{"title":"金纳米颗粒对电阻型氧化镍基MEMS气体传感器性能的影响","authors":"Аnastasia Kondrateva , Ivan Komarevtsev , Ilya Lazdin , Yakov Enns , Alexey Kazakin , Elizaveta Fedorenko , Alexandr Shakhmin , Valentina Andreeva , Maxim Mishin , Platon Karaseov","doi":"10.1016/j.micrna.2025.208318","DOIUrl":null,"url":null,"abstract":"<div><div>The technology to produce hydrogen sulphide sensor with a sensitive layer based on nickel oxide on a silicon chip is presented. Response of the sensor to H<sub>2</sub>S in concentrations from 1 to 70 ppm at 190 °C operating temperature is investigated. Modification of NiO film with gold nanoparticles (GNPs) significantly improves sensitivity level. The sensing layer made of NiO embedded with GNPs shows five times higher response and improved response time compared to pure nickel oxide one. The response time under 70 ppm H<sub>2</sub>S in Ar exposure is ∼5 s and the recovery time is ∼28 min. The enhanced sensitivity of NiO embedded with GNPs is attributed to (i) the increased crystallinity of NiO grown over the gold nanoparticles and (ii) the spillover effect of GNPs in NiO. MEMS technology used to produce the sensor chip with thin active layers makes it possible to drastically reduce the energy consumption of the sensor.</div></div>","PeriodicalId":100923,"journal":{"name":"Micro and Nanostructures","volume":"207 ","pages":"Article 208318"},"PeriodicalIF":3.0000,"publicationDate":"2025-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of gold nanoparticles on resistive type nickel oxide based MEMS gas sensor properties\",\"authors\":\"Аnastasia Kondrateva , Ivan Komarevtsev , Ilya Lazdin , Yakov Enns , Alexey Kazakin , Elizaveta Fedorenko , Alexandr Shakhmin , Valentina Andreeva , Maxim Mishin , Platon Karaseov\",\"doi\":\"10.1016/j.micrna.2025.208318\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>The technology to produce hydrogen sulphide sensor with a sensitive layer based on nickel oxide on a silicon chip is presented. Response of the sensor to H<sub>2</sub>S in concentrations from 1 to 70 ppm at 190 °C operating temperature is investigated. Modification of NiO film with gold nanoparticles (GNPs) significantly improves sensitivity level. The sensing layer made of NiO embedded with GNPs shows five times higher response and improved response time compared to pure nickel oxide one. The response time under 70 ppm H<sub>2</sub>S in Ar exposure is ∼5 s and the recovery time is ∼28 min. The enhanced sensitivity of NiO embedded with GNPs is attributed to (i) the increased crystallinity of NiO grown over the gold nanoparticles and (ii) the spillover effect of GNPs in NiO. MEMS technology used to produce the sensor chip with thin active layers makes it possible to drastically reduce the energy consumption of the sensor.</div></div>\",\"PeriodicalId\":100923,\"journal\":{\"name\":\"Micro and Nanostructures\",\"volume\":\"207 \",\"pages\":\"Article 208318\"},\"PeriodicalIF\":3.0000,\"publicationDate\":\"2025-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nanostructures\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S277301232500247X\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nanostructures","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S277301232500247X","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
Effect of gold nanoparticles on resistive type nickel oxide based MEMS gas sensor properties
The technology to produce hydrogen sulphide sensor with a sensitive layer based on nickel oxide on a silicon chip is presented. Response of the sensor to H2S in concentrations from 1 to 70 ppm at 190 °C operating temperature is investigated. Modification of NiO film with gold nanoparticles (GNPs) significantly improves sensitivity level. The sensing layer made of NiO embedded with GNPs shows five times higher response and improved response time compared to pure nickel oxide one. The response time under 70 ppm H2S in Ar exposure is ∼5 s and the recovery time is ∼28 min. The enhanced sensitivity of NiO embedded with GNPs is attributed to (i) the increased crystallinity of NiO grown over the gold nanoparticles and (ii) the spillover effect of GNPs in NiO. MEMS technology used to produce the sensor chip with thin active layers makes it possible to drastically reduce the energy consumption of the sensor.
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