Multispectral Polarization-Insensitive Graphene/Silicon Guided Mode Resonance Active Metasurfaces

An advanced complementary metal-oxide-semiconductor (CMOS)compatible graphene/silicon multispectral active metasurfaces are investigated based on guided-mode resonance filters. The simulated results show a high extinction ratio (>25 dB), narrow linewidth (≈1.5 @1550 nm), quality factor of Q ≈ 1000, and polarization-insensitive operation. By taking advantage of graphene broadband absorption, the device operation is presented in the multiple spectral bands (NIR-MIR) using simple geometrical scaling rules. The same device architecture can be employed for combined electro-optic and thermo-optic tuning using graphene as an integrated microheater. This work contributes to the development of advanced broadband silicon-based active metasurfaces for tunable spectral filters and laser mirrors, optical switches, modulators, and sensors.