电子束轰击对磷化铟单晶发光强度的热效应

IF 1.4 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms Pub Date : 2025-09-09 DOI:10.1016/j.nimb.2025.165856

D. Kenieche

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引用次数: 0

摘要

电子与样品的相互作用产生局部加热。计算了电子轰击过程中的温升，研究了其对磷化铟阴极发光的影响，并建立了物理模型。研究了入射电子束参数（入射能量E0）、入射束流Ip和探针直径d)对InP加热样品的影响。结果表明，当入射光束电流约为50nA，直径0.5μm时，温度升高对CL信号有显著影响，特别是在受光束直接影响的表面样品，比无光束时温度升高21℃。阴极发光强度（ICL）随样品温度的升高而降低。这些结果可以指导扫描电镜阴极发光（SEM-CL）条件的优化，并有助于设计具有更好热稳定性的inp基光电器件。

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Thermal effect of electron beam bombardment on luminescence intensity of indium phosphide single crystal

The interaction of the electron with the sample gives a local heating. The temperature rise during electron bombardment is calculated and its influence on cathodoluminescence (CL) of Indium Phosphide (InP) is investigated, a physical model has been employed.

The effect of incident electron beam parameters such as incident energy (

E_{0}

), incident beam current (

I_{p}

) and probe diameter (

d

) on heating sample of InP have been studied.

The results show that the temperature rise has a significant effect on CL signal, particularly at surface sample directly impacted by the beam, and can reach

21^{°} C

more than the temperature without the beam for the incident beam current was taken about

50 n A

and diameter

0.5 μ m

. The cathodoluminescence intensity (I_CL) is decreased with increasing temperature of sample. These results can guide the optimization of scanning electron microscopy cathodoluminescence (SEM-CL) conditions and contribute to the design of InP-based optoelectronic devices with improved thermal stability.

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来源期刊

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms 物理-核科学技术

CiteScore

2.80

自引率

7.70%

发文量

231

审稿时长

1.9 months

期刊介绍： Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.