{"title":"利用InxAl1-xAs缓冲层组成过调增强扩展波长InxGa1-xAs焦平面阵列的性能","authors":"Xiaojuan Chen;Bowen Liu;Jifeng Cheng;Liyi Yang;Runze Xia;Yingjie Ma;Xiumei Shao;Yi Gu;Xue Li;Haimei Gong;Jiaxiong Fang","doi":"10.1109/JQE.2025.3583238","DOIUrl":null,"url":null,"abstract":"Performances of In0.75 Ga0.25 As focal plane arrays (FPAs) with an extended cutoff wavelength of <inline-formula> <tex-math>$2.2~\\mu $ </tex-math></inline-formula>m are remarkably improved by largely increasing the overshooting composition of the linearly-grading Inx Al<inline-formula> <tex-math>${}_{\\text {1-x}}$ </tex-math></inline-formula> As buffer layer. Zinc-diffused planar <inline-formula> <tex-math>$640\\times 488$ </tex-math></inline-formula> FPAs with a pixel pitch of <inline-formula> <tex-math>$23~\\mu $ </tex-math></inline-formula>m are fabricated on both the regular and the large overshooting epi-wafers with x=0.77 and x=0.85 for the end compositions of the linearly-grading Inx Al<inline-formula> <tex-math>${}_{\\text {1-x}}$ </tex-math></inline-formula> As, respectively. An order of magnitude lower dark current density of <inline-formula> <tex-math>$1.1 \\times 10 ^{-10}$ </tex-math></inline-formula> A/cm2 is achieved at 150 K for the large overshooting FPAs when comparing with <inline-formula> <tex-math>$2.1\\times 10 ^{-9}$ </tex-math></inline-formula> A/cm2 for the regular FPAs. Suppressed dark signal and dark noise voltages are observed simultaneously over the measured whole integration time range. Moreover, the measured non-uniformity of the light response signal voltage drastically dropped from 16.4% to 2.9% while the peak detectivity substantially jumped from <inline-formula> <tex-math>$7.1 \\times 10 ^{12}$ </tex-math></inline-formula> to <inline-formula> <tex-math>$1.8 \\times 10 ^{13}$ </tex-math></inline-formula> cmHz<inline-formula> <tex-math>${}^{1/2}$ </tex-math></inline-formula>W−1. A signal to noise ratio enhanced laboratory imaging demonstration is also provided. These results suggest the large overshooting epitaxial technology can serve as a highly viable route for the lattice-mismatched Inx Ga<inline-formula> <tex-math>${}_{\\text {1-x}}$ </tex-math></inline-formula> As FPAs towards further performance enhancement.","PeriodicalId":13200,"journal":{"name":"IEEE Journal of Quantum Electronics","volume":"61 4","pages":"1-7"},"PeriodicalIF":2.1000,"publicationDate":"2025-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Enhanced Performance of Extended Wavelength InxGa1–xAs Focal Plane Arrays via Compositional Overshooting of InxAl1–xAs Buffer Layer\",\"authors\":\"Xiaojuan Chen;Bowen Liu;Jifeng Cheng;Liyi Yang;Runze Xia;Yingjie Ma;Xiumei Shao;Yi Gu;Xue Li;Haimei Gong;Jiaxiong Fang\",\"doi\":\"10.1109/JQE.2025.3583238\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Performances of In0.75 Ga0.25 As focal plane arrays (FPAs) with an extended cutoff wavelength of <inline-formula> <tex-math>$2.2~\\\\mu $ </tex-math></inline-formula>m are remarkably improved by largely increasing the overshooting composition of the linearly-grading Inx Al<inline-formula> <tex-math>${}_{\\\\text {1-x}}$ </tex-math></inline-formula> As buffer layer. Zinc-diffused planar <inline-formula> <tex-math>$640\\\\times 488$ </tex-math></inline-formula> FPAs with a pixel pitch of <inline-formula> <tex-math>$23~\\\\mu $ </tex-math></inline-formula>m are fabricated on both the regular and the large overshooting epi-wafers with x=0.77 and x=0.85 for the end compositions of the linearly-grading Inx Al<inline-formula> <tex-math>${}_{\\\\text {1-x}}$ </tex-math></inline-formula> As, respectively. An order of magnitude lower dark current density of <inline-formula> <tex-math>$1.1 \\\\times 10 ^{-10}$ </tex-math></inline-formula> A/cm2 is achieved at 150 K for the large overshooting FPAs when comparing with <inline-formula> <tex-math>$2.1\\\\times 10 ^{-9}$ </tex-math></inline-formula> A/cm2 for the regular FPAs. Suppressed dark signal and