{"title":"低能离子溅射原子的能谱：计算机模拟","authors":"V. I. Shulga","doi":"10.1134/S1027451025700478","DOIUrl":null,"url":null,"abstract":"<p>The energy spectra and average energies of sputtered atoms were calculated for a number of amorphous targets (Si, Ti, Ni, V, and Nb) bombarded with 1 keV Ar ions. The calculations were carried out using the computer simulation programs OKSANA and SRIM-2013. It was shown that for targets whose atoms are heavier than incident ions, SRIM can greatly overestimate the contribution of fast sputtered atoms. This is especially noticeable in calculations with the surface binding energy found by adjusting the calculated sputtering yields to the experimental ones. The simulation results are compared with analytical estimates of the average energy of ejected atoms based on the linear theory of sputtering. It was found that in all the cases considered, these estimates are also greatly overestimated, since they do not take into account the degradation of collision cascades at low bombarding energies. A good agreement of the OKSANA, TRIM.SP, and ACAT simulations is noted.</p>","PeriodicalId":671,"journal":{"name":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","volume":"19 2","pages":"329 - 333"},"PeriodicalIF":0.4000,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Energy Spectra of Atoms Sputtered by Low-Energy Ions: Computer Simulation\",\"authors\":\"V. I. Shulga\",\"doi\":\"10.1134/S1027451025700478\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>The energy spectra and average energies of sputtered atoms were calculated for a number of amorphous targets (Si, Ti, Ni, V, and Nb) bombarded with 1 keV Ar ions. The calculations were carried out using the computer simulation programs OKSANA and SRIM-2013. It was shown that for targets whose atoms are heavier than incident ions, SRIM can greatly overestimate the contribution of fast sputtered atoms. This is especially noticeable in calculations with the surface binding energy found by adjusting the calculated sputtering yields to the experimental ones. The simulation results are compared with analytical estimates of the average energy of ejected atoms based on the linear theory of sputtering. It was found that in all the cases considered, these estimates are also greatly overestimated, since they do not take into account the degradation of collision cascades at low bombarding energies. A good agreement of the OKSANA, TRIM.SP, and ACAT simulations is noted.</p>\",\"PeriodicalId\":671,\"journal\":{\"name\":\"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques\",\"volume\":\"19 2\",\"pages\":\"329 - 333\"},\"PeriodicalIF\":0.4000,\"publicationDate\":\"2025-09-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1027451025700478\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1027451025700478","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
Energy Spectra of Atoms Sputtered by Low-Energy Ions: Computer Simulation
The energy spectra and average energies of sputtered atoms were calculated for a number of amorphous targets (Si, Ti, Ni, V, and Nb) bombarded with 1 keV Ar ions. The calculations were carried out using the computer simulation programs OKSANA and SRIM-2013. It was shown that for targets whose atoms are heavier than incident ions, SRIM can greatly overestimate the contribution of fast sputtered atoms. This is especially noticeable in calculations with the surface binding energy found by adjusting the calculated sputtering yields to the experimental ones. The simulation results are compared with analytical estimates of the average energy of ejected atoms based on the linear theory of sputtering. It was found that in all the cases considered, these estimates are also greatly overestimated, since they do not take into account the degradation of collision cascades at low bombarding energies. A good agreement of the OKSANA, TRIM.SP, and ACAT simulations is noted.
期刊介绍：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
