High-Speed Piezoelectric MEMS Laser Tracking System for Different Intensity Illuminations

Laser tracking systems are essential for applications such as communication, guidance, and uncrewed aerial vehicle (UAV) control. Traditional mechanical systems face challenges such as slow response times, interference from bright lights, and bulky designs. In contrast, the laser tracking system based on micro-electromechanical system (MEMS) mirrors proposed in this article offers advantages such as high speed, robustness in different intensity illuminations, and compactness. To achieve high-speed tracking, optimizations are conducted in MEMS mirror design and control, and the size selection of scanning patterns. After these optimizations, a maximum tracking speed of 3.77 m/s at 5 m is achieved. To ensure stable tracking for different intensity illuminations, optimizations are implemented in differential algorithms and optical filters for noise removal, as well as the single-mode (SM) fiber-coupled laser and variable gain amplifier (VGA) of photodiode (PD) for enhancing signal intensity. Finally, the tracking distance test has demonstrated stable target tracking at 110 m. The tracking test of the UAV in motion has also been completed. These tests have validated the system’s tracking capabilities in specific application scenarios, providing a reference for the large-scale application of the tracking system.