Sebastian Onder, Jürgen Burin, Philipp Gaggl, Andreas Gsponer, Thomas Bergauer, Simon Waid
{"title":"面向碳化硅单片有源像素辐射传感器","authors":"Sebastian Onder, Jürgen Burin, Philipp Gaggl, Andreas Gsponer, Thomas Bergauer, Simon Waid","doi":"10.1016/j.mee.2025.112386","DOIUrl":null,"url":null,"abstract":"<div><div>Future collider experiments demand a new generation of tracking detectors with excellent spatial and temporal resolution, along with enhanced radiation hardness. Monolithic active pixel sensors (MAPS) based on silicon CMOS technology are proven to provide fine spatial and temporal resolution while being cost-effective. In terms of radiation hardness, however, wide band-gap semiconductors such as silicon carbide (SiC) promise superior performance. In this work, we make a first step towards MAPS development based on SiC-CMOS technology. We used the Fraunhofer IISB 2<!--> <!-->µm SiC-CMOS process to design the first stage in the electronic read-out chain of a MAPS, a charge-sensitive amplifier (CSA). Circuit simulations show that an equivalent noise charge of <span><math><mrow><mn>95</mn><mspace></mspace><mstyle><mi>e</mi></mstyle></mrow></math></span> to <span><math><mrow><mn>205</mn><mspace></mspace><mstyle><mi>e</mi></mstyle></mrow></math></span> is attainable for an input capacitance in the range of <span><math><mrow><mn>0</mn><mo>.</mo><mn>5</mn><mspace></mspace><mstyle><mi>p</mi><mi>F</mi></mstyle></mrow></math></span> to <span><math><mrow><mn>4</mn><mo>.</mo><mn>5</mn><mspace></mspace><mstyle><mi>p</mi><mi>F</mi></mstyle></mrow></math></span> at room temperature. The attained bandwidth of <span><math><mrow><mn>31</mn><mspace></mspace><mstyle><mi>k</mi><mi>H</mi><mi>z</mi></mstyle></mrow></math></span> was primarily limited by the large size of the MOSFETs in the used SiC-CMOS technology. We believe that a further increase in integration density could make SiC-MAPS a compelling alternative to its silicon-based counterparts.</div></div>","PeriodicalId":18557,"journal":{"name":"Microelectronic Engineering","volume":"301 ","pages":"Article 112386"},"PeriodicalIF":3.1000,"publicationDate":"2025-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Towards silicon carbide monolithic active pixel radiation sensors\",\"authors\":\"Sebastian Onder, Jürgen Burin, Philipp Gaggl, Andreas Gsponer, Thomas Bergauer, Simon Waid\",\"doi\":\"10.1016/j.mee.2025.112386\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Future collider experiments demand a new generation of tracking detectors with excellent spatial and temporal resolution, along with enhanced radiation hardness. Monolithic active pixel sensors (MAPS) based on silicon CMOS technology are proven to provide fine spatial and temporal resolution while being cost-effective. In terms of radiation hardness, however, wide band-gap semiconductors such as silicon carbide (SiC) promise superior performance. In this work, we make a first step towards MAPS development based on SiC-CMOS technology. We used the Fraunhofer IISB 2<!--> <!-->µm SiC-CMOS process to design the first stage in the electronic read-out chain of a MAPS, a charge-sensitive amplifier (CSA). Circuit simulations show that an equivalent noise charge of <span><math><mrow><mn>95</mn><mspace></mspace><mstyle><mi>e</mi></mstyle></mrow></math></span> to <span><math><mrow><mn>205</mn><mspace></mspace><mstyle><mi>e</mi></mstyle></mrow></math></span> is attainable for an input capacitance in the range of <span><math><mrow><mn>0</mn><mo>.</mo><mn>5</mn><mspace></mspace><mstyle><mi>p</mi><mi>F</mi></mstyle></mrow></math></span> to <span><math><mrow><mn>4</mn><mo>.</mo><mn>5</mn><mspace></mspace><mstyle><mi>p</mi><mi>F</mi></mstyle></mrow></math></span> at room temperature. The attained bandwidth of <span><math><mrow><mn>31</mn><mspace></mspace><mstyle><mi>k</mi><mi>H</mi><mi>z</mi></mstyle></mrow></math></span> was primarily limited by the large size of the MOSFETs in the used SiC-CMOS technology. We believe that a further increase in integration density could make SiC-MAPS a compelling alternative to its silicon-based counterparts.</div></div>\",\"PeriodicalId\":18557,\"journal\":{\"name\":\"Microelectronic Engineering\",\"volume\":\"301 \",\"pages\":\"Article 112386\"},\"PeriodicalIF\":3.1000,\"publicationDate\":\"2025-09-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronic Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0167931725000759\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronic Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0167931725000759","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Towards silicon carbide monolithic active pixel radiation sensors
Future collider experiments demand a new generation of tracking detectors with excellent spatial and temporal resolution, along with enhanced radiation hardness. Monolithic active pixel sensors (MAPS) based on silicon CMOS technology are proven to provide fine spatial and temporal resolution while being cost-effective. In terms of radiation hardness, however, wide band-gap semiconductors such as silicon carbide (SiC) promise superior performance. In this work, we make a first step towards MAPS development based on SiC-CMOS technology. We used the Fraunhofer IISB 2 µm SiC-CMOS process to design the first stage in the electronic read-out chain of a MAPS, a charge-sensitive amplifier (CSA). Circuit simulations show that an equivalent noise charge of to is attainable for an input capacitance in the range of to at room temperature. The attained bandwidth of was primarily limited by the large size of the MOSFETs in the used SiC-CMOS technology. We believe that a further increase in integration density could make SiC-MAPS a compelling alternative to its silicon-based counterparts.
期刊介绍:
Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.