Rosalyn Koscica*, Alec M. Skipper, Bei Shi, Gerald Leake, Michael Zylstra, Joshua Herman, Yuan Liu, Chongxin Zhang, David Harame, Jonathan Klamkin and John Bowers,
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引用次数: 0
摘要
III-V量子点(QD)光电探测器实现了在电信o波段的片上传感,具有高响应性和低暗电流。我们首次展示了与氮化硅波导和III-V QD激光器单片集成的III-V QD光电探测器。III-V量子点材料是异质外延生长在硅光子片上的口袋中,在那里它被加工成III-V脊波导,作为光电探测器和激光器。光电探测器的暗电流为250 pA,在-2 V偏置下的响应率为0.344 a /W。光电探测器与激光器集成在一个环路配置正确测量阈值电流和波导内光功率在几毫瓦的水平。这项工作展示了在硅光子学平台上的多功能III-V器件,在不需要额外工艺步骤的情况下,实现了更广泛的单片集成有源元件。
Quantum Dot Photodetector and Laser Monolithically Integrated on Silicon Photonics
III–V quantum dot (QD) photodetectors enable on-chip sensing in the telecommunications O-band with high responsivity and low dark current. We demonstrate for the first time III–V QD photodetectors monolithically integrated with silicon nitride waveguides and III–V QD lasers. III–V QD material is heteroepitaxially grown in pockets on silicon photonics coupons, where it is coprocessed into III–V ridge waveguides serving as both photodetectors and lasers. The photodetectors have a dark current of 250 pA and a responsivity of 0.344 A/W at a –2 V bias. Photodetectors integrated with lasers in a loop configuration correctly measure threshold current and in-waveguide optical power at the few-mW level. This work demonstrates multifunctional III–V devices on the silicon photonics platform, enabling a wider variety of monolithically integrated active components without the need for additional process steps.
期刊介绍:
Published as soon as accepted and summarized in monthly issues, ACS Photonics will publish Research Articles, Letters, Perspectives, and Reviews, to encompass the full scope of published research in this field.