的相互作用。该研究为高性能a-Ga2O3太阳盲UV光电探测器的工艺开发提供了重要的见解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optimized oxygen flux in sputtering amorphous Ga2O3 thin films enables high-performance solar-blind UV photodetectors
This study systematically investigates the effect of oxygen flux on the optical properties of amorphous gallium oxide (a-Ga2O3) thin films deposited on SiO2/Si substrates via RF magnetron sputtering. Through comprehensive material characterization and device performance analysis, we elucidate the correlation between defect evolution (including oxygen vacancies and other intrinsic defects) and the resulting optoelectronic responses. Our findings reveal that oxygen vacancy concentration mainly influences the optical band gap. Although increasing oxygen flux significantly reduces the oxygen vacancy concentration, the overall defect density exhibits a nonlinear trend because additional defect states are concurrently introduced. Consequently, the device performance exhibits a nonlinear dependence on oxygen flux. The detector prepared under moderate oxygen flux conditions exhibits an ultra-high light-dark current ratio of up to 4 × 105 and a low dark current at the pA level. Furthermore, these devices demonstrate rapid response kinetics, with a rise time of 28.9 ms and a fall time of 0.9 ms. These changes are attributed to the interplay between defects and material properties. This study provides critical insights into the process development of high-performance a-Ga2O3 solar-blind UV photodetectors.
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来源期刊
Vacuum
Vacuum 工程技术-材料科学:综合
CiteScore
6.80
自引率
17.50%
发文量
0
审稿时长
34 days
期刊介绍: Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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