{"title":"(001) Ni表面溅射的MD模型中溅射原子极性分布的形成特征","authors":"A. I. Musin, V. N. Samoilov","doi":"10.1134/S1027451025700399","DOIUrl":null,"url":null,"abstract":"<p>Using a modern complete molecular dynamics model of single crystal sputtering taking into account ion incidence on the surface, the mechanisms of formation of the polar and azimuthal angle distribution of atoms sputtered from the surface of the (001) Ni face by Ar ions with an energy of 200 eV are studied. It is shown that the sputtered atoms overfocused by the azimuthal angle eject only near the directions corresponding to the directions to the centers of lenses of two atoms in the surface plane neighboring to the ejecting atom. It is found that in the polar angular distribution of sputtered atoms with an energy of 2.5 ± 0.1 eV in the range of the azimuthal angle of 87° ± 1.5°, close to the center of the lens, three maxima formed by atoms with significantly different mechanisms of emission are observed. It is concluded that the formation of these maxima occurs only due to the surface mechanism of single crystal sputtering.</p>","PeriodicalId":671,"journal":{"name":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","volume":"19 2","pages":"285 - 289"},"PeriodicalIF":0.4000,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"On the Features of the Formation of Polar Distribution of Sputtered Atoms in the MD Model of the (001) Ni Face Sputtering\",\"authors\":\"A. I. Musin, V. N. Samoilov\",\"doi\":\"10.1134/S1027451025700399\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>Using a modern complete molecular dynamics model of single crystal sputtering taking into account ion incidence on the surface, the mechanisms of formation of the polar and azimuthal angle distribution of atoms sputtered from the surface of the (001) Ni face by Ar ions with an energy of 200 eV are studied. It is shown that the sputtered atoms overfocused by the azimuthal angle eject only near the directions corresponding to the directions to the centers of lenses of two atoms in the surface plane neighboring to the ejecting atom. It is found that in the polar angular distribution of sputtered atoms with an energy of 2.5 ± 0.1 eV in the range of the azimuthal angle of 87° ± 1.5°, close to the center of the lens, three maxima formed by atoms with significantly different mechanisms of emission are observed. It is concluded that the formation of these maxima occurs only due to the surface mechanism of single crystal sputtering.</p>\",\"PeriodicalId\":671,\"journal\":{\"name\":\"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques\",\"volume\":\"19 2\",\"pages\":\"285 - 289\"},\"PeriodicalIF\":0.4000,\"publicationDate\":\"2025-09-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1027451025700399\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1027451025700399","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
On the Features of the Formation of Polar Distribution of Sputtered Atoms in the MD Model of the (001) Ni Face Sputtering
Using a modern complete molecular dynamics model of single crystal sputtering taking into account ion incidence on the surface, the mechanisms of formation of the polar and azimuthal angle distribution of atoms sputtered from the surface of the (001) Ni face by Ar ions with an energy of 200 eV are studied. It is shown that the sputtered atoms overfocused by the azimuthal angle eject only near the directions corresponding to the directions to the centers of lenses of two atoms in the surface plane neighboring to the ejecting atom. It is found that in the polar angular distribution of sputtered atoms with an energy of 2.5 ± 0.1 eV in the range of the azimuthal angle of 87° ± 1.5°, close to the center of the lens, three maxima formed by atoms with significantly different mechanisms of emission are observed. It is concluded that the formation of these maxima occurs only due to the surface mechanism of single crystal sputtering.
期刊介绍:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.