在用于AlScN-on-Si剪切- baw谐振器的Si中间体上,在±0.125°C的烤箱控制下实现<±25 ppb的频率稳定性

IF 5.2 1区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Everestus Ezike;Ratul Kundu;Shaurya Dabas;Banafsheh Jabbari;Shruti Mishra;Dicheng Mo;Honggyu Kim;Zetian Mi;Roozbeh Tabrizian;Baibhab Chatterjee
{"title":"在用于AlScN-on-Si剪切- baw谐振器的Si中间体上,在±0.125°C的烤箱控制下实现<±25 ppb的频率稳定性","authors":"Everestus Ezike;Ratul Kundu;Shaurya Dabas;Banafsheh Jabbari;Shruti Mishra;Dicheng Mo;Honggyu Kim;Zetian Mi;Roozbeh Tabrizian;Baibhab Chatterjee","doi":"10.1109/TCSI.2025.3590669","DOIUrl":null,"url":null,"abstract":"A major challenge of long-term clock stability is frequency drift due to temperature variations. This paper describes the design of a proportional, integral, derivative (PID) control system for external ovenization of an AlScN-on-Si Shear-BAW Resonator (S<sup>3</sup>R), which has a fixed turnover temperature where the <inline-formula> <tex-math>$1{^{\\text {st}}}$ </tex-math></inline-formula> order temperature coefficient of frequency is <inline-formula> <tex-math>$\\approx 0$ </tex-math></inline-formula> ppm/°C. The control system provides <inline-formula> <tex-math>$\\pm ~0.125^{\\circ }$ </tex-math></inline-formula>C temperature stability and assists in achieving better than <inline-formula> <tex-math>$\\pm ~25$ </tex-math></inline-formula>ppb frequency stability over a temperature range of 15-40°C by maintaining resonator operation near the turnover temperature, where the <inline-formula> <tex-math>$2{^{\\text {nd}}}$ </tex-math></inline-formula> order temperature coefficient of frequency drift is -62.71ppb/°C<sup>2</sup>. The robust and adaptive PID algorithm (programmed on an external microcontroller unit connected to the interposer) ensures continuous ovenization by configuring the duty cycle of a compact heat actuator (powerMOS) that is placed in <3.5mm> <tex-math>$\\times 2$ </tex-math></inline-formula>mm resonator and a complementary to absolute temperature sensor (implemented as a 1mm<inline-formula> <tex-math>$\\times 1$ </tex-math></inline-formula>mm, 65nm integrated circuit), that are all held on a thermally conductive 7mm<inline-formula> <tex-math>$\\times$ </tex-math></inline-formula>7mm Si interposer.","PeriodicalId":13039,"journal":{"name":"IEEE Transactions on Circuits and Systems I: Regular Papers","volume":"72 9","pages":"4455-4468"},"PeriodicalIF":5.2000,"publicationDate":"2025-08-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Achieving < ±25 ppb Frequency Stability With a ±0.125 °C Oven Control on a Si Interposer for an AlScN-on-Si Shear-BAW Resonator\",\"authors\":\"Everestus Ezike;Ratul Kundu;Shaurya Dabas;Banafsheh Jabbari;Shruti Mishra;Dicheng Mo;Honggyu Kim;Zetian Mi;Roozbeh Tabrizian;Baibhab Chatterjee\",\"doi\":\"10.1109/TCSI.2025.3590669\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A major challenge of long-term clock stability is frequency drift due to temperature variations. This paper describes the design of a proportional, integral, derivative (PID) control system for external ovenization of an AlScN-on-Si Shear-BAW Resonator (S<sup>3</sup>R), which has a fixed turnover temperature where the <inline-formula> <tex-math>$1{^{\\\\text {st}}}$ </tex-math></inline-formula> order temperature coefficient of frequency is <inline-formula> <tex-math>$\\\\approx 0$ </tex-math></inline-formula> ppm/°C. The control system provides <inline-formula> <tex-math>$\\\\pm ~0.125^{\\\\circ }$ </tex-math></inline-formula>C temperature stability and assists in achieving better than <inline-formula> <tex-math>$\\\\pm ~25$ </tex-math></inline-formula>ppb frequency stability over a temperature range of 15-40°C by maintaining resonator operation near the turnover temperature, where the <inline-formula> <tex-math>$2{^{\\\\text {nd}}}$ </tex-math></inline-formula> order temperature coefficient of frequency drift is -62.71ppb/°C<sup>2</sup>. The robust and adaptive PID algorithm (programmed on an external microcontroller unit connected to the interposer) ensures continuous ovenization by configuring the duty cycle of a compact heat actuator (powerMOS) that is placed in <3.5mm> <tex-math>$\\\\times 2$ </tex-math></inline-formula>mm resonator and a complementary to absolute temperature sensor (implemented as a 1mm<inline-formula> <tex-math>$\\\\times 1$ </tex-math></inline-formula>mm, 65nm integrated circuit), that are all held on a thermally conductive 7mm<inline-formula> <tex-math>$\\\\times$ </tex-math></inline-formula>7mm Si interposer.\",\"PeriodicalId\":13039,\"journal\":{\"name\":\"IEEE Transactions on Circuits and Systems I: Regular Papers\",\"volume\":\"72 9\",\"pages\":\"4455-4468\"},\"PeriodicalIF\":5.2000,\"publicationDate\":\"2025-08-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Circuits and Systems I: Regular Papers\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11112518/\",\"RegionNum\":1,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Circuits and Systems I: Regular Papers","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11112518/","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

