用于二维电子器件的硒化铟晶圆

IF 40.9 1区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

Nature Electronics Pub Date : 2025-08-18 DOI:10.1038/s41928-025-01450-x

Matthew Parker

引用次数: 0

摘要

来自北京大学、中国人民大学、苏州大学和苏州实验室的研究人员首先通过磁控溅射在蓝宝石晶圆上沉积了一层非晶铟硒薄膜。然后将晶圆片放置在一个钢盆中，上面覆盖着熔融二氧化硅“盖子”，并在边缘用液态铟密封。最后，加热组件以使非晶InSe再结晶。形成富铟的液体界面，与非晶态InSe相比，降低了结晶InSe的形成能量，并且由于设置是密封的，铟与硒的比例得以保持。用晶体InSe和2.6 nm厚的HfO2电介质制成的二维场效应晶体管阵列显示出287 cm2的平均迁移率V−1 s−1和67 mV dec−1的亚阈值振荡。原始参考文献：Science 389, 299-302 （2025）

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nature Electronics Engineering-Electrical and Electronic Engineering

CiteScore

47.50

自引率

2.30%

发文量

159

期刊介绍： Nature Electronics is a comprehensive journal that publishes both fundamental and applied research in the field of electronics. It encompasses a wide range of topics, including the study of new phenomena and devices, the design and construction of electronic circuits, and the practical applications of electronics. In addition, the journal explores the commercial and industrial aspects of electronics research. The primary focus of Nature Electronics is on the development of technology and its potential impact on society. The journal incorporates the contributions of scientists, engineers, and industry professionals, offering a platform for their research findings. Moreover, Nature Electronics provides insightful commentary, thorough reviews, and analysis of the key issues that shape the field, as well as the technologies that are reshaping society. Like all journals within the prestigious Nature brand, Nature Electronics upholds the highest standards of quality. It maintains a dedicated team of professional editors and follows a fair and rigorous peer-review process. The journal also ensures impeccable copy-editing and production, enabling swift publication. Additionally, Nature Electronics prides itself on its editorial independence, ensuring unbiased and impartial reporting. In summary, Nature Electronics is a leading journal that publishes cutting-edge research in electronics. With its multidisciplinary approach and commitment to excellence, the journal serves as a valuable resource for scientists, engineers, and industry professionals seeking to stay at the forefront of advancements in the field.