一种沉积类金刚石薄膜的新技术:阴极圆柱体等离子沉积

IF 2.3 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
JOM Pub Date : 2025-07-16 DOI:10.1007/s11837-025-07572-z
Anthunes Íkaro de Araújo, Igor Oliveira Nascimento, Michelle Cequeira Feitor, Maxwell Santana Libório, Álvaro Albueno da Silva Linhares, Pâmala Samara Vieira, Salete Martins Alves, Rômulo Ribeiro Magalhães de Sousa, Cleânio da Luz Lima, Ediones Maciel de Sousa, Thercio Henrique de Carvalho Costa
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引用次数: 0

摘要

采用阴极圆柱等离子体沉积(CCyPD)技术,研究了沉积温度对AISI 4340钢表面类金刚石(DLC)膜形成的影响。在350°C、400°C和450°C的乙炔气氛中沉积薄膜,并使用拉曼光谱、x射线衍射(XRD)、维氏硬度测试和摩擦系数测试对样品进行了表征。结果表明,提高沉积温度对DLC薄膜的微观结构和摩擦学性能有显著影响。在450°C时,由于sp3碳浓度的增加,膜的硬度更高,结构更致密,刚性更强。然而,观察到薄膜厚度的显著减少,可能是由于碳沉积效率和结构致密化的增加。在400℃下沉积的薄膜在硬度和耐磨性之间表现出最佳的平衡。这些发现突出了温度控制在优化DLC薄膜的机械和摩擦学性能方面的关键作用,可用于各种工业应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Novel Technology to Deposition Diamond-Like Carbon Thin Films: Cathodic Cylinder Plasma Deposition

This study investigates the influence of deposition temperature on the formation of diamond-Like carbon (DLC) films on AISI 4340 steel using the cathodic cylinder plasma deposition (CCyPD) technique. The films were deposited in an acetylene atmosphere at 350°C, 400°C, and 450°C, and the samples were characterized using Raman spectroscopy, X-ray diffraction (XRD), Vickers hardness testing, and friction coefficient measurements. The results indicate that increasing the deposition temperature significantly impacts the microstructure and tribological properties of the DLC films. At 450°C, the films exhibited higher hardness due to the increased concentration of sp3 carbon, which led to a denser and more rigid structure. However, a notable reduction in film thickness was observed, likely due to increased carbon deposition efficiency and structural densification. The film deposited at 400°C demonstrated the optimal balance between hardness and wear resistance. These findings highlight the critical role of temperature control in optimizing the mechanical and tribological properties of DLC films for various industrial applications.

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来源期刊
JOM
JOM 工程技术-材料科学:综合
CiteScore
4.50
自引率
3.80%
发文量
540
审稿时长
2.8 months
期刊介绍: JOM is a technical journal devoted to exploring the many aspects of materials science and engineering. JOM reports scholarly work that explores the state-of-the-art processing, fabrication, design, and application of metals, ceramics, plastics, composites, and other materials. In pursuing this goal, JOM strives to balance the interests of the laboratory and the marketplace by reporting academic, industrial, and government-sponsored work from around the world.
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