锗衬底上沟槽引导选择性区域外延生长的InSb纳米线网络

IF 4.3 Q1 OPTICS
Fengyue He, Huading Song, Xiyu Hou, Lei Liu, Runan Shang, Hao Zhang, Dong Pan, Jianhua Zhao
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引用次数: 0

摘要

InSb是研究拓扑量子计算、红外光电子学和自旋电子学的优良材料。高质量、大规模InSb纳米线网络的可控增长是这些应用的基础。然而,分子束外延生长的InSb纳米线网络的选择性生长窗口和外延生长窗口并不重叠。到目前为止,控制高质量的大规模InSb纳米线网络的增长仍然是一个挑战。本文提出了一种基于分子束外延的沟槽引导选择性区域生长技术,用于在Ge衬底上生长InSb纳米线网络。与传统的平面选择性外延生长技术不同的是,在本文提出的方法中,材料在衬底的凹槽处外延生长,利用外延材料在衬底表面的原子扩散来实现选择性生长:不使用任何掩模即可实现选择性生长。通过这种方式生长的InSb纳米线网络具有连续的形貌和平顶面,是高质量的锌-闪锌矿晶体,并表现出强烈的自旋轨道相互作用。由于具有良好的可重复性和可扩展性,该工作为在Ge衬底上生长高质量的晶圆级InSb纳米线网络提供了新的解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

InSb Nanowire Networks Grown by Groove-Guided Selective Area Epitaxy on Ge Substrates

InSb Nanowire Networks Grown by Groove-Guided Selective Area Epitaxy on Ge Substrates

InSb Nanowire Networks Grown by Groove-Guided Selective Area Epitaxy on Ge Substrates

InSb is an excellent material for studying topological quantum computing, infrared optoelectronics, and spintronics. Controllable growth of high-quality, large-scale InSb nanowire networks is the basis for these applications. However, the selective growth window and the epitaxial growth window of InSb nanowire networks do not overlap when they are grown by molecular-beam epitaxy. So far, the controlled growth of high-quality large-scale InSb nanowire networks still remains a challenge. Here, a groove-guided selective area growth technique is proposed for InSb nanowire network growth on Ge substrates by molecular-beam epitaxy. Different from the traditional planar selective epitaxial growth technology, in the proposed method, the material is epitaxially grown at the grooves of the substrate, and the selective growth is achieved by utilizing the atomic diffusion of the epitaxial material on the substrate surface: Selective growth is achieved without using any masks. The InSb nanowire networks grown by this manner have continuous morphology with flat top facets, and they are high-quality zinc-blende crystals and exhibit strong spin-orbit interaction. Due to good repeatability and scalability, the work provides a new solution to grow high-quality wafer-scale InSb nanowire networks on Ge substrates.

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CiteScore
7.90
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