{"title":"在用于AlScN-on-Si剪切- baw谐振器的Si中间体上,在±0.125°C的烤箱控制下实现<±25 ppb的频率稳定性","authors":"Everestus Ezike;Ratul Kundu;Shaurya Dabas;Banafsheh Jabbari;Shruti Mishra;Dicheng Mo;Honggyu Kim;Zetian Mi;Roozbeh Tabrizian;Baibhab Chatterjee","doi":"10.1109/TCSI.2025.3590669","DOIUrl":null,"url":null,"abstract":"A major challenge of long-term clock stability is frequency drift due to temperature variations. This paper describes the design of a proportional, integral, derivative (PID) control system for external ovenization of an AlScN-on-Si Shear-BAW Resonator (S<sup>3</sup>R), which has a fixed turnover temperature where the <inline-formula> <tex-math>$1{^{\\text {st}}}$ </tex-math></inline-formula> order temperature coefficient of frequency is <inline-formula> <tex-math>$\\approx 0$ </tex-math></inline-formula> ppm/°C. The control system provides <inline-formula> <tex-math>$\\pm ~0.125^{\\circ }$ </tex-math></inline-formula>C temperature stability and assists in achieving better than <inline-formula> <tex-math>$\\pm ~25$ </tex-math></inline-formula>ppb frequency stability over a temperature range of 15-40°C by maintaining resonator operation near the turnover temperature, where the <inline-formula> <tex-math>$2{^{\\text {nd}}}$ </tex-math></inline-formula> order temperature coefficient of frequency drift is -62.71ppb/°C<sup>2</sup>. The robust and adaptive PID algorithm (programmed on an external microcontroller unit connected to the interposer) ensures continuous ovenization by configuring the duty cycle of a compact heat actuator (powerMOS) that is placed in <3.5mm> <tex-math>$\\times 2$ </tex-math></inline-formula>mm resonator and a complementary to absolute temperature sensor (implemented as a 1mm<inline-formula> <tex-math>$\\times 1$ </tex-math></inline-formula>mm, 65nm integrated circuit), that are all held on a thermally conductive 7mm<inline-formula> <tex-math>$\\times$ </tex-math></inline-formula>7mm Si interposer.","PeriodicalId":13039,"journal":{"name":"IEEE Transactions on Circuits and Systems I: Regular Papers","volume":"72 9","pages":"4455-4468"},"PeriodicalIF":5.2000,"publicationDate":"2025-08-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Achieving < ±25 ppb Frequency Stability With a ±0.125 °C Oven Control on a Si Interposer for an AlScN-on-Si Shear-BAW Resonator\",\"authors\":\"Everestus Ezike;Ratul Kundu;Shaurya Dabas;Banafsheh Jabbari;Shruti Mishra;Dicheng Mo;Honggyu Kim;Zetian Mi;Roozbeh Tabrizian;Baibhab Chatterjee\",\"doi\":\"10.1109/TCSI.2025.3590669\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A major challenge of long-term clock stability is frequency drift due to temperature variations. This paper describes the design of a proportional, integral, derivative (PID) control system for external ovenization of an AlScN-on-Si Shear-BAW Resonator (S<sup>3</sup>R), which has a fixed turnover temperature where the <inline-formula> <tex-math>$1{^{\\\\text {st}}}$ </tex-math></inline-formula> order temperature coefficient of frequency is <inline-formula> <tex-math>$\\\\approx 0$ </tex-math></inline-formula> ppm/°C. The control system provides <inline-formula> <tex-math>$\\\\pm ~0.125^{\\\\circ }$ </tex-math></inline-formula>C temperature stability and assists in achieving better than <inline-formula> <tex-math>$\\\\pm ~25$ </tex-math></inline-formula>ppb frequency stability over a temperature range of 15-40°C by maintaining resonator operation near the turnover temperature, where the <inline-formula> <tex-math>$2{^{\\\\text {nd}}}$ </tex-math></inline-formula> order temperature coefficient of frequency drift is -62.71ppb/°C<sup>2</sup>. The robust and adaptive PID algorithm (programmed on an external microcontroller unit connected to the interposer) ensures continuous ovenization by configuring the duty cycle of a compact heat actuator (powerMOS) that is placed in <3.5mm> <tex-math>$\\\\times 2$ </tex-math></inline-formula>mm resonator and a complementary to absolute temperature sensor (implemented as a 1mm<inline-formula> <tex-math>$\\\\times 1$ </tex-math></inline-formula>mm, 65nm integrated circuit), that are all held on a thermally conductive 7mm<inline-formula> <tex-math>$\\\\times$ </tex-math></inline-formula>7mm Si interposer.\",\"PeriodicalId\":13039,\"journal\":{\"name\":\"IEEE Transactions on Circuits and Systems I: Regular Papers\",\"volume\":\"72 9\",\"pages\":\"4455-4468\"},\"PeriodicalIF\":5.2000,\"publicationDate\":\"2025-08-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Circuits and Systems I: Regular Papers\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11112518/\",\"RegionNum\":1,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Circuits and Systems I: Regular Papers","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11112518/","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Achieving < ±25 ppb Frequency Stability With a ±0.125 °C Oven Control on a Si Interposer for an AlScN-on-Si Shear-BAW Resonator
A major challenge of long-term clock stability is frequency drift due to temperature variations. This paper describes the design of a proportional, integral, derivative (PID) control system for external ovenization of an AlScN-on-Si Shear-BAW Resonator (S3R), which has a fixed turnover temperature where the $1{^{\text {st}}}$ order temperature coefficient of frequency is $\approx 0$ ppm/°C. The control system provides $\pm ~0.125^{\circ }$ C temperature stability and assists in achieving better than $\pm ~25$ ppb frequency stability over a temperature range of 15-40°C by maintaining resonator operation near the turnover temperature, where the $2{^{\text {nd}}}$ order temperature coefficient of frequency drift is -62.71ppb/°C2. The robust and adaptive PID algorithm (programmed on an external microcontroller unit connected to the interposer) ensures continuous ovenization by configuring the duty cycle of a compact heat actuator (powerMOS) that is placed in <3.5mm> $\times 2$ mm resonator and a complementary to absolute temperature sensor (implemented as a 1mm$\times 1$ mm, 65nm integrated circuit), that are all held on a thermally conductive 7mm$\times$ 7mm Si interposer.
期刊介绍:
TCAS I publishes regular papers in the field specified by the theory, analysis, design, and practical implementations of circuits, and the application of circuit techniques to systems and to signal processing. Included is the whole spectrum from basic scientific theory to industrial applications. The field of interest covered includes: - Circuits: Analog, Digital and Mixed Signal Circuits and Systems - Nonlinear Circuits and Systems, Integrated Sensors, MEMS and Systems on Chip, Nanoscale Circuits and Systems, Optoelectronic - Circuits and Systems, Power Electronics and Systems - Software for Analog-and-Logic Circuits and Systems - Control aspects of Circuits and Systems.