利用光交联剂调节有机半导体多种特性的直接光刻技术

IF 4.6 3区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
Yueping Lai, Liang-Wen Feng
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引用次数: 0

摘要

光交联剂作为具有负光刻胶特性的材料,被广泛应用于有机半导体器件的直接光刻工艺中。与常用的有机光刻工艺相比,直接光刻工艺只需要三个步骤:旋转镀膜、曝光和显影,就可以实现有机半导体通道的光学图案,无需复杂的程序,如保护、烘烤、蚀刻和转移。此外,在此过程中,光交联剂留在混合薄膜中,随后影响半导体薄膜的晶体结构和形貌。这些变化将进一步影响有机膜的多种性能。利用这一特性,设计光交联剂可以有效调节和提高器件的拉伸性能、载流子迁移率、稳定性和介电性能。该方法有效地实现了有机集成电路的高精度图像化,同时提高了有机集成电路的各种性能属性。虽然有一些相关的报道,但对这些光交联剂对半导体的影响还没有系统的总结和组织。对于直接光刻技术的未来发展,系统的组织是至关重要的。因此,本文对光交联剂在有机薄膜器件中的作用进行了系统的分类和总结,为直接光刻中新型光交联剂的设计提供指导,提高半导体器件的多项性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Direct Lithography for Regulating Multiple Properties of Organic Semiconductors via Photo-Crosslinkers

Direct Lithography for Regulating Multiple Properties of Organic Semiconductors via Photo-Crosslinkers

Photo-crosslinkers, as materials with negative photoresist characteristics, are applied in the direct lithography process of organic semiconductor devices. Compared to commonly used organic lithography processes, the direct lithography process only requires three steps: spin-coating, exposure, and development, to achieve optical patterning of the organic semiconductor channel, eliminating the need for complex procedures such as protection, baking, etching, and transfer. Furthermore, during this process, the photo-crosslinker remains in the blended film, subsequently influencing the crystalline structure and morphology of the semiconductor film. These alterations will further impact multiple properties of the organic film. By utilizing this characteristic, the design of photo-crosslinker can effectively regulate and enhance the tensile properties, charge carrier mobility, stability, and dielectric properties of the device. This approach effectively enables high-precision patterning of organic integrated circuits while synchronously enhancing their various performance attributes. Although there are some relevant reports, a systematic summary and organization of the impact of these photo-crosslinkers on semiconductors remains absent. For the future development of direct lithography, systematic organization is crucial. Therefore, this review systematically classifies and summarizes the functions of photo-crosslinkers in organic thin film devices, providing guidance for the design of novel photo-crosslinkers in direct lithography and improve multiple properties of semiconductor devices.

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来源期刊
Macromolecular Materials and Engineering
Macromolecular Materials and Engineering 工程技术-材料科学:综合
CiteScore
7.30
自引率
5.10%
发文量
328
审稿时长
1.6 months
期刊介绍: Macromolecular Materials and Engineering is the high-quality polymer science journal dedicated to the design, modification, characterization, processing and application of advanced polymeric materials, including membranes, sensors, sustainability, composites, fibers, foams, 3D printing, actuators as well as energy and electronic applications. Macromolecular Materials and Engineering is among the top journals publishing original research in polymer science. The journal presents strictly peer-reviewed Research Articles, Reviews, Perspectives and Comments. ISSN: 1438-7492 (print). 1439-2054 (online). Readership:Polymer scientists, chemists, physicists, materials scientists, engineers Abstracting and Indexing Information: CAS: Chemical Abstracts Service (ACS) CCR Database (Clarivate Analytics) Chemical Abstracts Service/SciFinder (ACS) Chemistry Server Reaction Center (Clarivate Analytics) ChemWeb (ChemIndustry.com) Chimica Database (Elsevier) COMPENDEX (Elsevier) Current Contents: Physical, Chemical & Earth Sciences (Clarivate Analytics) Directory of Open Access Journals (DOAJ) INSPEC (IET) Journal Citation Reports/Science Edition (Clarivate Analytics) Materials Science & Engineering Database (ProQuest) PASCAL Database (INIST/CNRS) Polymer Library (iSmithers RAPRA) Reaction Citation Index (Clarivate Analytics) Science Citation Index (Clarivate Analytics) Science Citation Index Expanded (Clarivate Analytics) SciTech Premium Collection (ProQuest) SCOPUS (Elsevier) Technology Collection (ProQuest) Web of Science (Clarivate Analytics)
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