Michele Rosso , Federico Maspero , Annachiara Esposito , Tarek Afifi Afifi , Manuel Riani , Gabriele Gattere , Andrea Di Matteo , Alberto Corigliano , Raffaele Ardito
{"title":"MEMS中AlN的表征:动态测试、静态轮廓测量和增强的降阶模型的协同使用","authors":"Michele Rosso , Federico Maspero , Annachiara Esposito , Tarek Afifi Afifi , Manuel Riani , Gabriele Gattere , Andrea Di Matteo , Alberto Corigliano , Raffaele Ardito","doi":"10.1016/j.euromechsol.2025.105834","DOIUrl":null,"url":null,"abstract":"<div><div>This work presents a method for the characterization of piezoelectric MEMS by combining dynamic and static testing with an advanced analytical model. The proposed identification procedure effectively determines the piezoelectric constant through static measurements, while dynamic actuation experiments are employed to extract the dielectric constant and the quality factor. The advanced analytical model is versatile, allowing the methodology to be applied seamlessly to the analysis of both piezoelectric beams and plates. In this study, the procedure is applied to a MEMS cantilever plate equipped with a layer of AlN. The results validate the effectiveness of the proposed methodology, showing strong agreement with values obtained from other approaches in the literature.</div></div>","PeriodicalId":50483,"journal":{"name":"European Journal of Mechanics A-Solids","volume":"115 ","pages":"Article 105834"},"PeriodicalIF":4.2000,"publicationDate":"2025-08-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Characterization of AlN in MEMS: Synergistic use of dynamic testing, static profilometry, and an enhanced reduced-order model\",\"authors\":\"Michele Rosso , Federico Maspero , Annachiara Esposito , Tarek Afifi Afifi , Manuel Riani , Gabriele Gattere , Andrea Di Matteo , Alberto Corigliano , Raffaele Ardito\",\"doi\":\"10.1016/j.euromechsol.2025.105834\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This work presents a method for the characterization of piezoelectric MEMS by combining dynamic and static testing with an advanced analytical model. The proposed identification procedure effectively determines the piezoelectric constant through static measurements, while dynamic actuation experiments are employed to extract the dielectric constant and the quality factor. The advanced analytical model is versatile, allowing the methodology to be applied seamlessly to the analysis of both piezoelectric beams and plates. In this study, the procedure is applied to a MEMS cantilever plate equipped with a layer of AlN. The results validate the effectiveness of the proposed methodology, showing strong agreement with values obtained from other approaches in the literature.</div></div>\",\"PeriodicalId\":50483,\"journal\":{\"name\":\"European Journal of Mechanics A-Solids\",\"volume\":\"115 \",\"pages\":\"Article 105834\"},\"PeriodicalIF\":4.2000,\"publicationDate\":\"2025-08-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"European Journal of Mechanics A-Solids\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0997753825002682\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"MECHANICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"European Journal of Mechanics A-Solids","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0997753825002682","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MECHANICS","Score":null,"Total":0}
Characterization of AlN in MEMS: Synergistic use of dynamic testing, static profilometry, and an enhanced reduced-order model
This work presents a method for the characterization of piezoelectric MEMS by combining dynamic and static testing with an advanced analytical model. The proposed identification procedure effectively determines the piezoelectric constant through static measurements, while dynamic actuation experiments are employed to extract the dielectric constant and the quality factor. The advanced analytical model is versatile, allowing the methodology to be applied seamlessly to the analysis of both piezoelectric beams and plates. In this study, the procedure is applied to a MEMS cantilever plate equipped with a layer of AlN. The results validate the effectiveness of the proposed methodology, showing strong agreement with values obtained from other approaches in the literature.
期刊介绍:
The European Journal of Mechanics endash; A/Solids continues to publish articles in English in all areas of Solid Mechanics from the physical and mathematical basis to materials engineering, technological applications and methods of modern computational mechanics, both pure and applied research.