摘要

长期时钟稳定性的一个主要挑战是由于温度变化引起的频率漂移。本文描述了一种用于AlScN-on-Si剪切- baw谐振器(S3R)外部烘箱的比例、积分、导数(PID)控制系统的设计,该系统具有固定的翻转温度,其中$1{^{\text {st}}}$阶频率温度系数$ $约为0$ ppm/°C。控制系统提供$\pm ~0.125^{\circ}$ C的温度稳定性,并有助于在15-40°C的温度范围内实现优于$\pm ~25$ ppb的频率稳定性,通过保持谐振器在周转温度附近工作,其中$2{^{\text{和}}}$阶频率漂移温度系数为-62.71ppb/°C2。鲁棒和自适应PID算法(在连接到中间层的外部微控制器单元上编程)通过配置紧凑型热致动器(powerMOS)的占空比来确保连续烘烤,该致动器放置在$\times 2$ mm谐振器中,并补充绝对温度传感器(实现为1mm $\times 1$ mm, 65nm集成电路),所有这些都保持在导热7mm $\times 7mm Si中间层上。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Achieving < ±25 ppb Frequency Stability With a ±0.125 °C Oven Control on a Si Interposer for an AlScN-on-Si Shear-BAW Resonator
A major challenge of long-term clock stability is frequency drift due to temperature variations. This paper describes the design of a proportional, integral, derivative (PID) control system for external ovenization of an AlScN-on-Si Shear-BAW Resonator (S3R), which has a fixed turnover temperature where the $1{^{\text {st}}}$ order temperature coefficient of frequency is $\approx 0$ ppm/°C. The control system provides $\pm ~0.125^{\circ }$ C temperature stability and assists in achieving better than $\pm ~25$ ppb frequency stability over a temperature range of 15-40°C by maintaining resonator operation near the turnover temperature, where the $2{^{\text {nd}}}$ order temperature coefficient of frequency drift is -62.71ppb/°C2. The robust and adaptive PID algorithm (programmed on an external microcontroller unit connected to the interposer) ensures continuous ovenization by configuring the duty cycle of a compact heat actuator (powerMOS) that is placed in <3.5mm> $\times 2$ mm resonator and a complementary to absolute temperature sensor (implemented as a 1mm $\times 1$ mm, 65nm integrated circuit), that are all held on a thermally conductive 7mm $\times$ 7mm Si interposer.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
IEEE Transactions on Circuits and Systems I: Regular Papers
IEEE Transactions on Circuits and Systems I: Regular Papers 工程技术-工程:电子与电气
CiteScore
9.80
自引率
11.80%
发文量
441
审稿时长
2 months
期刊介绍: TCAS I publishes regular papers in the field specified by the theory, analysis, design, and practical implementations of circuits, and the application of circuit techniques to systems and to signal processing. Included is the whole spectrum from basic scientific theory to industrial applications. The field of interest covered includes: - Circuits: Analog, Digital and Mixed Signal Circuits and Systems - Nonlinear Circuits and Systems, Integrated Sensors, MEMS and Systems on Chip, Nanoscale Circuits and Systems, Optoelectronic - Circuits and Systems, Power Electronics and Systems - Software for Analog-and-Logic Circuits and Systems - Control aspects of Circuits and Systems.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信