利用晶圆级纳米制造多层衍射光学处理器的宽带单向可见光成像

IF 23.4 Q1 OPTICS
Che-Yung Shen, Paolo Batoni, Xilin Yang, Jingxi Li, Kun Liao, Jared Stack, Jeff Gardner, Kevin Welch, Aydogan Ozcan
{"title":"利用晶圆级纳米制造多层衍射光学处理器的宽带单向可见光成像","authors":"Che-Yung Shen, Paolo Batoni, Xilin Yang, Jingxi Li, Kun Liao, Jared Stack, Jeff Gardner, Kevin Welch, Aydogan Ozcan","doi":"10.1038/s41377-025-01971-2","DOIUrl":null,"url":null,"abstract":"<p>We present a broadband and polarization-insensitive unidirectional imager that operates at the visible part of the spectrum, where image formation occurs in one direction, while in the opposite direction, it is blocked. This approach is enabled by deep learning-driven diffractive optical design with wafer-scale nano-fabrication using high-purity fused silica to ensure optical transparency and thermal stability. Our design achieves unidirectional imaging across three visible wavelengths (covering red, green, and blue parts of the spectrum), and we experimentally validated this broadband unidirectional imager by creating high-fidelity images in the forward direction and generating weak, distorted output patterns in the backward direction, in alignment with our numerical simulations. This work demonstrates wafer-scale production of diffractive optical processors, featuring 16 levels of nanoscale phase features distributed across two axially aligned diffractive layers for visible unidirectional imaging. This approach facilitates mass-scale production of ~0.5 billion nanoscale phase features per wafer, supporting high-throughput manufacturing of hundreds to thousands of multi-layer diffractive processors suitable for large apertures and parallel processing of multiple tasks. Beyond broadband unidirectional imaging in the visible spectrum, this study establishes a pathway for artificial-intelligence-enabled diffractive optics with versatile applications, signaling a new era in optical device functionality with industrial-level, massively scalable fabrication.</p>","PeriodicalId":18069,"journal":{"name":"Light-Science & Applications","volume":"52 1","pages":""},"PeriodicalIF":23.4000,"publicationDate":"2025-08-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Broadband unidirectional visible imaging using wafer-scale nano-fabrication of multi-layer diffractive optical processors\",\"authors\":\"Che-Yung Shen, Paolo Batoni, Xilin Yang, Jingxi Li, Kun Liao, Jared Stack, Jeff Gardner, Kevin Welch, Aydogan Ozcan\",\"doi\":\"10.1038/s41377-025-01971-2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>We present a broadband and polarization-insensitive unidirectional imager that operates at the visible part of the spectrum, where image formation occurs in one direction, while in the opposite direction, it is blocked. This approach is enabled by deep learning-driven diffractive optical design with wafer-scale nano-fabrication using high-purity fused silica to ensure optical transparency and thermal stability. Our design achieves unidirectional imaging across three visible wavelengths (covering red, green, and blue parts of the spectrum), and we experimentally validated this broadband unidirectional imager by creating high-fidelity images in the forward direction and generating weak, distorted output patterns in the backward direction, in alignment with our numerical simulations. This work demonstrates wafer-scale production of diffractive optical processors, featuring 16 levels of nanoscale phase features distributed across two axially aligned diffractive layers for visible unidirectional imaging. This approach facilitates mass-scale production of ~0.5 billion nanoscale phase features per wafer, supporting high-throughput manufacturing of hundreds to thousands of multi-layer diffractive processors suitable for large apertures and parallel processing of multiple tasks. Beyond broadband unidirectional imaging in the visible spectrum, this study establishes a pathway for artificial-intelligence-enabled diffractive optics with versatile applications, signaling a new era in optical device functionality with industrial-level, massively scalable fabrication.</p>\",\"PeriodicalId\":18069,\"journal\":{\"name\":\"Light-Science & Applications\",\"volume\":\"52 1\",\"pages\":\"\"},\"PeriodicalIF\":23.4000,\"publicationDate\":\"2025-08-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Light-Science & Applications\",\"FirstCategoryId\":\"1089\",\"ListUrlMain\":\"https://doi.org/10.1038/s41377-025-01971-2\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Light-Science & Applications","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.1038/s41377-025-01971-2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0

摘要

我们提出了一种宽带和偏振不敏感的单向成像仪,它在光谱的可见部分工作,其中图像形成发生在一个方向,而在相反的方向,它被阻挡。这种方法是通过深度学习驱动的衍射光学设计实现的,该设计采用高纯度熔融二氧化硅进行晶圆级纳米制造,以确保光学透明度和热稳定性。我们的设计实现了三个可见波长(覆盖光谱的红色、绿色和蓝色部分)的单向成像,我们通过实验验证了这个宽带单向成像仪,通过在正向创建高保真图像,并在反向生成弱的、扭曲的输出模式,与我们的数值模拟一致。这项工作展示了衍射光学处理器的晶圆级生产,具有16级纳米级相位特征,分布在两个轴向排列的衍射层上,用于可见的单向成像。这种方法有助于大规模生产每片晶圆约5亿个纳米级相特征,支持数百到数千个适用于大孔径和多任务并行处理的多层衍射处理器的高通量制造。除了可见光谱中的宽带单向成像之外,本研究还为具有多种应用的人工智能衍射光学建立了一条途径,标志着光学器件功能的新时代,具有工业级,大规模可扩展的制造。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Broadband unidirectional visible imaging using wafer-scale nano-fabrication of multi-layer diffractive optical processors

Broadband unidirectional visible imaging using wafer-scale nano-fabrication of multi-layer diffractive optical processors

We present a broadband and polarization-insensitive unidirectional imager that operates at the visible part of the spectrum, where image formation occurs in one direction, while in the opposite direction, it is blocked. This approach is enabled by deep learning-driven diffractive optical design with wafer-scale nano-fabrication using high-purity fused silica to ensure optical transparency and thermal stability. Our design achieves unidirectional imaging across three visible wavelengths (covering red, green, and blue parts of the spectrum), and we experimentally validated this broadband unidirectional imager by creating high-fidelity images in the forward direction and generating weak, distorted output patterns in the backward direction, in alignment with our numerical simulations. This work demonstrates wafer-scale production of diffractive optical processors, featuring 16 levels of nanoscale phase features distributed across two axially aligned diffractive layers for visible unidirectional imaging. This approach facilitates mass-scale production of ~0.5 billion nanoscale phase features per wafer, supporting high-throughput manufacturing of hundreds to thousands of multi-layer diffractive processors suitable for large apertures and parallel processing of multiple tasks. Beyond broadband unidirectional imaging in the visible spectrum, this study establishes a pathway for artificial-intelligence-enabled diffractive optics with versatile applications, signaling a new era in optical device functionality with industrial-level, massively scalable fabrication.

求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Light-Science & Applications
Light-Science & Applications 数理科学, 物理学I, 光学, 凝聚态物性 II :电子结构、电学、磁学和光学性质, 无机非金属材料, 无机非金属类光电信息与功能材料, 工程与材料, 信息科学, 光学和光电子学, 光学和光电子材料, 非线性光学与量子光学
自引率
0.00%
发文量
803
审稿时长
2.1 months
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信