利用互补分裂环谐振器的高灵敏度振动光谱学

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-08-29 DOI:10.1016/j.sna.2025.117021

Yu-Han Chang , Yuan-Hsiang Hsieh , Jyun-Xiang Chen , Jih-Hsin Liu , Watson Kuo

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引用次数: 0

摘要

利用3 GHz互补劈环谐振器（CSRR）实现了高灵敏度、高速的振动检测。该传感器的运动灵敏度为0.2 nm/Hz0.5，能够实时检测悬浮聚酰亚胺和纸膜中的亚微米振荡。此外，我们已经成功地开发了一个基于该探测器的振动光谱平台，允许精确识别机械共振频率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Highly sensitive vibrational spectroscopy using complementary split-ring resonators

A 3 GHz complementary split-ring resonator (CSRR) has been experimentally validated for highly sensitive and high-speed vibration detection. This sensor achieves a motion sensitivity of 0.2 nm/Hz^0.5, enabling real-time sensing of sub-micrometer oscillations in suspended polyimide and buckypaper membranes. Furthermore, we have successfully developed a platform for vibrational spectroscopy based on this detector, allowing for precise identification of mechanical resonance frequencies.

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...