采用微同轴增材制造工艺的充气高效率w波段超表面天线

IF 5.8 1区 计算机科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Ruihua Liang;Le Chang;Cheng Guo;Guanghua Shi;Zhen Wang;Anxue Zhang
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引用次数: 0

摘要

毫米波和太赫兹天线需要高制造精度和低介电损耗。微金属增材制造(m - mam)技术作为一种新的解决方案,可以实现多层纯铜结构,平面图案精度可达$5~\mu $ m。本文采用一种新的九层m - mam工艺流程制备了w波段超表面天线。在电铸过程中,天线结构的大型金属和空白区域被周期性的矩形金属柱取代,以平衡晶圆上的静电场。这些结构变化保证了层厚的均匀性,有助于减少误差的积累。测得天线的10db阻抗带宽为22.5%, and a maximum peak gain of 13.7 dBi is achieved in an overall aperture size of $1.43 \lambda _{0} \times 0.88 \lambda _{0}$ . In addition, the front-to-back ratio (FBR) of the metasurface antenna is larger than 20 dB across the whole bandwidth. Thanks to the M-MAM technology that nearly eliminates the dielectric loss, the antenna achieved a maximum simulated radiation efficiency of 96%.
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Air-Filled High-Efficiency W-Band Metasurface Antennas Using the Microcoaxial Additive Manufacturing Process
Millimeter-wave and terahertz antennas require high manufacturing precision and low dielectric loss. As a new solution, micrometal additive manufacturing (M-MAM) technology can achieve multilayer pure copper structure, with planar pattern precision of up to $5~\mu $ m. In this work, a new nine-layer M-MAM process flow was used to fabricate a W-band metasurface antenna. The large metal and blank areas of the antenna structure were substituted by periodic rectangular metal posts to balance the electrostatic field across the wafer during the electroforming process. These structural changes ensure the uniformity of the layer thickness and help reduce the accumulation of errors. The measured 10-dB impedance bandwidth of the antenna is 22.5%, and a maximum peak gain of 13.7 dBi is achieved in an overall aperture size of $1.43 \lambda _{0} \times 0.88 \lambda _{0}$ . In addition, the front-to-back ratio (FBR) of the metasurface antenna is larger than 20 dB across the whole bandwidth. Thanks to the M-MAM technology that nearly eliminates the dielectric loss, the antenna achieved a maximum simulated radiation efficiency of 96%.
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来源期刊
CiteScore
10.40
自引率
28.10%
发文量
968
审稿时长
4.7 months
期刊介绍: IEEE Transactions on Antennas and Propagation includes theoretical and experimental advances in antennas, including design and development, and in the propagation of electromagnetic waves, including scattering, diffraction, and interaction with continuous media; and applications pertaining to antennas and propagation, such as remote sensing, applied optics, and millimeter and submillimeter wave techniques
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