n极氮化镓中TiN/Ru肖特基触点的优化

IF 0.8 4区 工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC
Emmanuel Kayede, Christopher J. Clymore, Nirupam Hatui, Robert Hamwey, Stacia Keller, Umesh K. Mishra
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引用次数: 0

摘要

本文研究了氮化钛(TiN)中间层对氮极氮化镓上钌基肖特基二极管性能的影响。Ru肖特基二极管的最高平均肖特基势垒高度为0.69±$\pm$ 0.03 eV;然而,他们证明了屏障高度在不同设备尺寸上缺乏均匀性。在Ru和GaN之间引入2 nm和10 nm的TiN中间层,导致所有器件尺寸的肖特基势垒高度和泄漏特性一致。值得注意的是,2 nm TiN/40 nm Ru结构在低泄漏电流和均匀势垒性能之间实现了最佳平衡,突出了TiN在获得理想的肖特基势垒性能中的作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Optimizing TiN/Ru Schottky Contacts for N-Polar GaN

Optimizing TiN/Ru Schottky Contacts for N-Polar GaN

Optimizing TiN/Ru Schottky Contacts for N-Polar GaN

Optimizing TiN/Ru Schottky Contacts for N-Polar GaN

Optimizing TiN/Ru Schottky Contacts for N-Polar GaN

This study investigates the effect of titanium nitride (TiN) interlayers on the performance of ruthenium (Ru)-based Schottky diodes on N-polar GaN. The Ru Schottky diodes exhibited the highest mean Schottky barrier height of 0.69 ± $\pm$ 0.03 eV; however, they demonstrated a lack of uniformity in barrier height across varying device sizes. Introducing 2 and 10 nm TiN interlayers between Ru and GaN led to consistent Schottky barrier heights and leakage characteristics for all device sizes. Notably, the 2 nm TiN/40 nm Ru configuration achieved an optimal balance between the low leakage current and uniform barrier properties, highlighting the role of TiN in obtaining desirable Schottky barrier performance.

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来源期刊
Electronics Letters
Electronics Letters 工程技术-工程:电子与电气
CiteScore
2.70
自引率
0.00%
发文量
268
审稿时长
3.6 months
期刊介绍: Electronics Letters is an internationally renowned peer-reviewed rapid-communication journal that publishes short original research papers every two weeks. Its broad and interdisciplinary scope covers the latest developments in all electronic engineering related fields including communication, biomedical, optical and device technologies. Electronics Letters also provides further insight into some of the latest developments through special features and interviews. Scope As a journal at the forefront of its field, Electronics Letters publishes papers covering all themes of electronic and electrical engineering. The major themes of the journal are listed below. Antennas and Propagation Biomedical and Bioinspired Technologies, Signal Processing and Applications Control Engineering Electromagnetism: Theory, Materials and Devices Electronic Circuits and Systems Image, Video and Vision Processing and Applications Information, Computing and Communications Instrumentation and Measurement Microwave Technology Optical Communications Photonics and Opto-Electronics Power Electronics, Energy and Sustainability Radar, Sonar and Navigation Semiconductor Technology Signal Processing MIMO
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