dark noise voltages are observed simultaneously over the measured whole integration time range. Moreover, the measured non-uniformity of the light response signal voltage drastically dropped from 16.4% to 2.9% while the peak detectivity substantially jumped from <inline-formula> <tex-math>$7.1 \\\\times 10 ^{12}$ </tex-math></inline-formula> to <inline-formula> <tex-math>$1.8 \\\\times 10 ^{13}$ </tex-math></inline-formula> cmHz<inline-formula> <tex-math>${}^{1/2}$ </tex-math></inline-formula>W−1. A signal to noise ratio enhanced laboratory imaging demonstration is also provided. These results suggest the large overshooting epitaxial technology can serve as a highly viable route for the lattice-mismatched Inx Ga<inline-formula> <tex-math>${}_{\\\\text {1-x}}$ </tex-math></inline-formula> As FPAs towards further performance enhancement.\",\"PeriodicalId\":13200,\"journal\":{\"name\":\"IEEE Journal of Quantum Electronics\",\"volume\":\"61 4\",\"pages\":\"1-7\"},\"PeriodicalIF\":2.1000,\"publicationDate\":\"2025-06-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Journal of Quantum Electronics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11050398/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Journal of Quantum Electronics","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11050398/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Enhanced Performance of Extended Wavelength InxGa1–xAs Focal Plane Arrays via Compositional Overshooting of InxAl1–xAs Buffer Layer
Performances of In0.75 Ga0.25 As focal plane arrays (FPAs) with an extended cutoff wavelength of $2.2~\mu $ m are remarkably improved by largely increasing the overshooting composition of the linearly-grading Inx Al${}_{\text {1-x}}$ As buffer layer. Zinc-diffused planar $640\times 488$ FPAs with a pixel pitch of $23~\mu $ m are fabricated on both the regular and the large overshooting epi-wafers with x=0.77 and x=0.85 for the end compositions of the linearly-grading Inx Al${}_{\text {1-x}}$ As, respectively. An order of magnitude lower dark current density of $1.1 \times 10 ^{-10}$ A/cm2 is achieved at 150 K for the large overshooting FPAs when comparing with $2.1\times 10 ^{-9}$ A/cm2 for the regular FPAs. Suppressed dark signal and dark noise voltages are observed simultaneously over the measured whole integration time range. Moreover, the measured non-uniformity of the light response signal voltage drastically dropped from 16.4% to 2.9% while the peak detectivity substantially jumped from $7.1 \times 10 ^{12}$ to $1.8 \times 10 ^{13}$ cmHz${}^{1/2}$ W−1. A signal to noise ratio enhanced laboratory imaging demonstration is also provided. These results suggest the large overshooting epitaxial technology can serve as a highly viable route for the lattice-mismatched Inx Ga${}_{\text {1-x}}$ As FPAs towards further performance enhancement.
期刊介绍:
The IEEE Journal of Quantum Electronics is dedicated to the publication of manuscripts reporting novel experimental or theoretical results in the broad field of the science and technology of quantum electronics. The Journal comprises original contributions, both regular papers and letters, describing significant advances in the understanding of quantum electronics phenomena or the demonstration of new devices, systems, or applications. Manuscripts reporting new developments in systems and applications must emphasize quantum electronics principles or devices. The scope of JQE encompasses the generation, propagation, detection, and application of coherent electromagnetic radiation having wavelengths below one millimeter (i.e., in the submillimeter, infrared, visible, ultraviolet, etc., regions). Whether the focus of a manuscript is a quantum-electronic device or phenomenon, the critical factor in the editorial review of a manuscript is the potential impact of the results presented on continuing research in the field or on advancing the technological base of quantum electronics.