离子辐照下硅表面周期性起伏发育的起始

IF 0.4 Q4 PHYSICS, CONDENSED MATTER

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2025-09-10 DOI:10.1134/S102745102570051X

M. A. Smirnova, V. I. Bachurin, L. A. Mazaletsky, D. E. Pukhov, A. B. Churilov

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引用次数: 0

摘要

本文报道了在离子束入射角θ = 30°、40°和50°的情况下，用30 keV聚焦镓离子束辐照硅表面的周期性形核过程的研究结果。结果表明：近表面硅层中的镓析出（θ = 30°）、底部边界处以孔洞形式存在的地形不均匀性以及溅射坑的正面壁面（θ = 40°和50°）是引发周期性起伏的主要因素。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Initiation of Periodic Relief Development on the Silicon Surface under Ion Irradiation

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Initiation of Periodic Relief Development on the Silicon Surface under Ion Irradiation

The report presents the results of studying the process of periodic relief nucleation on the silicon surface irradiated with a 30 keV focused beam of gallium ions at ion beam incidence angles θ = 30°, 40°, and 50°. It is shown that the following factors initiate the origin of periodic relief: gallium precipitates in the near-surface silicon layer (θ = 30°), topographic inhomogeneity in the form of a hole at the boundary of the bottom, and the frontal wall of the sputtering crater (θ = 40° and 50°).

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来源期刊

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques PHYSICS, CONDENSED MATTER-

CiteScore

0.90

自引率

25.00%

发文量

144

审稿时长

3-8 weeks

期刊介绍： Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.