超导基板通孔（TSSV）的论证及其在横向交叉耦合高温超导滤波器设计中的应用

IF 4.5 1区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Microwave Theory and Techniques Pub Date : 2025-04-28 DOI:10.1109/TMTT.2025.3557413

Xilong Lu;Qingyu Kong;Guangsong Wei;Shigang Zhou;Liguo Zhou;Pengyu Ma;Qingyue Liu;Rui Zhang

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引用次数: 0

摘要

本文首次提出并验证了高温超导（HTS）滤波器的超导衬底通孔（TSSV）技术，该技术可实现超导衬底（YBCO/氧化镁（MgO））的垂直互连，将高温超导（HTS）滤波器的设计和制造从二维平面推进到三维一体化。利用TSSV实现了超导共面波导（CPW）线上下两层的垂直互连。构造了一种基于TSSV的双模谐振器，并提出了特征平面法（CPM）来唯一区分多个奇偶模频率。对横向交叉耦合结构进行了系统的研究，通过公式推导，将交叉耦合的影响从总耦合中分离出来，从而可以清晰地分析其对滤波器响应的影响。为了验证所提出的方法，利用TSSV设计了二级和四级横向交叉耦合HTS滤波器。实测结果与设计指标吻合良好。

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The Demonstration of Through Superconducting Substrate Via (TSSV) and Its Application to Transversal Cross-Coupling HTS Filter Design

This article proposes and verifies the through superconducting substrate via (TSSV) technology for high-temperature superconducting (HTS) filters for the first time, which can be used to achieve vertical interconnection of superconducting substrates (YBCO/magnesium oxide (MgO)], advancing the design and manufacturing of HTS filters from 2-D plane to 3-D integration. The vertical interconnection between the top and bottom layers of the superconducting coplanar waveguide (CPW) lines is realized using TSSV. A dual-mode resonator based on TSSV is constructed, and the characteristic plane method (CPM) is proposed to uniquely distinguish multiple odd- and even-mode frequencies. A systematic study of the transverse cross-coupling structure is presented, through formula derivation, the influence of cross-coupling is separated from the total coupling, allowing for a clear analysis of its impact on the filter response. To validate the proposed methods, two- and four-stage transversal cross-coupling HTS filters are designed using TSSV. The measured results show excellent agreement with the design specifications.

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来源期刊

IEEE Transactions on Microwave Theory and Techniques 工程技术-工程：电子与电气

CiteScore

8.60

自引率

18.60%

发文量

486

审稿时长

6 months

期刊介绍： The IEEE Transactions on Microwave Theory and Techniques focuses on that part of engineering and theory associated with microwave/millimeter-wave components, devices, circuits, and systems involving the generation, modulation, demodulation, control, transmission, and detection of microwave signals. This includes scientific, technical, and industrial, activities. Microwave theory and techniques relates to electromagnetic waves usually in the frequency region between a few MHz and a THz; other spectral regions and wave types are included within the scope of the Society whenever basic microwave theory and techniques can yield useful results. Generally, this occurs in the theory of wave propagation in structures with dimensions comparable to a wavelength, and in the related techniques for analysis and design.