{"title":"基于石墨烯-氮化硼-过渡金属二硫化物异质结构的MISFET","authors":"Shubham Rahi , Rajender Kumar , Sapna Singh , Prasanna Misra , Ganesh C. Patil , Trupti Ranjan Lenka , Ankur Solanki , Anurag Chauhan , Balwinder Raj , Pinku Nath , Sudhanshu Choudhary","doi":"10.1016/j.micrna.2025.208320","DOIUrl":null,"url":null,"abstract":"<div><div>Stacking of 2D materials has opened new dimensions in the area of Nano-electronics as both optical and electronic properties of the material change significantly by altering number of layers stacked and materials stacked. A vander waal's (vdWH) heterostructure based metal insulator semiconductor field effect transistor (MISFET) with various channel materials like MoS<sub>2</sub>, MoSe<sub>2</sub> and WS<sub>2</sub> is investigated to assess the differences in electronic properties at both material and device levels. The results suggest that amongst all transition metal dichalcogenides (TMDs) channel materials considered, WS<sub>2</sub> has lowest effective mass (for both electron and hole) and highest I<sub>dsat</sub> (saturation current) ∼9.216 × 10<sup>−5</sup> Å/ <span><math><mrow><mi>μ</mi></mrow></math></span> m which suggests the use of WS<sub>2</sub> in making high performance Field Effect Transistors. However, because bulk WS<sub>2</sub> is an indirect bandgap material, it is unsuitable for the fabrication of optical devices. This limitation is addressed by using monolayer WS<sub>2</sub>, which possesses a direct bandgap. The values of I<sub>dsat</sub> for MoS<sub>2</sub> and MoSe<sub>2</sub> based devices are obtained as ∼4.37 × 10<sup>−5</sup> A/ <span><math><mrow><mi>μ</mi></mrow></math></span> m and ∼2.323 × 10<sup>−5</sup> A/ <span><math><mrow><mi>μ</mi></mrow></math></span> m. Furthermore, WS<sub>2</sub> as channel material has lowest threshold voltage ∼1 V in comparison to ∼1.1 V and ∼1.2 V for MoS<sub>2</sub> and MoSe<sub>2</sub> based transistors.</div></div>","PeriodicalId":100923,"journal":{"name":"Micro and Nanostructures","volume":"208 ","pages":"Article 208320"},"PeriodicalIF":3.0000,"publicationDate":"2025-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Graphene-boron nitride-transition metal dichalcogenides heterostructure based MISFET\",\"authors\":\"Shubham Rahi , Rajender Kumar , Sapna Singh , Prasanna Misra , Ganesh C. Patil , Trupti Ranjan Lenka , Ankur Solanki , Anurag Chauhan , Balwinder Raj , Pinku Nath , Sudhanshu Choudhary\",\"doi\":\"10.1016/j.micrna.2025.208320\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Stacking of 2D materials has opened new dimensions in the area of Nano-electronics as both optical and electronic properties of the material change significantly by altering number of layers stacked and materials stacked. A vander waal's (vdWH) heterostructure based metal insulator semiconductor field effect transistor (MISFET) with various channel materials like MoS<sub>2</sub>, MoSe<sub>2</sub> and WS<sub>2</sub> is investigated to assess the differences in electronic properties at both material and device levels. The results suggest that amongst all transition metal dichalcogenides (TMDs) channel materials considered, WS<sub>2</sub> has lowest effective mass (for both electron and hole) and highest I<sub>dsat</sub> (saturation current) ∼9.216 × 10<sup>−5</sup> Å/ <span><math><mrow><mi>μ</mi></mrow></math></span> m which suggests the use of WS<sub>2</sub> in making high performance Field Effect Transistors. However, because bulk WS<sub>2</sub> is an indirect bandgap material, it is unsuitable for the fabrication of optical devices. This limitation is addressed by using monolayer WS<sub>2</sub>, which possesses a direct bandgap. The values of I<sub>dsat</sub> for MoS<sub>2</sub> and MoSe<sub>2</sub> based devices are obtained as ∼4.37 × 10<sup>−5</sup> A/ <span><math><mrow><mi>μ</mi></mrow></math></span> m and ∼2.323 × 10<sup>−5</sup> A/ <span><math><mrow><mi>μ</mi></mrow></math></span> m. Furthermore, WS<sub>2</sub> as channel material has lowest threshold voltage ∼1 V in comparison to ∼1.1 V and ∼1.2 V for MoS<sub>2</sub> and MoSe<sub>2</sub> based transistors.</div></div>\",\"PeriodicalId\":100923,\"journal\":{\"name\":\"Micro and Nanostructures\",\"volume\":\"208 \",\"pages\":\"Article 208320\"},\"PeriodicalIF\":3.0000,\"publicationDate\":\"2025-09-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nanostructures\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2773012325002493\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nanostructures","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2773012325002493","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
Graphene-boron nitride-transition metal dichalcogenides heterostructure based MISFET
Stacking of 2D materials has opened new dimensions in the area of Nano-electronics as both optical and electronic properties of the material change significantly by altering number of layers stacked and materials stacked. A vander waal's (vdWH) heterostructure based metal insulator semiconductor field effect transistor (MISFET) with various channel materials like MoS2, MoSe2 and WS2 is investigated to assess the differences in electronic properties at both material and device levels. The results suggest that amongst all transition metal dichalcogenides (TMDs) channel materials considered, WS2 has lowest effective mass (for both electron and hole) and highest Idsat (saturation current) ∼9.216 × 10−5 Å/ m which suggests the use of WS2 in making high performance Field Effect Transistors. However, because bulk WS2 is an indirect bandgap material, it is unsuitable for the fabrication of optical devices. This limitation is addressed by using monolayer WS2, which possesses a direct bandgap. The values of Idsat for MoS2 and MoSe2 based devices are obtained as ∼4.37 × 10−5 A/ m and ∼2.323 × 10−5 A/ m. Furthermore, WS2 as channel material has lowest threshold voltage ∼1 V in comparison to ∼1.1 V and ∼1.2 V for MoS2 and MoSe2 based transistors.