光刻胶辅助3D打印快速制造圆形微通道

IF 6.4 3区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Xiaoshi Han, Hui Chang, Yingze Wangguan, Chengji Song, Dongqing Li, Yongxin Song
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引用次数: 0

摘要

虽然基于3D打印的微通道制造具有简单和节省时间的优点,但制造的通道表面粗糙限制了其广泛应用。为了解决这一问题,本文介绍了一种光刻辅助3D打印技术,用于制造适合软微通道制造的圆形主模具。研究了光刻胶自旋涂覆速度和3d打印凸微结构尺寸对表面粗糙度和微通道尺寸的影响。结果表明,经旋涂光刻胶后,印刷微结构的表面粗糙度降至15.44 nm。随着旋转涂层速度的增加,涂层光刻胶膜的厚度和微通道的底部宽度减小,而通道高度与3d打印微结构相同。制备了分离距离为65.75µm的平行微通道。该技术进一步应用于制造气动驱动微阀和可变高度的直微通道,用于实时检测和计数活微藻。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Photoresist-Assisted 3D Printing for Rapid Fabricating Circular Microchannel

Photoresist-Assisted 3D Printing for Rapid Fabricating Circular Microchannel

Photoresist-Assisted 3D Printing for Rapid Fabricating Circular Microchannel

Photoresist-Assisted 3D Printing for Rapid Fabricating Circular Microchannel

Photoresist-Assisted 3D Printing for Rapid Fabricating Circular Microchannel

While 3D printing-based microchannel fabrication is advantageous in terms of simple and time-saving, the rough surface of the fabricated channel limits its wide application. To address this problem, this paper introduces a photoresist-assisted 3D printing technique for fabricating circular master molds tailored for soft microchannel fabrication. The effects of photoresist spin-coating speeds and 3D-printed convex microstructure sizes on surface roughness and the sizes of the fabricated microchannel are investigated. It is found that after photoresist spin-coating, the surface roughness of the printed microstructure is reduced to 15.44 nm. The thickness of the coated photoresist film and the bottom width of the microchannel decreased with the increase in spin-coating speed, while the channel height is the same as that of 3D-printed microstructures. Parallel microchannels with a separation distance of 65.75 µm are fabricated. This technique is further applied for fabricating a pneumatically actuated microvalve and a straight microchannel with variable heights for real-time detection and counting of living microalgae.

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来源期刊
Advanced Materials Technologies
Advanced Materials Technologies Materials Science-General Materials Science
CiteScore
10.20
自引率
4.40%
发文量
566
期刊介绍: Advanced Materials Technologies Advanced Materials Technologies is the new home for all technology-related materials applications research, with particular focus on advanced device design, fabrication and integration, as well as new technologies based on novel materials. It bridges the gap between fundamental laboratory research and industry.
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