外延缓冲层对重离子诱导SiC结势垒肖特基二极管电性能下降的影响

IF 1.4 3区 物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION
Shiwei Zhao , Jie Liu , Yuzhu Liu , Xiaoyu Yan , PeiPei Hu , Teng Zhang , Yu Dong , Pengfei Zhai , Youmei Sun
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引用次数: 0

摘要

碳化硅(SiC)结势垒-肖特基(JBS)二极管由于其优越的材料特性,包括高电压耐受性、快速开关速度和优异的抗辐射损伤能力,在高功率和高辐射环境中变得越来越重要。然而,SiC器件容易受到单事件效应(SEE)的影响,特别是在重离子辐照下。在SiC材料内部离子诱导产生大量的电子-空穴对,再加上器件耗尽区的高电场,导致高度局域化的能量脉冲和功耗。这将导致器件材料的辐射损伤,最终导致器件的电气性能下降。本研究研究了具有梯度掺杂的缓冲结构对SiC JBS二极管单事件燃断(SEB)和单事件漏电流(SELC)阈值的影响。采用不同线性能量传递(LET)值的重离子辐照来评估器件在反向偏置条件下的性能。结果表明,与基线结构相比,缓冲结构显著提高了SEB阈值,降低了高LET照射下击穿的风险。此外,该研究使用TCAD模拟分析了LET和偏置电压对功耗和电场分布的影响,揭示了缓冲结构减轻了高电场浓度,它通过调制电场分布和降低器件内特定位置的功率密度峰值来增强器件对SELC和SEB的抗性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of epitaxial buffer layer on SiC junction barrier Schottky diodes electrical performance degradation induced by heavy ions
Silicon carbide (SiC) Junction-Barrier-Schottky (JBS) diodes are becoming increasingly important for high-power and high-radiation environments due to their superior material properties, including high voltage tolerance, fast switching speeds, and excellent resistance to radiation-induced damage. However, SiC devices are vulnerable to single-event effects (SEE), especially under heavy ion irradiation. Ion-induced generation of a large number of electron-hole pairs within the SiC material, coupled with the high electric field in the device’s depletion region, results in highly localized energy pulses and power dissipation. This leads to the radiation damage in the device material, ultimately causing degradation of the device’s electrical performance. This study investigates the impact of a Buffer structure with a graded doping profile on the single-event burnout (SEB) and single-event leakage current (SELC) thresholds of SiC JBS diodes. Heavy ion irradiation with different linear energy transfer (LET) values was used to assess the device performance under reverse bias conditions. The results show that the Buffer structure significantly improves the SEB threshold compared to the Baseline structure, reducing the risk of breakdown under high LET irradiation. Additionally, the study uses TCAD simulations to analyse the influence of LET and bias voltage on power dissipation and electric field distribution, revealing that the Buffer structure mitigates high electric field concentrations, it enhances the device’s resistance to SELC and SEB by modulating the electric field distribution and reducing power density peaks at specific locations within the device.
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来源期刊
CiteScore
2.80
自引率
7.70%
发文量
231
审稿时长
1.9 months
期刊介绍: Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.
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