用离轴电子全息技术研究开孔环境TEM中气基电荷补偿

IF 2.2 3区工程技术 Q1 MICROSCOPY

Micron Pub Date : 2025-08-19 DOI:10.1016/j.micron.2025.103896

Makoto Tokoro Schreiber , Cathal Cassidy

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引用次数: 0

摘要

在电子轰击下，电绝缘样品会积累净电荷，这会对电子显微镜中的测量产生不利影响。本文通过离轴电子全息技术对TEM中气基电荷补偿进行了初步研究。根据目前的数据，似乎气体流动的引入可逆地降低了介电样品上电荷积聚和波动的程度。因此，使用气体可以对通常会被充电过程严重扭曲、不稳定或损坏的样品进行研究；以及对充电过程本身的进一步研究。然而，由于目前的结果是在低空间分辨率的洛伦兹光学和第二尺度时间分辨率下获得的，我们警告说，气体基电荷补偿在高空间和时间分辨率下的有效性尚未得到证明。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Study of gas-based charge compensation in an open-cell environmental TEM by off-axis electron holography

Under electron bombardment, electrically insulating samples accumulate a net charge which can adversely affect measurements in electron microscopy. Here, we present a preliminary study on gas-based charge compensation in TEM quantified through off-axis electron holography. Based on the present data, it appears that the introduction of a gas flow reversibly reduces the degree of charge buildup and fluctuations on a dielectric sample. The use of gas may thus allow for the study of samples which would normally be strongly distorted, unstable, or damaged by the charging process; as well as further studies of the charging process itself. However, as the present results were obtained with low spatial resolution Lorentz optics and second-scale time resolutions, we caution that the effectiveness of gas-based charge compensation for high spatial and temporal resolutions is not yet demonstrated.

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来源期刊

Micron 工程技术-显微镜技术

CiteScore

4.30

自引率

4.20%

发文量

100

审稿时长

31 days

期刊介绍： Micron is an interdisciplinary forum for all work that involves new applications of microscopy or where advanced microscopy plays a central role. The journal will publish on the design, methods, application, practice or theory of microscopy and microanalysis, including reports on optical, electron-beam, X-ray microtomography, and scanning-probe systems. It also aims at the regular publication of review papers, short communications, as well as thematic issues on contemporary developments in microscopy and microanalysis. The journal embraces original research in which microscopy has contributed significantly to knowledge in biology, life science, nanoscience and nanotechnology, materials science and engineering.