旋转阴极细长磁控溅射系统磁场不均匀性的降低

IF 0.7 Q3 Engineering

Surface Engineering and Applied Electrochemistry Pub Date : 2025-09-05 DOI:10.3103/S1068375525700553

V. M. Komarovskaya, A. S. Pologov, O. I. Tereshchuk, I. A. Sechko

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引用次数: 0

摘要

对圆柱形磁控管中磁系统表面磁场分布进行了研究。结果表明，采用sus420 J2级磁钢制成的分流器可以提高产生的磁场的均匀性，这直接影响了溅射涂层的均匀性。此外，分流器的厚度不影响其调平能力，磁极上的磁感应强度随其厚度的增加而减小。物理和数学建模的结果得到了实验的证实。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Reduction of Nonuniformity of the Magnetic Field of an Elongated Magnetron Sputtering System with a Rotating Cathode

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Reduction of Nonuniformity of the Magnetic Field of an Elongated Magnetron Sputtering System with a Rotating Cathode

The study of the distribution of the magnetic field over the surface of the magnetic system in the cylindrical magnetron is performed. It is shown that the use of a shunt made of magnetic steel of grade SUS 420 J2 allows increasing the uniformity of the resulting magnetic field, which directly affects the uniformity of the sputtered coatings. Furthermore, the thickness of the shunt does not affect its leveling ability and the magnitude of the magnetic induction over the magnetic poles decreases with an increase in its thickness. The results of physical and mathematical modeling are confirmed experimentally.

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来源期刊

Surface Engineering and Applied Electrochemistry Engineering-Industrial and Manufacturing Engineering

CiteScore

1.60

自引率

22.20%

发文量

期刊介绍： Surface Engineering and Applied Electrochemistry is a journal that publishes original and review articles on theory and applications of electroerosion and electrochemical methods for the treatment of materials; physical and chemical methods for the preparation of macro-, micro-, and nanomaterials and their properties; electrical processes in engineering, chemistry, and methods for the processing of biological products and food; and application electromagnetic fields in biological systems.