Research Progress on Energy Dissipation Mechanisms in MEMS Resonators: A Review

Micro-electromechanical system (MEMS) resonators are foundational components in modern information technology, playing pivotal roles in inertial navigation, precision sensing, and frequency control applications. The performance of these resonators critically governs system-level stability and reliability, with energy dissipation representing the most significant limiting factor that directly impacts key performance metrics, including frequency stability and phase noise. This article presents a comprehensive review of energy dissipation mechanisms in MEMS resonators and recent progress in damping suppression techniques. We first elucidate the underlying physics of major dissipation mechanisms, including air damping, anchor loss, thermoelastic damping (TED), and Akhiezer damping, along with their theoretical models and generation principles. Subsequently, we critically examine state-of-the-art strategies for mitigating these damping effects. Finally, we discuss remaining challenges and future research directions. Our work provides both theoretical insights and practical methodologies for the design of low-loss MEMS resonators, offering valuable guidance for enhancing quality factors and optimizing dynamic performance in next-generation devices.