Ag₂O涂层增强非晶硅薄膜的介电性能和光传导

IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL
Silicon Pub Date : 2025-07-18 DOI:10.1007/s12633-025-03400-w
A. F. Qasrawi
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引用次数: 0

摘要

本文采用热蒸发技术在非晶硅(a-Si)薄膜上涂覆厚度分别为100 nm和500 nm的Ag2O薄膜,以提高其介电和光传导性能。对a-Si/Ag2O薄膜(a-SA-xx, xx为Ag2O层厚度)的结构和形态研究表明,随着应变结构的增加,六边形Ag2O在a-Si上优先生长。氧化层厚度的增加使其形貌从球形颗粒转变为类似于六边形或准规则模式的波纹网络的互连。Ag2O涂层显著诱导了红外范围内的自由载流子吸收,使能带隙红移,光吸收率提高了24倍,a-SA-100薄膜的介电常数提高了~ 100%,a-SA-500薄膜的介电常数提高了4000%。在红外范围内,a-Si的光导率分别提高了26倍和132倍。此外,将a-SA-xx薄膜处理为可作为太赫兹波段滤波器的光学滤光片已经显示出它们作为电光系统的能力,具有增强的截止频率,漂移迁移率和自由载流子浓度值。a-SA-500薄膜在红外波段的漂移迁移率和太赫兹截止频率分别达到29.89 cm2/Vs和9.50 THz。Ag2O包覆的非晶硅薄膜在红外激光传感和其他电光应用方面具有广阔的应用前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Enhanced Dielectric Properties, and Optical Conduction of Amorphous Silicon Thin Films via Ag₂O Coatings

Herein, amorphous silicon (a-Si) thin films are coated with Ag2O films of thickness of 100 nm and 500 nm by the thermal evaporation technique for the purpose of enhancing their dielectric and optical conduction properties. The structural and morphological studies on the a-Si/Ag2O films (a-SA-xx; xx is the thickness of Ag2O layer) have shown the preferred growth of hexagonal Ag2O onto a-Si with increased strained structure. The increased oxide layers thickness change the morphology from spherical grains to resembling interconnects as a wavy networks organized in a hexagonal or quasi regular patterns. Ag2O coating remarkably induced the free carrier absorption in the infrared range of light, redshifted the energy band gap, increased the light absorption by 24 times, enhanced the dielectric constant by ~ 100% in a-SA-100 and 4000% in a-SA-500 films. The optical conductivity of a-Si is improved ~ 26 and 132 times in the IR range. In addition, treating a-SA-xx films as optical filters workable as terahertz band filters have shown their ability to perform as electro-optical systems exhibiting enhanced cutoff frequency, drift mobility and free carrier concentration values. The drift mobility and terahertz cutoff frequency of a-SA-500 films reached 29.89 cm2/Vs and 9.50 THz in the IR range of light. The features of Ag2O coated amorphous Si films are promising for IR laser sensing and other electro-optical applications.

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来源期刊
Silicon
Silicon CHEMISTRY, PHYSICAL-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.90
自引率
20.60%
发文量
685
审稿时长
>12 weeks
期刊介绍: The journal Silicon is intended to serve all those involved in studying the role of silicon as an enabling element in materials science. There are no restrictions on disciplinary boundaries provided the focus is on silicon-based materials or adds significantly to the understanding of such materials. Accordingly, such contributions are welcome in the areas of inorganic and organic chemistry, physics, biology, engineering, nanoscience, environmental science, electronics and optoelectronics, and modeling and theory. Relevant silicon-based materials include, but are not limited to, semiconductors, polymers, composites, ceramics, glasses, coatings, resins, composites, small molecules, and thin films.
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